1/20/2011	9:35:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	9:35:59 AM	Recipe started at 9:35 AM
1/20/2011	9:35:59 AM	H2 valve closed
1/20/2011	9:35:59 AM	BCl3 valve closed
1/20/2011	9:35:59 AM	PH3 valve closed
1/20/2011	9:35:59 AM	SiCl4 pre valve closed
1/20/2011	9:35:59 AM	SiCl4 post valve closed
1/20/2011	9:35:59 AM	Main Vac valve closed
1/20/2011	9:35:59 AM	Bypass valve closed
1/20/2011	9:35:59 AM	Bubbler valve closed
1/20/2011	9:35:59 AM	Helium valve opened
1/20/2011	9:35:59 AM	Helium MFC set to  500.000000
1/20/2011	9:35:59 AM	H2 MFC set to  0.000000
1/20/2011	9:35:59 AM	BCl3 MFC set to  0.000000
1/20/2011	9:35:59 AM	PHl3 MFC set to  0.000000
1/20/2011	9:35:59 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:35:59 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:36:00 AM	Tube furnace set to 0
1/20/2011	9:37:20 AM	Helium valve closed
1/20/2011	9:37:20 AM	H2 valve closed
1/20/2011	9:37:20 AM	BCl3 valve closed
1/20/2011	9:37:20 AM	PH3 valve closed
1/20/2011	9:37:20 AM	SiCl4 pre valve closed
1/20/2011	9:37:20 AM	SiCl4 post valve closed
1/20/2011	9:37:20 AM	Main Vac valve closed
1/20/2011	9:37:20 AM	Bypass valve closed
1/20/2011	9:37:20 AM	Bubbler valve closed
1/20/2011	9:37:20 AM	Helium MFC set to  0.000000
1/20/2011	9:37:20 AM	H2 MFC set to  0.000000
1/20/2011	9:37:20 AM	BCl3 MFC set to  0.000000
1/20/2011	9:37:20 AM	PHl3 MFC set to  0.000000
1/20/2011	9:37:20 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:37:20 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:37:20 AM	Tube furnace set to 0
1/20/2011	9:37:20 AM	Run finished at 9:37 AM
1/20/2011	9:37:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	9:46:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	9:46:51 AM	Recipe started at 9:46 AM
1/20/2011	9:46:52 AM	Helium valve closed
1/20/2011	9:46:52 AM	H2 valve closed
1/20/2011	9:46:52 AM	BCl3 valve closed
1/20/2011	9:46:52 AM	PH3 valve closed
1/20/2011	9:46:52 AM	SiCl4 pre valve closed
1/20/2011	9:46:52 AM	SiCl4 post valve closed
1/20/2011	9:46:52 AM	Main Vac valve closed
1/20/2011	9:46:52 AM	Bubbler valve closed
1/20/2011	9:46:52 AM	Bypass valve opened
1/20/2011	9:46:52 AM	Helium MFC set to  0.000000
1/20/2011	9:46:52 AM	H2 MFC set to  0.000000
1/20/2011	9:46:52 AM	BCl3 MFC set to  0.000000
1/20/2011	9:46:52 AM	PHl3 MFC set to  0.000000
1/20/2011	9:46:52 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:46:52 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:46:52 AM	Tube furnace set to 0
1/20/2011	9:47:23 AM	Helium valve closed
1/20/2011	9:47:23 AM	H2 valve closed
1/20/2011	9:47:23 AM	BCl3 valve closed
1/20/2011	9:47:23 AM	PH3 valve closed
1/20/2011	9:47:23 AM	SiCl4 pre valve closed
1/20/2011	9:47:23 AM	SiCl4 post valve closed
1/20/2011	9:47:23 AM	Bubbler valve closed
1/20/2011	9:47:23 AM	Main Vac valve opened
1/20/2011	9:47:23 AM	Bypass valve opened
1/20/2011	9:47:23 AM	Helium MFC set to  0.000000
1/20/2011	9:47:23 AM	H2 MFC set to  0.000000
1/20/2011	9:47:23 AM	BCl3 MFC set to  0.000000
1/20/2011	9:47:23 AM	PHl3 MFC set to  0.000000
1/20/2011	9:47:23 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:47:23 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:47:23 AM	Tube furnace set to 0
1/20/2011	9:47:23 AM	Run finished at 9:47 AM
1/20/2011	9:47:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	9:50:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	9:50:36 AM	Recipe started at 9:50 AM
1/20/2011	9:50:36 AM	Helium valve closed
1/20/2011	9:50:36 AM	H2 valve closed
1/20/2011	9:50:36 AM	BCl3 valve closed
1/20/2011	9:50:36 AM	PH3 valve closed
1/20/2011	9:50:36 AM	SiCl4 pre valve closed
1/20/2011	9:50:36 AM	SiCl4 post valve closed
1/20/2011	9:50:36 AM	Main Vac valve closed
1/20/2011	9:50:36 AM	Bubbler valve closed
1/20/2011	9:50:36 AM	Bypass valve opened
1/20/2011	9:50:36 AM	Helium MFC set to  0.000000
1/20/2011	9:50:36 AM	H2 MFC set to  0.000000
1/20/2011	9:50:36 AM	BCl3 MFC set to  0.000000
1/20/2011	9:50:36 AM	PHl3 MFC set to  0.000000
1/20/2011	9:50:36 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:50:36 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:50:36 AM	Tube furnace set to 0
1/20/2011	9:50:36 AM	Helium valve closed
1/20/2011	9:50:36 AM	H2 valve closed
1/20/2011	9:50:36 AM	BCl3 valve closed
1/20/2011	9:50:36 AM	PH3 valve closed
1/20/2011	9:50:36 AM	SiCl4 pre valve closed
1/20/2011	9:50:36 AM	SiCl4 post valve closed
1/20/2011	9:50:36 AM	Bubbler valve closed
1/20/2011	9:50:36 AM	Main Vac valve opened
1/20/2011	9:50:36 AM	Bypass valve opened
1/20/2011	9:50:36 AM	Helium MFC set to  0.000000
1/20/2011	9:50:36 AM	H2 MFC set to  0.000000
1/20/2011	9:50:37 AM	BCl3 MFC set to  0.000000
1/20/2011	9:50:37 AM	PHl3 MFC set to  0.000000
1/20/2011	9:50:37 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:50:37 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:50:37 AM	Tube furnace set to 0
1/20/2011	9:51:37 AM	H2 valve closed
1/20/2011	9:51:37 AM	BCl3 valve closed
1/20/2011	9:51:37 AM	PH3 valve closed
1/20/2011	9:51:37 AM	SiCl4 pre valve closed
1/20/2011	9:51:37 AM	SiCl4 post valve closed
1/20/2011	9:51:37 AM	Bubbler valve closed
1/20/2011	9:51:37 AM	Helium valve opened
1/20/2011	9:51:37 AM	Main Vac valve opened
1/20/2011	9:51:37 AM	Bypass valve opened
1/20/2011	9:51:37 AM	Helium MFC set to  100.000000
1/20/2011	9:51:37 AM	H2 MFC set to  0.000000
1/20/2011	9:51:37 AM	BCl3 MFC set to  0.000000
1/20/2011	9:51:37 AM	PHl3 MFC set to  0.000000
1/20/2011	9:51:37 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:51:37 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:51:37 AM	Tube furnace set to 0
1/20/2011	9:52:37 AM	Helium valve closed
1/20/2011	9:52:37 AM	H2 valve closed
1/20/2011	9:52:37 AM	BCl3 valve closed
1/20/2011	9:52:37 AM	PH3 valve closed
1/20/2011	9:52:37 AM	SiCl4 pre valve closed
1/20/2011	9:52:37 AM	SiCl4 post valve closed
1/20/2011	9:52:37 AM	Bubbler valve closed
1/20/2011	9:52:37 AM	Main Vac valve opened
1/20/2011	9:52:37 AM	Bypass valve opened
1/20/2011	9:52:37 AM	Helium MFC set to  0.000000
1/20/2011	9:52:37 AM	H2 MFC set to  0.000000
1/20/2011	9:52:37 AM	BCl3 MFC set to  0.000000
1/20/2011	9:52:37 AM	PHl3 MFC set to  0.000000
1/20/2011	9:52:37 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:52:37 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:52:37 AM	Tube furnace set to 0
1/20/2011	9:53:37 AM	H2 valve closed
1/20/2011	9:53:37 AM	BCl3 valve closed
1/20/2011	9:53:37 AM	PH3 valve closed
1/20/2011	9:53:37 AM	SiCl4 pre valve closed
1/20/2011	9:53:37 AM	SiCl4 post valve closed
1/20/2011	9:53:37 AM	Bubbler valve closed
1/20/2011	9:53:37 AM	Helium valve opened
1/20/2011	9:53:37 AM	Main Vac valve opened
1/20/2011	9:53:37 AM	Bypass valve opened
1/20/2011	9:53:37 AM	Helium MFC set to  100.000000
1/20/2011	9:53:37 AM	H2 MFC set to  0.000000
1/20/2011	9:53:37 AM	BCl3 MFC set to  0.000000
1/20/2011	9:53:37 AM	PHl3 MFC set to  0.000000
1/20/2011	9:53:37 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:53:37 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:53:37 AM	Tube furnace set to 0
1/20/2011	9:54:37 AM	Helium valve closed
1/20/2011	9:54:37 AM	H2 valve closed
1/20/2011	9:54:37 AM	BCl3 valve closed
1/20/2011	9:54:37 AM	PH3 valve closed
1/20/2011	9:54:37 AM	SiCl4 pre valve closed
1/20/2011	9:54:37 AM	SiCl4 post valve closed
1/20/2011	9:54:37 AM	Bubbler valve closed
1/20/2011	9:54:37 AM	Main Vac valve opened
1/20/2011	9:54:37 AM	Bypass valve opened
1/20/2011	9:54:37 AM	Helium MFC set to  0.000000
1/20/2011	9:54:37 AM	H2 MFC set to  0.000000
1/20/2011	9:54:37 AM	BCl3 MFC set to  0.000000
1/20/2011	9:54:37 AM	PHl3 MFC set to  0.000000
1/20/2011	9:54:37 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:54:37 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:54:38 AM	Tube furnace set to 0
1/20/2011	9:55:38 AM	H2 valve closed
1/20/2011	9:55:38 AM	BCl3 valve closed
1/20/2011	9:55:38 AM	PH3 valve closed
1/20/2011	9:55:38 AM	SiCl4 pre valve closed
1/20/2011	9:55:38 AM	SiCl4 post valve closed
1/20/2011	9:55:38 AM	Bubbler valve closed
1/20/2011	9:55:38 AM	Helium valve opened
1/20/2011	9:55:38 AM	Main Vac valve opened
1/20/2011	9:55:38 AM	Bypass valve opened
1/20/2011	9:55:38 AM	Helium MFC set to  100.000000
1/20/2011	9:55:38 AM	H2 MFC set to  0.000000
1/20/2011	9:55:38 AM	BCl3 MFC set to  0.000000
1/20/2011	9:55:38 AM	PHl3 MFC set to  0.000000
1/20/2011	9:55:38 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:55:38 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:55:38 AM	Tube furnace set to 0
1/20/2011	9:56:38 AM	Helium valve closed
1/20/2011	9:56:38 AM	H2 valve closed
1/20/2011	9:56:38 AM	BCl3 valve closed
1/20/2011	9:56:38 AM	PH3 valve closed
1/20/2011	9:56:38 AM	SiCl4 pre valve closed
1/20/2011	9:56:38 AM	SiCl4 post valve closed
1/20/2011	9:56:38 AM	Bubbler valve closed
1/20/2011	9:56:38 AM	Main Vac valve opened
1/20/2011	9:56:38 AM	Bypass valve opened
1/20/2011	9:56:38 AM	Helium MFC set to  0.000000
1/20/2011	9:56:38 AM	H2 MFC set to  0.000000
1/20/2011	9:56:38 AM	BCl3 MFC set to  0.000000
1/20/2011	9:56:38 AM	PHl3 MFC set to  0.000000
1/20/2011	9:56:38 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:56:38 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:56:38 AM	Tube furnace set to 0
1/20/2011	9:57:38 AM	H2 valve closed
1/20/2011	9:57:38 AM	BCl3 valve closed
1/20/2011	9:57:38 AM	PH3 valve closed
1/20/2011	9:57:38 AM	SiCl4 pre valve closed
1/20/2011	9:57:38 AM	SiCl4 post valve closed
1/20/2011	9:57:38 AM	Bubbler valve closed
1/20/2011	9:57:38 AM	Helium valve opened
1/20/2011	9:57:38 AM	Main Vac valve opened
1/20/2011	9:57:38 AM	Bypass valve opened
1/20/2011	9:57:38 AM	Helium MFC set to  100.000000
1/20/2011	9:57:38 AM	H2 MFC set to  0.000000
1/20/2011	9:57:38 AM	BCl3 MFC set to  0.000000
1/20/2011	9:57:38 AM	PHl3 MFC set to  0.000000
1/20/2011	9:57:38 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:57:38 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:57:38 AM	Tube furnace set to 0
1/20/2011	9:58:38 AM	Helium valve closed
1/20/2011	9:58:38 AM	H2 valve closed
1/20/2011	9:58:38 AM	BCl3 valve closed
1/20/2011	9:58:38 AM	PH3 valve closed
1/20/2011	9:58:38 AM	SiCl4 pre valve closed
1/20/2011	9:58:38 AM	SiCl4 post valve closed
1/20/2011	9:58:38 AM	Bubbler valve closed
1/20/2011	9:58:38 AM	Main Vac valve opened
1/20/2011	9:58:38 AM	Bypass valve opened
1/20/2011	9:58:38 AM	Helium MFC set to  0.000000
1/20/2011	9:58:38 AM	H2 MFC set to  0.000000
1/20/2011	9:58:38 AM	BCl3 MFC set to  0.000000
1/20/2011	9:58:38 AM	PHl3 MFC set to  0.000000
1/20/2011	9:58:38 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:58:38 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:58:38 AM	Tube furnace set to 0
1/20/2011	9:59:38 AM	H2 valve closed
1/20/2011	9:59:38 AM	BCl3 valve closed
1/20/2011	9:59:38 AM	PH3 valve closed
1/20/2011	9:59:38 AM	SiCl4 pre valve closed
1/20/2011	9:59:38 AM	SiCl4 post valve closed
1/20/2011	9:59:38 AM	Bubbler valve closed
1/20/2011	9:59:38 AM	Helium valve opened
1/20/2011	9:59:38 AM	Main Vac valve opened
1/20/2011	9:59:38 AM	Bypass valve opened
1/20/2011	9:59:38 AM	Helium MFC set to  100.000000
1/20/2011	9:59:38 AM	H2 MFC set to  0.000000
1/20/2011	9:59:38 AM	BCl3 MFC set to  0.000000
1/20/2011	9:59:38 AM	PHl3 MFC set to  0.000000
1/20/2011	9:59:38 AM	SiCl4 MFC set to  0.000000
1/20/2011	9:59:38 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	9:59:39 AM	Tube furnace set to 0
1/20/2011	10:00:39 AM	Helium valve closed
1/20/2011	10:00:39 AM	H2 valve closed
1/20/2011	10:00:39 AM	BCl3 valve closed
1/20/2011	10:00:39 AM	PH3 valve closed
1/20/2011	10:00:39 AM	SiCl4 pre valve closed
1/20/2011	10:00:39 AM	SiCl4 post valve closed
1/20/2011	10:00:39 AM	Bubbler valve closed
1/20/2011	10:00:39 AM	Main Vac valve opened
1/20/2011	10:00:39 AM	Bypass valve opened
1/20/2011	10:00:39 AM	Helium MFC set to  0.000000
1/20/2011	10:00:39 AM	H2 MFC set to  0.000000
1/20/2011	10:00:39 AM	BCl3 MFC set to  0.000000
1/20/2011	10:00:39 AM	PHl3 MFC set to  0.000000
1/20/2011	10:00:39 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:00:39 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:00:39 AM	Tube furnace set to 0
1/20/2011	10:01:39 AM	H2 valve closed
1/20/2011	10:01:39 AM	BCl3 valve closed
1/20/2011	10:01:39 AM	PH3 valve closed
1/20/2011	10:01:39 AM	SiCl4 pre valve closed
1/20/2011	10:01:39 AM	SiCl4 post valve closed
1/20/2011	10:01:39 AM	Bubbler valve closed
1/20/2011	10:01:39 AM	Helium valve opened
1/20/2011	10:01:39 AM	Main Vac valve opened
1/20/2011	10:01:39 AM	Bypass valve opened
1/20/2011	10:01:39 AM	Helium MFC set to  100.000000
1/20/2011	10:01:39 AM	H2 MFC set to  0.000000
1/20/2011	10:01:39 AM	BCl3 MFC set to  0.000000
1/20/2011	10:01:39 AM	PHl3 MFC set to  0.000000
1/20/2011	10:01:39 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:01:39 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:01:39 AM	Tube furnace set to 0
1/20/2011	10:02:39 AM	Helium valve closed
1/20/2011	10:02:39 AM	H2 valve closed
1/20/2011	10:02:39 AM	BCl3 valve closed
1/20/2011	10:02:39 AM	PH3 valve closed
1/20/2011	10:02:39 AM	SiCl4 pre valve closed
1/20/2011	10:02:39 AM	SiCl4 post valve closed
1/20/2011	10:02:39 AM	Bubbler valve closed
1/20/2011	10:02:39 AM	Main Vac valve opened
1/20/2011	10:02:39 AM	Bypass valve opened
1/20/2011	10:02:39 AM	Helium MFC set to  0.000000
1/20/2011	10:02:39 AM	H2 MFC set to  0.000000
1/20/2011	10:02:39 AM	BCl3 MFC set to  0.000000
1/20/2011	10:02:39 AM	PHl3 MFC set to  0.000000
1/20/2011	10:02:39 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:02:39 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:02:39 AM	Tube furnace set to 0
1/20/2011	10:03:39 AM	H2 valve closed
1/20/2011	10:03:39 AM	BCl3 valve closed
1/20/2011	10:03:39 AM	PH3 valve closed
1/20/2011	10:03:39 AM	SiCl4 pre valve closed
1/20/2011	10:03:39 AM	SiCl4 post valve closed
1/20/2011	10:03:39 AM	Bubbler valve closed
1/20/2011	10:03:39 AM	Helium valve opened
1/20/2011	10:03:39 AM	Main Vac valve opened
1/20/2011	10:03:39 AM	Bypass valve opened
1/20/2011	10:03:39 AM	Helium MFC set to  100.000000
1/20/2011	10:03:39 AM	H2 MFC set to  0.000000
1/20/2011	10:03:39 AM	BCl3 MFC set to  0.000000
1/20/2011	10:03:39 AM	PHl3 MFC set to  0.000000
1/20/2011	10:03:39 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:03:39 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:03:39 AM	Tube furnace set to 0
1/20/2011	10:04:40 AM	Helium valve closed
1/20/2011	10:04:40 AM	H2 valve closed
1/20/2011	10:04:40 AM	BCl3 valve closed
1/20/2011	10:04:40 AM	PH3 valve closed
1/20/2011	10:04:40 AM	SiCl4 pre valve closed
1/20/2011	10:04:40 AM	SiCl4 post valve closed
1/20/2011	10:04:40 AM	Bubbler valve closed
1/20/2011	10:04:40 AM	Main Vac valve opened
1/20/2011	10:04:40 AM	Bypass valve opened
1/20/2011	10:04:40 AM	Helium MFC set to  0.000000
1/20/2011	10:04:40 AM	H2 MFC set to  0.000000
1/20/2011	10:04:40 AM	BCl3 MFC set to  0.000000
1/20/2011	10:04:40 AM	PHl3 MFC set to  0.000000
1/20/2011	10:04:40 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:04:40 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:04:40 AM	Tube furnace set to 0
1/20/2011	10:05:40 AM	H2 valve closed
1/20/2011	10:05:40 AM	BCl3 valve closed
1/20/2011	10:05:40 AM	PH3 valve closed
1/20/2011	10:05:40 AM	SiCl4 pre valve closed
1/20/2011	10:05:40 AM	SiCl4 post valve closed
1/20/2011	10:05:40 AM	Bubbler valve closed
1/20/2011	10:05:40 AM	Helium valve opened
1/20/2011	10:05:40 AM	Main Vac valve opened
1/20/2011	10:05:40 AM	Bypass valve opened
1/20/2011	10:05:40 AM	Helium MFC set to  100.000000
1/20/2011	10:05:40 AM	H2 MFC set to  0.000000
1/20/2011	10:05:40 AM	BCl3 MFC set to  0.000000
1/20/2011	10:05:40 AM	PHl3 MFC set to  0.000000
1/20/2011	10:05:40 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:05:40 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:05:40 AM	Tube furnace set to 0
1/20/2011	10:06:40 AM	Helium valve closed
1/20/2011	10:06:40 AM	H2 valve closed
1/20/2011	10:06:40 AM	BCl3 valve closed
1/20/2011	10:06:40 AM	PH3 valve closed
1/20/2011	10:06:40 AM	SiCl4 pre valve closed
1/20/2011	10:06:40 AM	SiCl4 post valve closed
1/20/2011	10:06:40 AM	Bubbler valve closed
1/20/2011	10:06:40 AM	Main Vac valve opened
1/20/2011	10:06:40 AM	Bypass valve opened
1/20/2011	10:06:40 AM	Helium MFC set to  0.000000
1/20/2011	10:06:40 AM	H2 MFC set to  0.000000
1/20/2011	10:06:40 AM	BCl3 MFC set to  0.000000
1/20/2011	10:06:40 AM	PHl3 MFC set to  0.000000
1/20/2011	10:06:40 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:06:40 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:06:40 AM	Tube furnace set to 0
1/20/2011	10:07:40 AM	H2 valve closed
1/20/2011	10:07:40 AM	BCl3 valve closed
1/20/2011	10:07:40 AM	PH3 valve closed
1/20/2011	10:07:40 AM	SiCl4 pre valve closed
1/20/2011	10:07:40 AM	SiCl4 post valve closed
1/20/2011	10:07:40 AM	Bubbler valve closed
1/20/2011	10:07:40 AM	Helium valve opened
1/20/2011	10:07:40 AM	Main Vac valve opened
1/20/2011	10:07:40 AM	Bypass valve opened
1/20/2011	10:07:40 AM	Helium MFC set to  100.000000
1/20/2011	10:07:40 AM	H2 MFC set to  0.000000
1/20/2011	10:07:40 AM	BCl3 MFC set to  0.000000
1/20/2011	10:07:40 AM	PHl3 MFC set to  0.000000
1/20/2011	10:07:40 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:07:40 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:07:40 AM	Tube furnace set to 0
1/20/2011	10:08:40 AM	Helium valve closed
1/20/2011	10:08:40 AM	H2 valve closed
1/20/2011	10:08:40 AM	BCl3 valve closed
1/20/2011	10:08:40 AM	PH3 valve closed
1/20/2011	10:08:40 AM	SiCl4 pre valve closed
1/20/2011	10:08:40 AM	SiCl4 post valve closed
1/20/2011	10:08:40 AM	Bubbler valve closed
1/20/2011	10:08:40 AM	Main Vac valve opened
1/20/2011	10:08:40 AM	Bypass valve opened
1/20/2011	10:08:40 AM	Helium MFC set to  0.000000
1/20/2011	10:08:40 AM	H2 MFC set to  0.000000
1/20/2011	10:08:40 AM	BCl3 MFC set to  0.000000
1/20/2011	10:08:40 AM	PHl3 MFC set to  0.000000
1/20/2011	10:08:40 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:08:40 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:08:40 AM	Tube furnace set to 0
1/20/2011	10:09:41 AM	H2 valve closed
1/20/2011	10:09:41 AM	BCl3 valve closed
1/20/2011	10:09:41 AM	PH3 valve closed
1/20/2011	10:09:41 AM	SiCl4 pre valve closed
1/20/2011	10:09:41 AM	SiCl4 post valve closed
1/20/2011	10:09:41 AM	Bubbler valve closed
1/20/2011	10:09:41 AM	Helium valve opened
1/20/2011	10:09:41 AM	Main Vac valve opened
1/20/2011	10:09:41 AM	Bypass valve opened
1/20/2011	10:09:41 AM	Helium MFC set to  100.000000
1/20/2011	10:09:41 AM	H2 MFC set to  0.000000
1/20/2011	10:09:41 AM	BCl3 MFC set to  0.000000
1/20/2011	10:09:41 AM	PHl3 MFC set to  0.000000
1/20/2011	10:09:41 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:09:41 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:09:41 AM	Tube furnace set to 0
1/20/2011	10:10:41 AM	Helium valve closed
1/20/2011	10:10:41 AM	H2 valve closed
1/20/2011	10:10:41 AM	BCl3 valve closed
1/20/2011	10:10:41 AM	PH3 valve closed
1/20/2011	10:10:41 AM	SiCl4 pre valve closed
1/20/2011	10:10:41 AM	SiCl4 post valve closed
1/20/2011	10:10:41 AM	Bubbler valve closed
1/20/2011	10:10:41 AM	Main Vac valve opened
1/20/2011	10:10:41 AM	Bypass valve opened
1/20/2011	10:10:41 AM	Helium MFC set to  0.000000
1/20/2011	10:10:41 AM	H2 MFC set to  0.000000
1/20/2011	10:10:41 AM	BCl3 MFC set to  0.000000
1/20/2011	10:10:41 AM	PHl3 MFC set to  0.000000
1/20/2011	10:10:41 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:10:41 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:10:41 AM	Tube furnace set to 0
1/20/2011	10:10:42 AM	Run finished at 10:10 AM
1/20/2011	10:10:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	10:13:26 AM	Bypass valve closed
1/20/2011	10:13:27 AM	Main Vac valve closed
1/20/2011	10:15:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	10:15:13 AM	Recipe started at 10:15 AM
1/20/2011	10:15:13 AM	Helium valve closed
1/20/2011	10:15:13 AM	H2 valve closed
1/20/2011	10:15:13 AM	BCl3 valve closed
1/20/2011	10:15:13 AM	PH3 valve closed
1/20/2011	10:15:13 AM	SiCl4 pre valve closed
1/20/2011	10:15:13 AM	SiCl4 post valve closed
1/20/2011	10:15:13 AM	Main Vac valve closed
1/20/2011	10:15:13 AM	Bubbler valve closed
1/20/2011	10:15:13 AM	Bypass valve opened
1/20/2011	10:15:13 AM	Helium MFC set to  0.000000
1/20/2011	10:15:13 AM	H2 MFC set to  0.000000
1/20/2011	10:15:13 AM	BCl3 MFC set to  0.000000
1/20/2011	10:15:13 AM	PHl3 MFC set to  0.000000
1/20/2011	10:15:13 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:15:13 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:15:13 AM	Tube furnace set to 0
1/20/2011	10:15:13 AM	Helium valve closed
1/20/2011	10:15:13 AM	H2 valve closed
1/20/2011	10:15:13 AM	BCl3 valve closed
1/20/2011	10:15:13 AM	PH3 valve closed
1/20/2011	10:15:13 AM	SiCl4 pre valve closed
1/20/2011	10:15:13 AM	SiCl4 post valve closed
1/20/2011	10:15:13 AM	Bubbler valve closed
1/20/2011	10:15:13 AM	Main Vac valve opened
1/20/2011	10:15:13 AM	Bypass valve opened
1/20/2011	10:15:13 AM	Helium MFC set to  0.000000
1/20/2011	10:15:13 AM	H2 MFC set to  0.000000
1/20/2011	10:15:13 AM	BCl3 MFC set to  0.000000
1/20/2011	10:15:13 AM	PHl3 MFC set to  0.000000
1/20/2011	10:15:13 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:15:13 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:15:13 AM	Tube furnace set to 0
1/20/2011	10:16:13 AM	H2 valve closed
1/20/2011	10:16:13 AM	BCl3 valve closed
1/20/2011	10:16:13 AM	PH3 valve closed
1/20/2011	10:16:13 AM	SiCl4 pre valve closed
1/20/2011	10:16:13 AM	SiCl4 post valve closed
1/20/2011	10:16:13 AM	Bubbler valve closed
1/20/2011	10:16:13 AM	Helium valve opened
1/20/2011	10:16:13 AM	Main Vac valve opened
1/20/2011	10:16:13 AM	Bypass valve opened
1/20/2011	10:16:13 AM	Helium MFC set to  100.000000
1/20/2011	10:16:13 AM	H2 MFC set to  0.000000
1/20/2011	10:16:13 AM	BCl3 MFC set to  0.000000
1/20/2011	10:16:13 AM	PHl3 MFC set to  0.000000
1/20/2011	10:16:13 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:16:13 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:16:14 AM	Tube furnace set to 0
1/20/2011	10:17:14 AM	Helium valve closed
1/20/2011	10:17:14 AM	H2 valve closed
1/20/2011	10:17:14 AM	BCl3 valve closed
1/20/2011	10:17:14 AM	PH3 valve closed
1/20/2011	10:17:14 AM	SiCl4 pre valve closed
1/20/2011	10:17:14 AM	SiCl4 post valve closed
1/20/2011	10:17:14 AM	Bubbler valve closed
1/20/2011	10:17:14 AM	Main Vac valve opened
1/20/2011	10:17:14 AM	Bypass valve opened
1/20/2011	10:17:14 AM	Helium MFC set to  0.000000
1/20/2011	10:17:14 AM	H2 MFC set to  0.000000
1/20/2011	10:17:14 AM	BCl3 MFC set to  0.000000
1/20/2011	10:17:14 AM	PHl3 MFC set to  0.000000
1/20/2011	10:17:14 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:17:14 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:17:14 AM	Tube furnace set to 0
1/20/2011	10:18:14 AM	H2 valve closed
1/20/2011	10:18:14 AM	BCl3 valve closed
1/20/2011	10:18:14 AM	PH3 valve closed
1/20/2011	10:18:14 AM	SiCl4 pre valve closed
1/20/2011	10:18:14 AM	SiCl4 post valve closed
1/20/2011	10:18:14 AM	Bubbler valve closed
1/20/2011	10:18:14 AM	Helium valve opened
1/20/2011	10:18:14 AM	Main Vac valve opened
1/20/2011	10:18:14 AM	Bypass valve opened
1/20/2011	10:18:14 AM	Helium MFC set to  100.000000
1/20/2011	10:18:14 AM	H2 MFC set to  0.000000
1/20/2011	10:18:14 AM	BCl3 MFC set to  0.000000
1/20/2011	10:18:14 AM	PHl3 MFC set to  0.000000
1/20/2011	10:18:14 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:18:14 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:18:14 AM	Tube furnace set to 0
1/20/2011	10:19:14 AM	Helium valve closed
1/20/2011	10:19:14 AM	H2 valve closed
1/20/2011	10:19:14 AM	BCl3 valve closed
1/20/2011	10:19:14 AM	PH3 valve closed
1/20/2011	10:19:14 AM	SiCl4 pre valve closed
1/20/2011	10:19:14 AM	SiCl4 post valve closed
1/20/2011	10:19:14 AM	Bubbler valve closed
1/20/2011	10:19:14 AM	Main Vac valve opened
1/20/2011	10:19:14 AM	Bypass valve opened
1/20/2011	10:19:14 AM	Helium MFC set to  0.000000
1/20/2011	10:19:14 AM	H2 MFC set to  0.000000
1/20/2011	10:19:14 AM	BCl3 MFC set to  0.000000
1/20/2011	10:19:14 AM	PHl3 MFC set to  0.000000
1/20/2011	10:19:14 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:19:14 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:19:14 AM	Tube furnace set to 0
1/20/2011	10:20:14 AM	H2 valve closed
1/20/2011	10:20:14 AM	BCl3 valve closed
1/20/2011	10:20:14 AM	PH3 valve closed
1/20/2011	10:20:14 AM	SiCl4 pre valve closed
1/20/2011	10:20:14 AM	SiCl4 post valve closed
1/20/2011	10:20:14 AM	Bubbler valve closed
1/20/2011	10:20:14 AM	Helium valve opened
1/20/2011	10:20:14 AM	Main Vac valve opened
1/20/2011	10:20:14 AM	Bypass valve opened
1/20/2011	10:20:14 AM	Helium MFC set to  100.000000
1/20/2011	10:20:14 AM	H2 MFC set to  0.000000
1/20/2011	10:20:14 AM	BCl3 MFC set to  0.000000
1/20/2011	10:20:14 AM	PHl3 MFC set to  0.000000
1/20/2011	10:20:14 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:20:14 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:20:14 AM	Tube furnace set to 0
1/20/2011	10:21:14 AM	Helium valve closed
1/20/2011	10:21:14 AM	H2 valve closed
1/20/2011	10:21:14 AM	BCl3 valve closed
1/20/2011	10:21:14 AM	PH3 valve closed
1/20/2011	10:21:14 AM	SiCl4 pre valve closed
1/20/2011	10:21:14 AM	SiCl4 post valve closed
1/20/2011	10:21:14 AM	Bubbler valve closed
1/20/2011	10:21:14 AM	Main Vac valve opened
1/20/2011	10:21:14 AM	Bypass valve opened
1/20/2011	10:21:14 AM	Helium MFC set to  0.000000
1/20/2011	10:21:14 AM	H2 MFC set to  0.000000
1/20/2011	10:21:14 AM	BCl3 MFC set to  0.000000
1/20/2011	10:21:14 AM	PHl3 MFC set to  0.000000
1/20/2011	10:21:14 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:21:14 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:21:15 AM	Tube furnace set to 0
1/20/2011	10:22:15 AM	H2 valve closed
1/20/2011	10:22:15 AM	BCl3 valve closed
1/20/2011	10:22:15 AM	PH3 valve closed
1/20/2011	10:22:15 AM	SiCl4 pre valve closed
1/20/2011	10:22:15 AM	SiCl4 post valve closed
1/20/2011	10:22:15 AM	Bubbler valve closed
1/20/2011	10:22:15 AM	Helium valve opened
1/20/2011	10:22:15 AM	Main Vac valve opened
1/20/2011	10:22:15 AM	Bypass valve opened
1/20/2011	10:22:15 AM	Helium MFC set to  100.000000
1/20/2011	10:22:15 AM	H2 MFC set to  0.000000
1/20/2011	10:22:15 AM	BCl3 MFC set to  0.000000
1/20/2011	10:22:15 AM	PHl3 MFC set to  0.000000
1/20/2011	10:22:15 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:22:15 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:22:15 AM	Tube furnace set to 0
1/20/2011	10:23:15 AM	Helium valve closed
1/20/2011	10:23:15 AM	H2 valve closed
1/20/2011	10:23:15 AM	BCl3 valve closed
1/20/2011	10:23:15 AM	PH3 valve closed
1/20/2011	10:23:15 AM	SiCl4 pre valve closed
1/20/2011	10:23:15 AM	SiCl4 post valve closed
1/20/2011	10:23:15 AM	Bubbler valve closed
1/20/2011	10:23:15 AM	Main Vac valve opened
1/20/2011	10:23:15 AM	Bypass valve opened
1/20/2011	10:23:15 AM	Helium MFC set to  0.000000
1/20/2011	10:23:15 AM	H2 MFC set to  0.000000
1/20/2011	10:23:15 AM	BCl3 MFC set to  0.000000
1/20/2011	10:23:15 AM	PHl3 MFC set to  0.000000
1/20/2011	10:23:15 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:23:15 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:23:15 AM	Tube furnace set to 0
1/20/2011	10:24:15 AM	H2 valve closed
1/20/2011	10:24:15 AM	BCl3 valve closed
1/20/2011	10:24:15 AM	PH3 valve closed
1/20/2011	10:24:15 AM	SiCl4 pre valve closed
1/20/2011	10:24:15 AM	SiCl4 post valve closed
1/20/2011	10:24:15 AM	Bubbler valve closed
1/20/2011	10:24:15 AM	Helium valve opened
1/20/2011	10:24:15 AM	Main Vac valve opened
1/20/2011	10:24:15 AM	Bypass valve opened
1/20/2011	10:24:15 AM	Helium MFC set to  100.000000
1/20/2011	10:24:15 AM	H2 MFC set to  0.000000
1/20/2011	10:24:15 AM	BCl3 MFC set to  0.000000
1/20/2011	10:24:15 AM	PHl3 MFC set to  0.000000
1/20/2011	10:24:15 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:24:15 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:24:15 AM	Tube furnace set to 0
1/20/2011	10:25:15 AM	Helium valve closed
1/20/2011	10:25:15 AM	H2 valve closed
1/20/2011	10:25:15 AM	BCl3 valve closed
1/20/2011	10:25:15 AM	PH3 valve closed
1/20/2011	10:25:15 AM	SiCl4 pre valve closed
1/20/2011	10:25:15 AM	SiCl4 post valve closed
1/20/2011	10:25:15 AM	Bubbler valve closed
1/20/2011	10:25:15 AM	Main Vac valve opened
1/20/2011	10:25:15 AM	Bypass valve opened
1/20/2011	10:25:15 AM	Helium MFC set to  0.000000
1/20/2011	10:25:15 AM	H2 MFC set to  0.000000
1/20/2011	10:25:15 AM	BCl3 MFC set to  0.000000
1/20/2011	10:25:15 AM	PHl3 MFC set to  0.000000
1/20/2011	10:25:15 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:25:15 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:25:15 AM	Tube furnace set to 0
1/20/2011	10:26:15 AM	H2 valve closed
1/20/2011	10:26:15 AM	BCl3 valve closed
1/20/2011	10:26:15 AM	PH3 valve closed
1/20/2011	10:26:15 AM	SiCl4 pre valve closed
1/20/2011	10:26:15 AM	SiCl4 post valve closed
1/20/2011	10:26:15 AM	Bubbler valve closed
1/20/2011	10:26:15 AM	Helium valve opened
1/20/2011	10:26:15 AM	Main Vac valve opened
1/20/2011	10:26:15 AM	Bypass valve opened
1/20/2011	10:26:15 AM	Helium MFC set to  100.000000
1/20/2011	10:26:15 AM	H2 MFC set to  0.000000
1/20/2011	10:26:15 AM	BCl3 MFC set to  0.000000
1/20/2011	10:26:15 AM	PHl3 MFC set to  0.000000
1/20/2011	10:26:15 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:26:15 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:26:16 AM	Tube furnace set to 0
1/20/2011	10:27:16 AM	Helium valve closed
1/20/2011	10:27:16 AM	H2 valve closed
1/20/2011	10:27:16 AM	BCl3 valve closed
1/20/2011	10:27:16 AM	PH3 valve closed
1/20/2011	10:27:16 AM	SiCl4 pre valve closed
1/20/2011	10:27:16 AM	SiCl4 post valve closed
1/20/2011	10:27:16 AM	Bubbler valve closed
1/20/2011	10:27:16 AM	Main Vac valve opened
1/20/2011	10:27:16 AM	Bypass valve opened
1/20/2011	10:27:16 AM	Helium MFC set to  0.000000
1/20/2011	10:27:16 AM	H2 MFC set to  0.000000
1/20/2011	10:27:16 AM	BCl3 MFC set to  0.000000
1/20/2011	10:27:16 AM	PHl3 MFC set to  0.000000
1/20/2011	10:27:16 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:27:16 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:27:16 AM	Tube furnace set to 0
1/20/2011	10:28:16 AM	H2 valve closed
1/20/2011	10:28:16 AM	BCl3 valve closed
1/20/2011	10:28:16 AM	PH3 valve closed
1/20/2011	10:28:16 AM	SiCl4 pre valve closed
1/20/2011	10:28:16 AM	SiCl4 post valve closed
1/20/2011	10:28:16 AM	Bubbler valve closed
1/20/2011	10:28:16 AM	Helium valve opened
1/20/2011	10:28:16 AM	Main Vac valve opened
1/20/2011	10:28:16 AM	Bypass valve opened
1/20/2011	10:28:16 AM	Helium MFC set to  100.000000
1/20/2011	10:28:16 AM	H2 MFC set to  0.000000
1/20/2011	10:28:16 AM	BCl3 MFC set to  0.000000
1/20/2011	10:28:16 AM	PHl3 MFC set to  0.000000
1/20/2011	10:28:16 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:28:16 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:28:16 AM	Tube furnace set to 0
1/20/2011	10:29:16 AM	Helium valve closed
1/20/2011	10:29:16 AM	H2 valve closed
1/20/2011	10:29:16 AM	BCl3 valve closed
1/20/2011	10:29:16 AM	PH3 valve closed
1/20/2011	10:29:16 AM	SiCl4 pre valve closed
1/20/2011	10:29:16 AM	SiCl4 post valve closed
1/20/2011	10:29:16 AM	Bubbler valve closed
1/20/2011	10:29:16 AM	Main Vac valve opened
1/20/2011	10:29:16 AM	Bypass valve opened
1/20/2011	10:29:16 AM	Helium MFC set to  0.000000
1/20/2011	10:29:16 AM	H2 MFC set to  0.000000
1/20/2011	10:29:16 AM	BCl3 MFC set to  0.000000
1/20/2011	10:29:16 AM	PHl3 MFC set to  0.000000
1/20/2011	10:29:16 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:29:16 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:29:16 AM	Tube furnace set to 0
1/20/2011	10:30:16 AM	H2 valve closed
1/20/2011	10:30:16 AM	BCl3 valve closed
1/20/2011	10:30:16 AM	PH3 valve closed
1/20/2011	10:30:16 AM	SiCl4 pre valve closed
1/20/2011	10:30:16 AM	SiCl4 post valve closed
1/20/2011	10:30:16 AM	Bubbler valve closed
1/20/2011	10:30:16 AM	Helium valve opened
1/20/2011	10:30:16 AM	Main Vac valve opened
1/20/2011	10:30:16 AM	Bypass valve opened
1/20/2011	10:30:16 AM	Helium MFC set to  100.000000
1/20/2011	10:30:16 AM	H2 MFC set to  0.000000
1/20/2011	10:30:16 AM	BCl3 MFC set to  0.000000
1/20/2011	10:30:16 AM	PHl3 MFC set to  0.000000
1/20/2011	10:30:16 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:30:16 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:30:16 AM	Tube furnace set to 0
1/20/2011	10:31:16 AM	Helium valve closed
1/20/2011	10:31:16 AM	H2 valve closed
1/20/2011	10:31:16 AM	BCl3 valve closed
1/20/2011	10:31:16 AM	PH3 valve closed
1/20/2011	10:31:16 AM	SiCl4 pre valve closed
1/20/2011	10:31:16 AM	SiCl4 post valve closed
1/20/2011	10:31:16 AM	Bubbler valve closed
1/20/2011	10:31:16 AM	Main Vac valve opened
1/20/2011	10:31:16 AM	Bypass valve opened
1/20/2011	10:31:16 AM	Helium MFC set to  0.000000
1/20/2011	10:31:16 AM	H2 MFC set to  0.000000
1/20/2011	10:31:16 AM	BCl3 MFC set to  0.000000
1/20/2011	10:31:16 AM	PHl3 MFC set to  0.000000
1/20/2011	10:31:16 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:31:16 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:31:17 AM	Tube furnace set to 0
1/20/2011	10:32:17 AM	H2 valve closed
1/20/2011	10:32:17 AM	BCl3 valve closed
1/20/2011	10:32:17 AM	PH3 valve closed
1/20/2011	10:32:17 AM	SiCl4 pre valve closed
1/20/2011	10:32:17 AM	SiCl4 post valve closed
1/20/2011	10:32:17 AM	Bubbler valve closed
1/20/2011	10:32:17 AM	Helium valve opened
1/20/2011	10:32:17 AM	Main Vac valve opened
1/20/2011	10:32:17 AM	Bypass valve opened
1/20/2011	10:32:17 AM	Helium MFC set to  100.000000
1/20/2011	10:32:17 AM	H2 MFC set to  0.000000
1/20/2011	10:32:17 AM	BCl3 MFC set to  0.000000
1/20/2011	10:32:17 AM	PHl3 MFC set to  0.000000
1/20/2011	10:32:17 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:32:17 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:32:17 AM	Tube furnace set to 0
1/20/2011	10:33:17 AM	Helium valve closed
1/20/2011	10:33:17 AM	H2 valve closed
1/20/2011	10:33:17 AM	BCl3 valve closed
1/20/2011	10:33:17 AM	PH3 valve closed
1/20/2011	10:33:17 AM	SiCl4 pre valve closed
1/20/2011	10:33:17 AM	SiCl4 post valve closed
1/20/2011	10:33:17 AM	Bubbler valve closed
1/20/2011	10:33:17 AM	Main Vac valve opened
1/20/2011	10:33:17 AM	Bypass valve opened
1/20/2011	10:33:17 AM	Helium MFC set to  0.000000
1/20/2011	10:33:17 AM	H2 MFC set to  0.000000
1/20/2011	10:33:17 AM	BCl3 MFC set to  0.000000
1/20/2011	10:33:17 AM	PHl3 MFC set to  0.000000
1/20/2011	10:33:17 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:33:17 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:33:17 AM	Tube furnace set to 0
1/20/2011	10:34:17 AM	H2 valve closed
1/20/2011	10:34:17 AM	BCl3 valve closed
1/20/2011	10:34:17 AM	PH3 valve closed
1/20/2011	10:34:17 AM	SiCl4 pre valve closed
1/20/2011	10:34:17 AM	SiCl4 post valve closed
1/20/2011	10:34:17 AM	Bubbler valve closed
1/20/2011	10:34:17 AM	Helium valve opened
1/20/2011	10:34:17 AM	Main Vac valve opened
1/20/2011	10:34:17 AM	Bypass valve opened
1/20/2011	10:34:17 AM	Helium MFC set to  100.000000
1/20/2011	10:34:17 AM	H2 MFC set to  0.000000
1/20/2011	10:34:17 AM	BCl3 MFC set to  0.000000
1/20/2011	10:34:17 AM	PHl3 MFC set to  0.000000
1/20/2011	10:34:17 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:34:17 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:34:17 AM	Tube furnace set to 0
1/20/2011	10:35:17 AM	Helium valve closed
1/20/2011	10:35:17 AM	H2 valve closed
1/20/2011	10:35:17 AM	BCl3 valve closed
1/20/2011	10:35:17 AM	PH3 valve closed
1/20/2011	10:35:17 AM	SiCl4 pre valve closed
1/20/2011	10:35:17 AM	SiCl4 post valve closed
1/20/2011	10:35:17 AM	Bubbler valve closed
1/20/2011	10:35:17 AM	Main Vac valve opened
1/20/2011	10:35:17 AM	Bypass valve opened
1/20/2011	10:35:17 AM	Helium MFC set to  0.000000
1/20/2011	10:35:17 AM	H2 MFC set to  0.000000
1/20/2011	10:35:17 AM	BCl3 MFC set to  0.000000
1/20/2011	10:35:17 AM	PHl3 MFC set to  0.000000
1/20/2011	10:35:17 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:35:17 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:35:17 AM	Tube furnace set to 0
1/20/2011	10:35:18 AM	Run finished at 10:35 AM
1/20/2011	10:35:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	10:36:48 AM	Recipe started at 10:36 AM
1/20/2011	10:36:48 AM	Helium valve closed
1/20/2011	10:36:48 AM	BCl3 valve closed
1/20/2011	10:36:48 AM	PH3 valve closed
1/20/2011	10:36:48 AM	SiCl4 pre valve closed
1/20/2011	10:36:48 AM	SiCl4 post valve closed
1/20/2011	10:36:48 AM	Main Vac valve closed
1/20/2011	10:36:48 AM	Bypass valve closed
1/20/2011	10:36:48 AM	Bubbler valve closed
1/20/2011	10:36:48 AM	H2 valve opened
1/20/2011	10:36:48 AM	Helium MFC set to  0.000000
1/20/2011	10:36:48 AM	H2 MFC set to  500.000000
1/20/2011	10:36:48 AM	BCl3 MFC set to  0.000000
1/20/2011	10:36:48 AM	PHl3 MFC set to  0.000000
1/20/2011	10:36:48 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:36:48 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:36:49 AM	Tube furnace set to 0
1/20/2011	10:36:49 AM	Helium valve closed
1/20/2011	10:36:49 AM	H2 valve closed
1/20/2011	10:36:49 AM	BCl3 valve closed
1/20/2011	10:36:49 AM	PH3 valve closed
1/20/2011	10:36:49 AM	SiCl4 pre valve closed
1/20/2011	10:36:49 AM	SiCl4 post valve closed
1/20/2011	10:36:49 AM	Main Vac valve closed
1/20/2011	10:36:49 AM	Bubbler valve closed
1/20/2011	10:36:49 AM	Bypass valve closed
1/20/2011	10:36:49 AM	Helium MFC set to  0.000000
1/20/2011	10:36:49 AM	H2 MFC set to  0.000000
1/20/2011	10:36:49 AM	BCl3 MFC set to  0.000000
1/20/2011	10:36:49 AM	PHl3 MFC set to  0.000000
1/20/2011	10:36:49 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:36:49 AM	Bypass solenoid MFC set to  760.000000
1/20/2011	10:36:49 AM	Tube furnace set to 0
1/20/2011	10:36:49 AM	Baratron reads 11.426287 Torr and NaOH valve is open.  Emergency exit.
1/20/2011	10:38:09 AM	Run aborted at 10:38 AM
1/20/2011	10:38:50 AM	Program exited cleanly
1/20/2011	10:38:51 AM	Program started normally
1/20/2011	10:38:51 AM	Helium valve closed
1/20/2011	10:38:52 AM	H2 valve closed
1/20/2011	10:38:52 AM	BCl3 valve closed
1/20/2011	10:38:52 AM	PH3 valve closed
1/20/2011	10:38:52 AM	SiCl4 pre valve closed
1/20/2011	10:38:52 AM	SiCl4 post valve closed
1/20/2011	10:38:52 AM	Main Vac valve closed
1/20/2011	10:38:52 AM	Bypass valve closed
1/20/2011	10:38:52 AM	Bubbler valve closed
1/20/2011	10:38:52 AM	Helium MFC set to  0.000000
1/20/2011	10:38:52 AM	H2 MFC set to  0.000000
1/20/2011	10:38:52 AM	BCl3 MFC set to  0.000000
1/20/2011	10:38:52 AM	PHl3 MFC set to  0.000000
1/20/2011	10:38:52 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:38:52 AM	Bypass solenoid MFC set to  760.000000
1/20/2011	10:38:52 AM	Tube furnace set to 0
1/20/2011	10:38:56 AM	Bypass valve opened
1/20/2011	10:38:56 AM	Main Vac valve opened
1/20/2011	10:39:12 AM	Helium MFC set to  100.000000
1/20/2011	10:39:52 AM	Helium valve opened
1/20/2011	10:40:04 AM	Helium valve closed
1/20/2011	10:41:52 AM	Recipe started at 10:41 AM
1/20/2011	10:41:52 AM	Helium valve closed
1/20/2011	10:41:52 AM	BCl3 valve closed
1/20/2011	10:41:52 AM	PH3 valve closed
1/20/2011	10:41:52 AM	SiCl4 pre valve closed
1/20/2011	10:41:52 AM	SiCl4 post valve closed
1/20/2011	10:41:52 AM	Main Vac valve closed
1/20/2011	10:41:52 AM	Bypass valve closed
1/20/2011	10:41:52 AM	Bubbler valve closed
1/20/2011	10:41:52 AM	H2 valve opened
1/20/2011	10:41:52 AM	Helium MFC set to  0.000000
1/20/2011	10:41:52 AM	H2 MFC set to  500.000000
1/20/2011	10:41:52 AM	BCl3 MFC set to  0.000000
1/20/2011	10:41:52 AM	PHl3 MFC set to  0.000000
1/20/2011	10:41:52 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:41:52 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:41:52 AM	Tube furnace set to 0
1/20/2011	10:41:52 AM	Helium valve closed
1/20/2011	10:41:52 AM	H2 valve closed
1/20/2011	10:41:52 AM	BCl3 valve closed
1/20/2011	10:41:52 AM	PH3 valve closed
1/20/2011	10:41:52 AM	SiCl4 pre valve closed
1/20/2011	10:41:52 AM	SiCl4 post valve closed
1/20/2011	10:41:52 AM	Main Vac valve closed
1/20/2011	10:41:52 AM	Bubbler valve closed
1/20/2011	10:41:52 AM	Bypass valve closed
1/20/2011	10:41:52 AM	Helium MFC set to  0.000000
1/20/2011	10:41:52 AM	H2 MFC set to  0.000000
1/20/2011	10:41:52 AM	BCl3 MFC set to  0.000000
1/20/2011	10:41:52 AM	PHl3 MFC set to  0.000000
1/20/2011	10:41:52 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:41:52 AM	Bypass solenoid MFC set to  760.000000
1/20/2011	10:41:53 AM	Tube furnace set to 0
1/20/2011	10:41:53 AM	Baratron reads 2.238835 Torr and NaOH valve is open.  Emergency exit.
1/20/2011	10:42:03 AM	Run aborted at 10:42 AM
1/20/2011	10:42:10 AM	Program exited cleanly
1/20/2011	10:42:11 AM	Program started normally
1/20/2011	10:42:11 AM	Helium valve closed
1/20/2011	10:42:11 AM	H2 valve closed
1/20/2011	10:42:11 AM	BCl3 valve closed
1/20/2011	10:42:11 AM	PH3 valve closed
1/20/2011	10:42:11 AM	SiCl4 pre valve closed
1/20/2011	10:42:11 AM	SiCl4 post valve closed
1/20/2011	10:42:11 AM	Main Vac valve closed
1/20/2011	10:42:11 AM	Bypass valve closed
1/20/2011	10:42:11 AM	Bubbler valve closed
1/20/2011	10:42:11 AM	Helium MFC set to  0.000000
1/20/2011	10:42:11 AM	H2 MFC set to  0.000000
1/20/2011	10:42:11 AM	BCl3 MFC set to  0.000000
1/20/2011	10:42:11 AM	PHl3 MFC set to  0.000000
1/20/2011	10:42:11 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:42:11 AM	Bypass solenoid MFC set to  760.000000
1/20/2011	10:42:12 AM	Tube furnace set to 0
1/20/2011	10:42:14 AM	Bypass valve opened
1/20/2011	10:42:14 AM	Main Vac valve opened
1/20/2011	10:43:07 AM	Helium MFC set to  100.000000
1/20/2011	10:43:09 AM	Helium valve opened
1/20/2011	10:43:13 AM	Helium valve closed
1/20/2011	10:44:09 AM	Recipe started at 10:44 AM
1/20/2011	10:44:09 AM	Helium valve closed
1/20/2011	10:44:09 AM	BCl3 valve closed
1/20/2011	10:44:09 AM	PH3 valve closed
1/20/2011	10:44:09 AM	SiCl4 pre valve closed
1/20/2011	10:44:09 AM	SiCl4 post valve closed
1/20/2011	10:44:09 AM	Main Vac valve closed
1/20/2011	10:44:09 AM	Bypass valve closed
1/20/2011	10:44:09 AM	Bubbler valve closed
1/20/2011	10:44:09 AM	H2 valve opened
1/20/2011	10:44:09 AM	Helium MFC set to  0.000000
1/20/2011	10:44:09 AM	H2 MFC set to  500.000000
1/20/2011	10:44:09 AM	BCl3 MFC set to  0.000000
1/20/2011	10:44:09 AM	PHl3 MFC set to  0.000000
1/20/2011	10:44:09 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:44:09 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:44:09 AM	Tube furnace set to 0
1/20/2011	10:45:32 AM	Helium valve closed
1/20/2011	10:45:32 AM	BCl3 valve closed
1/20/2011	10:45:32 AM	PH3 valve closed
1/20/2011	10:45:32 AM	SiCl4 pre valve closed
1/20/2011	10:45:32 AM	SiCl4 post valve closed
1/20/2011	10:45:32 AM	Main Vac valve closed
1/20/2011	10:45:32 AM	Bypass valve closed
1/20/2011	10:45:32 AM	H2 valve opened
1/20/2011	10:45:32 AM	Bubbler valve opened
1/20/2011	10:45:32 AM	Helium MFC set to  0.000000
1/20/2011	10:45:32 AM	H2 MFC set to  500.000000
1/20/2011	10:45:32 AM	BCl3 MFC set to  0.000000
1/20/2011	10:45:32 AM	PHl3 MFC set to  0.000000
1/20/2011	10:45:32 AM	SiCl4 MFC set to  0.000000
1/20/2011	10:45:32 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	10:45:32 AM	Tube furnace set to 1000
1/20/2011	11:05:32 AM	Helium valve closed
1/20/2011	11:05:32 AM	BCl3 valve closed
1/20/2011	11:05:32 AM	Main Vac valve closed
1/20/2011	11:05:32 AM	Bypass valve closed
1/20/2011	11:05:32 AM	H2 valve opened
1/20/2011	11:05:32 AM	PH3 valve opened
1/20/2011	11:05:32 AM	SiCl4 pre valve opened
1/20/2011	11:05:32 AM	SiCl4 post valve opened
1/20/2011	11:05:32 AM	Bubbler valve opened
1/20/2011	11:05:32 AM	Helium MFC set to  0.000000
1/20/2011	11:05:32 AM	H2 MFC set to  500.000000
1/20/2011	11:05:32 AM	BCl3 MFC set to  0.000000
1/20/2011	11:05:32 AM	PHl3 MFC set to  1.000000
1/20/2011	11:05:32 AM	SiCl4 MFC set to  50.000000
1/20/2011	11:05:32 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:05:32 AM	Tube furnace set to 1000
1/20/2011	11:22:32 AM	H2 valve closed
1/20/2011	11:22:32 AM	BCl3 valve closed
1/20/2011	11:22:32 AM	PH3 valve closed
1/20/2011	11:22:32 AM	SiCl4 pre valve closed
1/20/2011	11:22:32 AM	SiCl4 post valve closed
1/20/2011	11:22:32 AM	Main Vac valve closed
1/20/2011	11:22:32 AM	Bypass valve closed
1/20/2011	11:22:32 AM	Helium valve opened
1/20/2011	11:22:32 AM	Bubbler valve opened
1/20/2011	11:22:32 AM	Helium MFC set to  500.000000
1/20/2011	11:22:32 AM	H2 MFC set to  0.000000
1/20/2011	11:22:32 AM	BCl3 MFC set to  0.000000
1/20/2011	11:22:32 AM	PHl3 MFC set to  0.000000
1/20/2011	11:22:32 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:22:32 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:22:33 AM	Tube furnace set to 0
1/20/2011	11:42:33 AM	Helium valve closed
1/20/2011	11:42:33 AM	H2 valve closed
1/20/2011	11:42:33 AM	BCl3 valve closed
1/20/2011	11:42:33 AM	PH3 valve closed
1/20/2011	11:42:33 AM	SiCl4 pre valve closed
1/20/2011	11:42:33 AM	SiCl4 post valve closed
1/20/2011	11:42:33 AM	Main Vac valve closed
1/20/2011	11:42:33 AM	Bypass valve closed
1/20/2011	11:42:33 AM	Bubbler valve closed
1/20/2011	11:42:33 AM	Helium MFC set to  0.000000
1/20/2011	11:42:33 AM	H2 MFC set to  0.000000
1/20/2011	11:42:33 AM	BCl3 MFC set to  0.000000
1/20/2011	11:42:33 AM	PHl3 MFC set to  0.000000
1/20/2011	11:42:33 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:42:33 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:42:33 AM	Tube furnace set to 0
1/20/2011	11:42:33 AM	Run finished at 11:42 AM
1/20/2011	11:55:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	11:55:03 AM	Recipe started at 11:55 AM
1/20/2011	11:55:03 AM	H2 valve closed
1/20/2011	11:55:03 AM	BCl3 valve closed
1/20/2011	11:55:03 AM	PH3 valve closed
1/20/2011	11:55:03 AM	SiCl4 pre valve closed
1/20/2011	11:55:03 AM	SiCl4 post valve closed
1/20/2011	11:55:03 AM	Main Vac valve closed
1/20/2011	11:55:03 AM	Bypass valve closed
1/20/2011	11:55:03 AM	Bubbler valve closed
1/20/2011	11:55:03 AM	Helium valve opened
1/20/2011	11:55:03 AM	Helium MFC set to  500.000000
1/20/2011	11:55:03 AM	H2 MFC set to  0.000000
1/20/2011	11:55:03 AM	BCl3 MFC set to  0.000000
1/20/2011	11:55:03 AM	PHl3 MFC set to  0.000000
1/20/2011	11:55:03 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:55:03 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:55:03 AM	Tube furnace set to 0
1/20/2011	11:55:07 AM	Helium valve closed
1/20/2011	11:55:07 AM	H2 valve closed
1/20/2011	11:55:08 AM	BCl3 valve closed
1/20/2011	11:55:08 AM	PH3 valve closed
1/20/2011	11:55:08 AM	SiCl4 pre valve closed
1/20/2011	11:55:08 AM	SiCl4 post valve closed
1/20/2011	11:55:08 AM	Main Vac valve closed
1/20/2011	11:55:08 AM	Bypass valve closed
1/20/2011	11:55:08 AM	Bubbler valve closed
1/20/2011	11:55:08 AM	Helium MFC set to  0.000000
1/20/2011	11:55:08 AM	H2 MFC set to  0.000000
1/20/2011	11:55:08 AM	BCl3 MFC set to  0.000000
1/20/2011	11:55:08 AM	PHl3 MFC set to  0.000000
1/20/2011	11:55:08 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:55:08 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:55:08 AM	Tube furnace set to 0
1/20/2011	11:55:08 AM	Run finished at 11:55 AM
1/20/2011	11:55:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	11:59:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	11:59:26 AM	Recipe started at 11:59 AM
1/20/2011	11:59:26 AM	Helium valve closed
1/20/2011	11:59:26 AM	H2 valve closed
1/20/2011	11:59:26 AM	BCl3 valve closed
1/20/2011	11:59:26 AM	PH3 valve closed
1/20/2011	11:59:26 AM	SiCl4 pre valve closed
1/20/2011	11:59:26 AM	SiCl4 post valve closed
1/20/2011	11:59:26 AM	Main Vac valve closed
1/20/2011	11:59:26 AM	Bubbler valve closed
1/20/2011	11:59:26 AM	Bypass valve opened
1/20/2011	11:59:26 AM	Helium MFC set to  0.000000
1/20/2011	11:59:26 AM	H2 MFC set to  0.000000
1/20/2011	11:59:26 AM	BCl3 MFC set to  0.000000
1/20/2011	11:59:26 AM	PHl3 MFC set to  0.000000
1/20/2011	11:59:26 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:59:26 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:59:26 AM	Tube furnace set to 0
1/20/2011	11:59:57 AM	Helium valve closed
1/20/2011	11:59:57 AM	H2 valve closed
1/20/2011	11:59:57 AM	BCl3 valve closed
1/20/2011	11:59:57 AM	PH3 valve closed
1/20/2011	11:59:57 AM	SiCl4 pre valve closed
1/20/2011	11:59:57 AM	SiCl4 post valve closed
1/20/2011	11:59:57 AM	Bubbler valve closed
1/20/2011	11:59:57 AM	Main Vac valve opened
1/20/2011	11:59:57 AM	Bypass valve opened
1/20/2011	11:59:57 AM	Helium MFC set to  0.000000
1/20/2011	11:59:57 AM	H2 MFC set to  0.000000
1/20/2011	11:59:57 AM	BCl3 MFC set to  0.000000
1/20/2011	11:59:57 AM	PHl3 MFC set to  0.000000
1/20/2011	11:59:57 AM	SiCl4 MFC set to  0.000000
1/20/2011	11:59:57 AM	Bypass solenoid MFC set to  0.000000
1/20/2011	11:59:57 AM	Tube furnace set to 0
1/20/2011	11:59:57 AM	Run finished at 11:59 AM
1/20/2011	11:59:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	12:01:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	12:01:51 PM	Recipe started at 12:01 PM
1/20/2011	12:01:51 PM	Helium valve closed
1/20/2011	12:01:51 PM	H2 valve closed
1/20/2011	12:01:51 PM	BCl3 valve closed
1/20/2011	12:01:51 PM	PH3 valve closed
1/20/2011	12:01:51 PM	SiCl4 pre valve closed
1/20/2011	12:01:51 PM	SiCl4 post valve closed
1/20/2011	12:01:51 PM	Main Vac valve closed
1/20/2011	12:01:51 PM	Bubbler valve closed
1/20/2011	12:01:51 PM	Bypass valve opened
1/20/2011	12:01:51 PM	Helium MFC set to  0.000000
1/20/2011	12:01:51 PM	H2 MFC set to  0.000000
1/20/2011	12:01:51 PM	BCl3 MFC set to  0.000000
1/20/2011	12:01:51 PM	PHl3 MFC set to  0.000000
1/20/2011	12:01:51 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:01:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:01:51 PM	Tube furnace set to 0
1/20/2011	12:01:51 PM	Helium valve closed
1/20/2011	12:01:51 PM	H2 valve closed
1/20/2011	12:01:51 PM	BCl3 valve closed
1/20/2011	12:01:51 PM	PH3 valve closed
1/20/2011	12:01:51 PM	SiCl4 pre valve closed
1/20/2011	12:01:51 PM	SiCl4 post valve closed
1/20/2011	12:01:51 PM	Bubbler valve closed
1/20/2011	12:01:51 PM	Main Vac valve opened
1/20/2011	12:01:51 PM	Bypass valve opened
1/20/2011	12:01:51 PM	Helium MFC set to  0.000000
1/20/2011	12:01:51 PM	H2 MFC set to  0.000000
1/20/2011	12:01:51 PM	BCl3 MFC set to  0.000000
1/20/2011	12:01:51 PM	PHl3 MFC set to  0.000000
1/20/2011	12:01:51 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:01:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:01:52 PM	Tube furnace set to 0
1/20/2011	12:02:52 PM	H2 valve closed
1/20/2011	12:02:52 PM	BCl3 valve closed
1/20/2011	12:02:52 PM	PH3 valve closed
1/20/2011	12:02:52 PM	SiCl4 pre valve closed
1/20/2011	12:02:52 PM	SiCl4 post valve closed
1/20/2011	12:02:52 PM	Bubbler valve closed
1/20/2011	12:02:52 PM	Helium valve opened
1/20/2011	12:02:52 PM	Main Vac valve opened
1/20/2011	12:02:52 PM	Bypass valve opened
1/20/2011	12:02:52 PM	Helium MFC set to  100.000000
1/20/2011	12:02:52 PM	H2 MFC set to  0.000000
1/20/2011	12:02:52 PM	BCl3 MFC set to  0.000000
1/20/2011	12:02:52 PM	PHl3 MFC set to  0.000000
1/20/2011	12:02:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:02:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:02:52 PM	Tube furnace set to 0
1/20/2011	12:03:52 PM	Helium valve closed
1/20/2011	12:03:52 PM	H2 valve closed
1/20/2011	12:03:52 PM	BCl3 valve closed
1/20/2011	12:03:52 PM	PH3 valve closed
1/20/2011	12:03:52 PM	SiCl4 pre valve closed
1/20/2011	12:03:52 PM	SiCl4 post valve closed
1/20/2011	12:03:52 PM	Bubbler valve closed
1/20/2011	12:03:52 PM	Main Vac valve opened
1/20/2011	12:03:52 PM	Bypass valve opened
1/20/2011	12:03:52 PM	Helium MFC set to  0.000000
1/20/2011	12:03:52 PM	H2 MFC set to  0.000000
1/20/2011	12:03:52 PM	BCl3 MFC set to  0.000000
1/20/2011	12:03:52 PM	PHl3 MFC set to  0.000000
1/20/2011	12:03:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:03:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:03:52 PM	Tube furnace set to 0
1/20/2011	12:04:52 PM	H2 valve closed
1/20/2011	12:04:52 PM	BCl3 valve closed
1/20/2011	12:04:52 PM	PH3 valve closed
1/20/2011	12:04:52 PM	SiCl4 pre valve closed
1/20/2011	12:04:52 PM	SiCl4 post valve closed
1/20/2011	12:04:52 PM	Bubbler valve closed
1/20/2011	12:04:52 PM	Helium valve opened
1/20/2011	12:04:52 PM	Main Vac valve opened
1/20/2011	12:04:52 PM	Bypass valve opened
1/20/2011	12:04:52 PM	Helium MFC set to  100.000000
1/20/2011	12:04:52 PM	H2 MFC set to  0.000000
1/20/2011	12:04:52 PM	BCl3 MFC set to  0.000000
1/20/2011	12:04:52 PM	PHl3 MFC set to  0.000000
1/20/2011	12:04:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:04:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:04:52 PM	Tube furnace set to 0
1/20/2011	12:05:52 PM	Helium valve closed
1/20/2011	12:05:52 PM	H2 valve closed
1/20/2011	12:05:52 PM	BCl3 valve closed
1/20/2011	12:05:52 PM	PH3 valve closed
1/20/2011	12:05:52 PM	SiCl4 pre valve closed
1/20/2011	12:05:52 PM	SiCl4 post valve closed
1/20/2011	12:05:52 PM	Bubbler valve closed
1/20/2011	12:05:52 PM	Main Vac valve opened
1/20/2011	12:05:52 PM	Bypass valve opened
1/20/2011	12:05:52 PM	Helium MFC set to  0.000000
1/20/2011	12:05:52 PM	H2 MFC set to  0.000000
1/20/2011	12:05:52 PM	BCl3 MFC set to  0.000000
1/20/2011	12:05:52 PM	PHl3 MFC set to  0.000000
1/20/2011	12:05:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:05:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:05:52 PM	Tube furnace set to 0
1/20/2011	12:06:52 PM	H2 valve closed
1/20/2011	12:06:52 PM	BCl3 valve closed
1/20/2011	12:06:52 PM	PH3 valve closed
1/20/2011	12:06:52 PM	SiCl4 pre valve closed
1/20/2011	12:06:52 PM	SiCl4 post valve closed
1/20/2011	12:06:52 PM	Bubbler valve closed
1/20/2011	12:06:52 PM	Helium valve opened
1/20/2011	12:06:52 PM	Main Vac valve opened
1/20/2011	12:06:52 PM	Bypass valve opened
1/20/2011	12:06:52 PM	Helium MFC set to  100.000000
1/20/2011	12:06:52 PM	H2 MFC set to  0.000000
1/20/2011	12:06:52 PM	BCl3 MFC set to  0.000000
1/20/2011	12:06:52 PM	PHl3 MFC set to  0.000000
1/20/2011	12:06:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:06:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:06:53 PM	Tube furnace set to 0
1/20/2011	12:07:53 PM	Helium valve closed
1/20/2011	12:07:53 PM	H2 valve closed
1/20/2011	12:07:53 PM	BCl3 valve closed
1/20/2011	12:07:53 PM	PH3 valve closed
1/20/2011	12:07:53 PM	SiCl4 pre valve closed
1/20/2011	12:07:53 PM	SiCl4 post valve closed
1/20/2011	12:07:53 PM	Bubbler valve closed
1/20/2011	12:07:53 PM	Main Vac valve opened
1/20/2011	12:07:53 PM	Bypass valve opened
1/20/2011	12:07:53 PM	Helium MFC set to  0.000000
1/20/2011	12:07:53 PM	H2 MFC set to  0.000000
1/20/2011	12:07:53 PM	BCl3 MFC set to  0.000000
1/20/2011	12:07:53 PM	PHl3 MFC set to  0.000000
1/20/2011	12:07:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:07:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:07:53 PM	Tube furnace set to 0
1/20/2011	12:08:53 PM	H2 valve closed
1/20/2011	12:08:53 PM	BCl3 valve closed
1/20/2011	12:08:53 PM	PH3 valve closed
1/20/2011	12:08:53 PM	SiCl4 pre valve closed
1/20/2011	12:08:53 PM	SiCl4 post valve closed
1/20/2011	12:08:53 PM	Bubbler valve closed
1/20/2011	12:08:53 PM	Helium valve opened
1/20/2011	12:08:53 PM	Main Vac valve opened
1/20/2011	12:08:53 PM	Bypass valve opened
1/20/2011	12:08:53 PM	Helium MFC set to  100.000000
1/20/2011	12:08:53 PM	H2 MFC set to  0.000000
1/20/2011	12:08:53 PM	BCl3 MFC set to  0.000000
1/20/2011	12:08:53 PM	PHl3 MFC set to  0.000000
1/20/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:08:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:08:53 PM	Tube furnace set to 0
1/20/2011	12:09:53 PM	Helium valve closed
1/20/2011	12:09:53 PM	H2 valve closed
1/20/2011	12:09:53 PM	BCl3 valve closed
1/20/2011	12:09:53 PM	PH3 valve closed
1/20/2011	12:09:53 PM	SiCl4 pre valve closed
1/20/2011	12:09:53 PM	SiCl4 post valve closed
1/20/2011	12:09:53 PM	Bubbler valve closed
1/20/2011	12:09:53 PM	Main Vac valve opened
1/20/2011	12:09:53 PM	Bypass valve opened
1/20/2011	12:09:53 PM	Helium MFC set to  0.000000
1/20/2011	12:09:53 PM	H2 MFC set to  0.000000
1/20/2011	12:09:53 PM	BCl3 MFC set to  0.000000
1/20/2011	12:09:53 PM	PHl3 MFC set to  0.000000
1/20/2011	12:09:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:09:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:09:53 PM	Tube furnace set to 0
1/20/2011	12:10:53 PM	H2 valve closed
1/20/2011	12:10:53 PM	BCl3 valve closed
1/20/2011	12:10:53 PM	PH3 valve closed
1/20/2011	12:10:53 PM	SiCl4 pre valve closed
1/20/2011	12:10:53 PM	SiCl4 post valve closed
1/20/2011	12:10:53 PM	Bubbler valve closed
1/20/2011	12:10:53 PM	Helium valve opened
1/20/2011	12:10:53 PM	Main Vac valve opened
1/20/2011	12:10:53 PM	Bypass valve opened
1/20/2011	12:10:53 PM	Helium MFC set to  100.000000
1/20/2011	12:10:53 PM	H2 MFC set to  0.000000
1/20/2011	12:10:53 PM	BCl3 MFC set to  0.000000
1/20/2011	12:10:53 PM	PHl3 MFC set to  0.000000
1/20/2011	12:10:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:10:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:10:53 PM	Tube furnace set to 0
1/20/2011	12:11:53 PM	Helium valve closed
1/20/2011	12:11:53 PM	H2 valve closed
1/20/2011	12:11:53 PM	BCl3 valve closed
1/20/2011	12:11:53 PM	PH3 valve closed
1/20/2011	12:11:53 PM	SiCl4 pre valve closed
1/20/2011	12:11:53 PM	SiCl4 post valve closed
1/20/2011	12:11:53 PM	Bubbler valve closed
1/20/2011	12:11:53 PM	Main Vac valve opened
1/20/2011	12:11:53 PM	Bypass valve opened
1/20/2011	12:11:53 PM	Helium MFC set to  0.000000
1/20/2011	12:11:53 PM	H2 MFC set to  0.000000
1/20/2011	12:11:53 PM	BCl3 MFC set to  0.000000
1/20/2011	12:11:53 PM	PHl3 MFC set to  0.000000
1/20/2011	12:11:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:11:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:11:54 PM	Tube furnace set to 0
1/20/2011	12:12:54 PM	H2 valve closed
1/20/2011	12:12:54 PM	BCl3 valve closed
1/20/2011	12:12:54 PM	PH3 valve closed
1/20/2011	12:12:54 PM	SiCl4 pre valve closed
1/20/2011	12:12:54 PM	SiCl4 post valve closed
1/20/2011	12:12:54 PM	Bubbler valve closed
1/20/2011	12:12:54 PM	Helium valve opened
1/20/2011	12:12:54 PM	Main Vac valve opened
1/20/2011	12:12:54 PM	Bypass valve opened
1/20/2011	12:12:54 PM	Helium MFC set to  100.000000
1/20/2011	12:12:54 PM	H2 MFC set to  0.000000
1/20/2011	12:12:54 PM	BCl3 MFC set to  0.000000
1/20/2011	12:12:54 PM	PHl3 MFC set to  0.000000
1/20/2011	12:12:54 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:12:54 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:12:54 PM	Tube furnace set to 0
1/20/2011	12:13:54 PM	Helium valve closed
1/20/2011	12:13:54 PM	H2 valve closed
1/20/2011	12:13:54 PM	BCl3 valve closed
1/20/2011	12:13:54 PM	PH3 valve closed
1/20/2011	12:13:54 PM	SiCl4 pre valve closed
1/20/2011	12:13:54 PM	SiCl4 post valve closed
1/20/2011	12:13:54 PM	Bubbler valve closed
1/20/2011	12:13:54 PM	Main Vac valve opened
1/20/2011	12:13:54 PM	Bypass valve opened
1/20/2011	12:13:54 PM	Helium MFC set to  0.000000
1/20/2011	12:13:54 PM	H2 MFC set to  0.000000
1/20/2011	12:13:54 PM	BCl3 MFC set to  0.000000
1/20/2011	12:13:54 PM	PHl3 MFC set to  0.000000
1/20/2011	12:13:54 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:13:54 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:13:54 PM	Tube furnace set to 0
1/20/2011	12:14:54 PM	H2 valve closed
1/20/2011	12:14:54 PM	BCl3 valve closed
1/20/2011	12:14:54 PM	PH3 valve closed
1/20/2011	12:14:54 PM	SiCl4 pre valve closed
1/20/2011	12:14:54 PM	SiCl4 post valve closed
1/20/2011	12:14:54 PM	Bubbler valve closed
1/20/2011	12:14:54 PM	Helium valve opened
1/20/2011	12:14:54 PM	Main Vac valve opened
1/20/2011	12:14:54 PM	Bypass valve opened
1/20/2011	12:14:54 PM	Helium MFC set to  100.000000
1/20/2011	12:14:54 PM	H2 MFC set to  0.000000
1/20/2011	12:14:54 PM	BCl3 MFC set to  0.000000
1/20/2011	12:14:54 PM	PHl3 MFC set to  0.000000
1/20/2011	12:14:54 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:14:54 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:14:54 PM	Tube furnace set to 0
1/20/2011	12:15:54 PM	Helium valve closed
1/20/2011	12:15:54 PM	H2 valve closed
1/20/2011	12:15:54 PM	BCl3 valve closed
1/20/2011	12:15:54 PM	PH3 valve closed
1/20/2011	12:15:54 PM	SiCl4 pre valve closed
1/20/2011	12:15:54 PM	SiCl4 post valve closed
1/20/2011	12:15:54 PM	Bubbler valve closed
1/20/2011	12:15:54 PM	Main Vac valve opened
1/20/2011	12:15:54 PM	Bypass valve opened
1/20/2011	12:15:54 PM	Helium MFC set to  0.000000
1/20/2011	12:15:54 PM	H2 MFC set to  0.000000
1/20/2011	12:15:54 PM	BCl3 MFC set to  0.000000
1/20/2011	12:15:54 PM	PHl3 MFC set to  0.000000
1/20/2011	12:15:54 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:15:54 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:15:54 PM	Tube furnace set to 0
1/20/2011	12:16:54 PM	H2 valve closed
1/20/2011	12:16:54 PM	BCl3 valve closed
1/20/2011	12:16:54 PM	PH3 valve closed
1/20/2011	12:16:54 PM	SiCl4 pre valve closed
1/20/2011	12:16:54 PM	SiCl4 post valve closed
1/20/2011	12:16:54 PM	Bubbler valve closed
1/20/2011	12:16:54 PM	Helium valve opened
1/20/2011	12:16:54 PM	Main Vac valve opened
1/20/2011	12:16:54 PM	Bypass valve opened
1/20/2011	12:16:54 PM	Helium MFC set to  100.000000
1/20/2011	12:16:54 PM	H2 MFC set to  0.000000
1/20/2011	12:16:54 PM	BCl3 MFC set to  0.000000
1/20/2011	12:16:54 PM	PHl3 MFC set to  0.000000
1/20/2011	12:16:54 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:16:54 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:16:55 PM	Tube furnace set to 0
1/20/2011	12:17:55 PM	Helium valve closed
1/20/2011	12:17:55 PM	H2 valve closed
1/20/2011	12:17:55 PM	BCl3 valve closed
1/20/2011	12:17:55 PM	PH3 valve closed
1/20/2011	12:17:55 PM	SiCl4 pre valve closed
1/20/2011	12:17:55 PM	SiCl4 post valve closed
1/20/2011	12:17:55 PM	Bubbler valve closed
1/20/2011	12:17:55 PM	Main Vac valve opened
1/20/2011	12:17:55 PM	Bypass valve opened
1/20/2011	12:17:55 PM	Helium MFC set to  0.000000
1/20/2011	12:17:55 PM	H2 MFC set to  0.000000
1/20/2011	12:17:55 PM	BCl3 MFC set to  0.000000
1/20/2011	12:17:55 PM	PHl3 MFC set to  0.000000
1/20/2011	12:17:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:17:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:17:55 PM	Tube furnace set to 0
1/20/2011	12:18:55 PM	H2 valve closed
1/20/2011	12:18:55 PM	BCl3 valve closed
1/20/2011	12:18:55 PM	PH3 valve closed
1/20/2011	12:18:55 PM	SiCl4 pre valve closed
1/20/2011	12:18:55 PM	SiCl4 post valve closed
1/20/2011	12:18:55 PM	Bubbler valve closed
1/20/2011	12:18:55 PM	Helium valve opened
1/20/2011	12:18:55 PM	Main Vac valve opened
1/20/2011	12:18:55 PM	Bypass valve opened
1/20/2011	12:18:55 PM	Helium MFC set to  100.000000
1/20/2011	12:18:55 PM	H2 MFC set to  0.000000
1/20/2011	12:18:55 PM	BCl3 MFC set to  0.000000
1/20/2011	12:18:55 PM	PHl3 MFC set to  0.000000
1/20/2011	12:18:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:18:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:18:55 PM	Tube furnace set to 0
1/20/2011	12:19:55 PM	Helium valve closed
1/20/2011	12:19:55 PM	H2 valve closed
1/20/2011	12:19:55 PM	BCl3 valve closed
1/20/2011	12:19:55 PM	PH3 valve closed
1/20/2011	12:19:55 PM	SiCl4 pre valve closed
1/20/2011	12:19:55 PM	SiCl4 post valve closed
1/20/2011	12:19:55 PM	Bubbler valve closed
1/20/2011	12:19:55 PM	Main Vac valve opened
1/20/2011	12:19:55 PM	Bypass valve opened
1/20/2011	12:19:55 PM	Helium MFC set to  0.000000
1/20/2011	12:19:55 PM	H2 MFC set to  0.000000
1/20/2011	12:19:55 PM	BCl3 MFC set to  0.000000
1/20/2011	12:19:55 PM	PHl3 MFC set to  0.000000
1/20/2011	12:19:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:19:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:19:55 PM	Tube furnace set to 0
1/20/2011	12:20:55 PM	H2 valve closed
1/20/2011	12:20:55 PM	BCl3 valve closed
1/20/2011	12:20:55 PM	PH3 valve closed
1/20/2011	12:20:55 PM	SiCl4 pre valve closed
1/20/2011	12:20:55 PM	SiCl4 post valve closed
1/20/2011	12:20:55 PM	Bubbler valve closed
1/20/2011	12:20:55 PM	Helium valve opened
1/20/2011	12:20:55 PM	Main Vac valve opened
1/20/2011	12:20:55 PM	Bypass valve opened
1/20/2011	12:20:55 PM	Helium MFC set to  100.000000
1/20/2011	12:20:55 PM	H2 MFC set to  0.000000
1/20/2011	12:20:55 PM	BCl3 MFC set to  0.000000
1/20/2011	12:20:55 PM	PHl3 MFC set to  0.000000
1/20/2011	12:20:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:20:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:20:55 PM	Tube furnace set to 0
1/20/2011	12:21:55 PM	Helium valve closed
1/20/2011	12:21:55 PM	H2 valve closed
1/20/2011	12:21:55 PM	BCl3 valve closed
1/20/2011	12:21:55 PM	PH3 valve closed
1/20/2011	12:21:55 PM	SiCl4 pre valve closed
1/20/2011	12:21:55 PM	SiCl4 post valve closed
1/20/2011	12:21:55 PM	Bubbler valve closed
1/20/2011	12:21:55 PM	Main Vac valve opened
1/20/2011	12:21:55 PM	Bypass valve opened
1/20/2011	12:21:55 PM	Helium MFC set to  0.000000
1/20/2011	12:21:55 PM	H2 MFC set to  0.000000
1/20/2011	12:21:55 PM	BCl3 MFC set to  0.000000
1/20/2011	12:21:55 PM	PHl3 MFC set to  0.000000
1/20/2011	12:21:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:21:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:21:56 PM	Tube furnace set to 0
1/20/2011	12:21:57 PM	Run finished at 12:21 PM
1/20/2011	12:21:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	12:23:23 PM	Bypass valve closed
1/20/2011	12:23:24 PM	Main Vac valve closed
1/20/2011	12:23:35 PM	Main Vac valve opened
1/20/2011	12:23:35 PM	Bypass valve opened
1/20/2011	12:23:57 PM	Helium valve opened
1/20/2011	12:24:04 PM	Helium valve closed
1/20/2011	12:24:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	12:24:23 PM	Recipe started at 12:24 PM
1/20/2011	12:24:23 PM	Helium valve closed
1/20/2011	12:24:23 PM	H2 valve closed
1/20/2011	12:24:23 PM	BCl3 valve closed
1/20/2011	12:24:23 PM	PH3 valve closed
1/20/2011	12:24:23 PM	SiCl4 pre valve closed
1/20/2011	12:24:23 PM	SiCl4 post valve closed
1/20/2011	12:24:23 PM	Main Vac valve closed
1/20/2011	12:24:23 PM	Bubbler valve closed
1/20/2011	12:24:23 PM	Bypass valve opened
1/20/2011	12:24:23 PM	Helium MFC set to  0.000000
1/20/2011	12:24:23 PM	H2 MFC set to  0.000000
1/20/2011	12:24:23 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:23 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:23 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:23 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:24 PM	Tube furnace set to 0
1/20/2011	12:24:24 PM	Helium valve closed
1/20/2011	12:24:24 PM	H2 valve closed
1/20/2011	12:24:24 PM	BCl3 valve closed
1/20/2011	12:24:24 PM	PH3 valve closed
1/20/2011	12:24:24 PM	SiCl4 pre valve closed
1/20/2011	12:24:24 PM	SiCl4 post valve closed
1/20/2011	12:24:24 PM	Bubbler valve closed
1/20/2011	12:24:24 PM	Main Vac valve opened
1/20/2011	12:24:24 PM	Bypass valve opened
1/20/2011	12:24:24 PM	Helium MFC set to  0.000000
1/20/2011	12:24:24 PM	H2 MFC set to  0.000000
1/20/2011	12:24:24 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:24 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:24 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:24 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:24 PM	Tube furnace set to 0
1/20/2011	12:24:36 PM	H2 valve closed
1/20/2011	12:24:36 PM	BCl3 valve closed
1/20/2011	12:24:36 PM	PH3 valve closed
1/20/2011	12:24:36 PM	SiCl4 pre valve closed
1/20/2011	12:24:36 PM	SiCl4 post valve closed
1/20/2011	12:24:36 PM	Bubbler valve closed
1/20/2011	12:24:36 PM	Helium valve opened
1/20/2011	12:24:36 PM	Main Vac valve opened
1/20/2011	12:24:36 PM	Bypass valve opened
1/20/2011	12:24:36 PM	Helium MFC set to  100.000000
1/20/2011	12:24:36 PM	H2 MFC set to  0.000000
1/20/2011	12:24:36 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:36 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:36 PM	Tube furnace set to 0
1/20/2011	12:24:39 PM	Helium valve closed
1/20/2011	12:24:39 PM	H2 valve closed
1/20/2011	12:24:39 PM	BCl3 valve closed
1/20/2011	12:24:39 PM	PH3 valve closed
1/20/2011	12:24:39 PM	SiCl4 pre valve closed
1/20/2011	12:24:39 PM	SiCl4 post valve closed
1/20/2011	12:24:39 PM	Bubbler valve closed
1/20/2011	12:24:39 PM	Main Vac valve opened
1/20/2011	12:24:39 PM	Bypass valve opened
1/20/2011	12:24:39 PM	Helium MFC set to  0.000000
1/20/2011	12:24:39 PM	H2 MFC set to  0.000000
1/20/2011	12:24:39 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:39 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:39 PM	Tube furnace set to 0
1/20/2011	12:24:40 PM	H2 valve closed
1/20/2011	12:24:40 PM	BCl3 valve closed
1/20/2011	12:24:40 PM	PH3 valve closed
1/20/2011	12:24:40 PM	SiCl4 pre valve closed
1/20/2011	12:24:40 PM	SiCl4 post valve closed
1/20/2011	12:24:40 PM	Bubbler valve closed
1/20/2011	12:24:40 PM	Helium valve opened
1/20/2011	12:24:40 PM	Main Vac valve opened
1/20/2011	12:24:40 PM	Bypass valve opened
1/20/2011	12:24:40 PM	Helium MFC set to  100.000000
1/20/2011	12:24:40 PM	H2 MFC set to  0.000000
1/20/2011	12:24:40 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:40 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:40 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:40 PM	Tube furnace set to 0
1/20/2011	12:24:41 PM	Helium valve closed
1/20/2011	12:24:41 PM	H2 valve closed
1/20/2011	12:24:41 PM	BCl3 valve closed
1/20/2011	12:24:41 PM	PH3 valve closed
1/20/2011	12:24:41 PM	SiCl4 pre valve closed
1/20/2011	12:24:41 PM	SiCl4 post valve closed
1/20/2011	12:24:41 PM	Bubbler valve closed
1/20/2011	12:24:41 PM	Main Vac valve opened
1/20/2011	12:24:41 PM	Bypass valve opened
1/20/2011	12:24:41 PM	Helium MFC set to  0.000000
1/20/2011	12:24:41 PM	H2 MFC set to  0.000000
1/20/2011	12:24:41 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:41 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:41 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:41 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:41 PM	Tube furnace set to 0
1/20/2011	12:24:41 PM	H2 valve closed
1/20/2011	12:24:41 PM	BCl3 valve closed
1/20/2011	12:24:41 PM	PH3 valve closed
1/20/2011	12:24:41 PM	SiCl4 pre valve closed
1/20/2011	12:24:41 PM	SiCl4 post valve closed
1/20/2011	12:24:41 PM	Bubbler valve closed
1/20/2011	12:24:41 PM	Helium valve opened
1/20/2011	12:24:41 PM	Main Vac valve opened
1/20/2011	12:24:41 PM	Bypass valve opened
1/20/2011	12:24:41 PM	Helium MFC set to  100.000000
1/20/2011	12:24:41 PM	H2 MFC set to  0.000000
1/20/2011	12:24:41 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:41 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:41 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:41 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:42 PM	Tube furnace set to 0
1/20/2011	12:24:42 PM	Helium valve closed
1/20/2011	12:24:42 PM	H2 valve closed
1/20/2011	12:24:42 PM	BCl3 valve closed
1/20/2011	12:24:42 PM	PH3 valve closed
1/20/2011	12:24:42 PM	SiCl4 pre valve closed
1/20/2011	12:24:42 PM	SiCl4 post valve closed
1/20/2011	12:24:42 PM	Bubbler valve closed
1/20/2011	12:24:42 PM	Main Vac valve opened
1/20/2011	12:24:42 PM	Bypass valve opened
1/20/2011	12:24:42 PM	Helium MFC set to  0.000000
1/20/2011	12:24:42 PM	H2 MFC set to  0.000000
1/20/2011	12:24:42 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:42 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:42 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:42 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:42 PM	Tube furnace set to 0
1/20/2011	12:24:43 PM	H2 valve closed
1/20/2011	12:24:43 PM	BCl3 valve closed
1/20/2011	12:24:43 PM	PH3 valve closed
1/20/2011	12:24:43 PM	SiCl4 pre valve closed
1/20/2011	12:24:43 PM	SiCl4 post valve closed
1/20/2011	12:24:43 PM	Bubbler valve closed
1/20/2011	12:24:43 PM	Helium valve opened
1/20/2011	12:24:43 PM	Main Vac valve opened
1/20/2011	12:24:43 PM	Bypass valve opened
1/20/2011	12:24:43 PM	Helium MFC set to  100.000000
1/20/2011	12:24:43 PM	H2 MFC set to  0.000000
1/20/2011	12:24:43 PM	BCl3 MFC set to  0.000000
1/20/2011	12:24:43 PM	PHl3 MFC set to  0.000000
1/20/2011	12:24:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:24:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:24:43 PM	Tube furnace set to 0
1/20/2011	12:25:43 PM	Helium valve closed
1/20/2011	12:25:43 PM	H2 valve closed
1/20/2011	12:25:43 PM	BCl3 valve closed
1/20/2011	12:25:43 PM	PH3 valve closed
1/20/2011	12:25:43 PM	SiCl4 pre valve closed
1/20/2011	12:25:43 PM	SiCl4 post valve closed
1/20/2011	12:25:43 PM	Bubbler valve closed
1/20/2011	12:25:43 PM	Main Vac valve opened
1/20/2011	12:25:43 PM	Bypass valve opened
1/20/2011	12:25:43 PM	Helium MFC set to  0.000000
1/20/2011	12:25:43 PM	H2 MFC set to  0.000000
1/20/2011	12:25:43 PM	BCl3 MFC set to  0.000000
1/20/2011	12:25:43 PM	PHl3 MFC set to  0.000000
1/20/2011	12:25:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:25:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:25:43 PM	Tube furnace set to 0
1/20/2011	12:26:43 PM	H2 valve closed
1/20/2011	12:26:43 PM	BCl3 valve closed
1/20/2011	12:26:44 PM	PH3 valve closed
1/20/2011	12:26:44 PM	SiCl4 pre valve closed
1/20/2011	12:26:44 PM	SiCl4 post valve closed
1/20/2011	12:26:44 PM	Bubbler valve closed
1/20/2011	12:26:44 PM	Helium valve opened
1/20/2011	12:26:44 PM	Main Vac valve opened
1/20/2011	12:26:44 PM	Bypass valve opened
1/20/2011	12:26:44 PM	Helium MFC set to  100.000000
1/20/2011	12:26:44 PM	H2 MFC set to  0.000000
1/20/2011	12:26:44 PM	BCl3 MFC set to  0.000000
1/20/2011	12:26:44 PM	PHl3 MFC set to  0.000000
1/20/2011	12:26:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:26:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:26:44 PM	Tube furnace set to 0
1/20/2011	12:27:44 PM	Helium valve closed
1/20/2011	12:27:44 PM	H2 valve closed
1/20/2011	12:27:44 PM	BCl3 valve closed
1/20/2011	12:27:44 PM	PH3 valve closed
1/20/2011	12:27:44 PM	SiCl4 pre valve closed
1/20/2011	12:27:44 PM	SiCl4 post valve closed
1/20/2011	12:27:44 PM	Bubbler valve closed
1/20/2011	12:27:44 PM	Main Vac valve opened
1/20/2011	12:27:44 PM	Bypass valve opened
1/20/2011	12:27:44 PM	Helium MFC set to  0.000000
1/20/2011	12:27:44 PM	H2 MFC set to  0.000000
1/20/2011	12:27:44 PM	BCl3 MFC set to  0.000000
1/20/2011	12:27:44 PM	PHl3 MFC set to  0.000000
1/20/2011	12:27:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:27:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:27:44 PM	Tube furnace set to 0
1/20/2011	12:28:44 PM	H2 valve closed
1/20/2011	12:28:44 PM	BCl3 valve closed
1/20/2011	12:28:44 PM	PH3 valve closed
1/20/2011	12:28:44 PM	SiCl4 pre valve closed
1/20/2011	12:28:44 PM	SiCl4 post valve closed
1/20/2011	12:28:44 PM	Bubbler valve closed
1/20/2011	12:28:44 PM	Helium valve opened
1/20/2011	12:28:44 PM	Main Vac valve opened
1/20/2011	12:28:44 PM	Bypass valve opened
1/20/2011	12:28:44 PM	Helium MFC set to  100.000000
1/20/2011	12:28:44 PM	H2 MFC set to  0.000000
1/20/2011	12:28:44 PM	BCl3 MFC set to  0.000000
1/20/2011	12:28:44 PM	PHl3 MFC set to  0.000000
1/20/2011	12:28:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:28:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:28:44 PM	Tube furnace set to 0
1/20/2011	12:29:44 PM	Helium valve closed
1/20/2011	12:29:44 PM	H2 valve closed
1/20/2011	12:29:44 PM	BCl3 valve closed
1/20/2011	12:29:44 PM	PH3 valve closed
1/20/2011	12:29:44 PM	SiCl4 pre valve closed
1/20/2011	12:29:44 PM	SiCl4 post valve closed
1/20/2011	12:29:44 PM	Bubbler valve closed
1/20/2011	12:29:44 PM	Main Vac valve opened
1/20/2011	12:29:44 PM	Bypass valve opened
1/20/2011	12:29:44 PM	Helium MFC set to  0.000000
1/20/2011	12:29:44 PM	H2 MFC set to  0.000000
1/20/2011	12:29:44 PM	BCl3 MFC set to  0.000000
1/20/2011	12:29:44 PM	PHl3 MFC set to  0.000000
1/20/2011	12:29:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:29:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:29:44 PM	Tube furnace set to 0
1/20/2011	12:30:44 PM	H2 valve closed
1/20/2011	12:30:44 PM	BCl3 valve closed
1/20/2011	12:30:44 PM	PH3 valve closed
1/20/2011	12:30:44 PM	SiCl4 pre valve closed
1/20/2011	12:30:44 PM	SiCl4 post valve closed
1/20/2011	12:30:44 PM	Bubbler valve closed
1/20/2011	12:30:44 PM	Helium valve opened
1/20/2011	12:30:44 PM	Main Vac valve opened
1/20/2011	12:30:44 PM	Bypass valve opened
1/20/2011	12:30:44 PM	Helium MFC set to  100.000000
1/20/2011	12:30:44 PM	H2 MFC set to  0.000000
1/20/2011	12:30:44 PM	BCl3 MFC set to  0.000000
1/20/2011	12:30:44 PM	PHl3 MFC set to  0.000000
1/20/2011	12:30:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:30:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:30:44 PM	Tube furnace set to 0
1/20/2011	12:31:45 PM	Helium valve closed
1/20/2011	12:31:45 PM	H2 valve closed
1/20/2011	12:31:45 PM	BCl3 valve closed
1/20/2011	12:31:45 PM	PH3 valve closed
1/20/2011	12:31:45 PM	SiCl4 pre valve closed
1/20/2011	12:31:45 PM	SiCl4 post valve closed
1/20/2011	12:31:45 PM	Bubbler valve closed
1/20/2011	12:31:45 PM	Main Vac valve opened
1/20/2011	12:31:45 PM	Bypass valve opened
1/20/2011	12:31:45 PM	Helium MFC set to  0.000000
1/20/2011	12:31:45 PM	H2 MFC set to  0.000000
1/20/2011	12:31:45 PM	BCl3 MFC set to  0.000000
1/20/2011	12:31:45 PM	PHl3 MFC set to  0.000000
1/20/2011	12:31:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:31:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:31:45 PM	Tube furnace set to 0
1/20/2011	12:32:45 PM	H2 valve closed
1/20/2011	12:32:45 PM	BCl3 valve closed
1/20/2011	12:32:45 PM	PH3 valve closed
1/20/2011	12:32:45 PM	SiCl4 pre valve closed
1/20/2011	12:32:45 PM	SiCl4 post valve closed
1/20/2011	12:32:45 PM	Bubbler valve closed
1/20/2011	12:32:45 PM	Helium valve opened
1/20/2011	12:32:45 PM	Main Vac valve opened
1/20/2011	12:32:45 PM	Bypass valve opened
1/20/2011	12:32:45 PM	Helium MFC set to  100.000000
1/20/2011	12:32:45 PM	H2 MFC set to  0.000000
1/20/2011	12:32:45 PM	BCl3 MFC set to  0.000000
1/20/2011	12:32:45 PM	PHl3 MFC set to  0.000000
1/20/2011	12:32:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:32:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:32:45 PM	Tube furnace set to 0
1/20/2011	12:33:45 PM	Helium valve closed
1/20/2011	12:33:45 PM	H2 valve closed
1/20/2011	12:33:45 PM	BCl3 valve closed
1/20/2011	12:33:45 PM	PH3 valve closed
1/20/2011	12:33:45 PM	SiCl4 pre valve closed
1/20/2011	12:33:45 PM	SiCl4 post valve closed
1/20/2011	12:33:45 PM	Bubbler valve closed
1/20/2011	12:33:45 PM	Main Vac valve opened
1/20/2011	12:33:45 PM	Bypass valve opened
1/20/2011	12:33:45 PM	Helium MFC set to  0.000000
1/20/2011	12:33:45 PM	H2 MFC set to  0.000000
1/20/2011	12:33:45 PM	BCl3 MFC set to  0.000000
1/20/2011	12:33:45 PM	PHl3 MFC set to  0.000000
1/20/2011	12:33:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:33:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:33:45 PM	Tube furnace set to 0
1/20/2011	12:34:45 PM	H2 valve closed
1/20/2011	12:34:45 PM	BCl3 valve closed
1/20/2011	12:34:45 PM	PH3 valve closed
1/20/2011	12:34:45 PM	SiCl4 pre valve closed
1/20/2011	12:34:45 PM	SiCl4 post valve closed
1/20/2011	12:34:45 PM	Bubbler valve closed
1/20/2011	12:34:45 PM	Helium valve opened
1/20/2011	12:34:45 PM	Main Vac valve opened
1/20/2011	12:34:45 PM	Bypass valve opened
1/20/2011	12:34:45 PM	Helium MFC set to  100.000000
1/20/2011	12:34:45 PM	H2 MFC set to  0.000000
1/20/2011	12:34:45 PM	BCl3 MFC set to  0.000000
1/20/2011	12:34:45 PM	PHl3 MFC set to  0.000000
1/20/2011	12:34:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:34:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:34:45 PM	Tube furnace set to 0
1/20/2011	12:35:45 PM	Helium valve closed
1/20/2011	12:35:45 PM	H2 valve closed
1/20/2011	12:35:45 PM	BCl3 valve closed
1/20/2011	12:35:45 PM	PH3 valve closed
1/20/2011	12:35:45 PM	SiCl4 pre valve closed
1/20/2011	12:35:45 PM	SiCl4 post valve closed
1/20/2011	12:35:45 PM	Bubbler valve closed
1/20/2011	12:35:45 PM	Main Vac valve opened
1/20/2011	12:35:45 PM	Bypass valve opened
1/20/2011	12:35:45 PM	Helium MFC set to  0.000000
1/20/2011	12:35:45 PM	H2 MFC set to  0.000000
1/20/2011	12:35:45 PM	BCl3 MFC set to  0.000000
1/20/2011	12:35:45 PM	PHl3 MFC set to  0.000000
1/20/2011	12:35:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:35:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:35:46 PM	Tube furnace set to 0
1/20/2011	12:36:46 PM	H2 valve closed
1/20/2011	12:36:46 PM	BCl3 valve closed
1/20/2011	12:36:46 PM	PH3 valve closed
1/20/2011	12:36:46 PM	SiCl4 pre valve closed
1/20/2011	12:36:46 PM	SiCl4 post valve closed
1/20/2011	12:36:46 PM	Bubbler valve closed
1/20/2011	12:36:46 PM	Helium valve opened
1/20/2011	12:36:46 PM	Main Vac valve opened
1/20/2011	12:36:46 PM	Bypass valve opened
1/20/2011	12:36:46 PM	Helium MFC set to  100.000000
1/20/2011	12:36:46 PM	H2 MFC set to  0.000000
1/20/2011	12:36:46 PM	BCl3 MFC set to  0.000000
1/20/2011	12:36:46 PM	PHl3 MFC set to  0.000000
1/20/2011	12:36:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:36:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:36:46 PM	Tube furnace set to 0
1/20/2011	12:37:46 PM	Helium valve closed
1/20/2011	12:37:46 PM	H2 valve closed
1/20/2011	12:37:46 PM	BCl3 valve closed
1/20/2011	12:37:46 PM	PH3 valve closed
1/20/2011	12:37:46 PM	SiCl4 pre valve closed
1/20/2011	12:37:46 PM	SiCl4 post valve closed
1/20/2011	12:37:46 PM	Bubbler valve closed
1/20/2011	12:37:46 PM	Main Vac valve opened
1/20/2011	12:37:46 PM	Bypass valve opened
1/20/2011	12:37:46 PM	Helium MFC set to  0.000000
1/20/2011	12:37:46 PM	H2 MFC set to  0.000000
1/20/2011	12:37:46 PM	BCl3 MFC set to  0.000000
1/20/2011	12:37:46 PM	PHl3 MFC set to  0.000000
1/20/2011	12:37:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:37:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:37:46 PM	Tube furnace set to 0
1/20/2011	12:37:47 PM	Run finished at 12:37 PM
1/20/2011	12:37:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	12:39:58 PM	Recipe started at 12:39 PM
1/20/2011	12:39:58 PM	Helium valve closed
1/20/2011	12:39:58 PM	BCl3 valve closed
1/20/2011	12:39:58 PM	PH3 valve closed
1/20/2011	12:39:58 PM	SiCl4 pre valve closed
1/20/2011	12:39:58 PM	SiCl4 post valve closed
1/20/2011	12:39:58 PM	Main Vac valve closed
1/20/2011	12:39:58 PM	Bypass valve closed
1/20/2011	12:39:59 PM	Bubbler valve closed
1/20/2011	12:39:59 PM	H2 valve opened
1/20/2011	12:39:59 PM	Helium MFC set to  0.000000
1/20/2011	12:39:59 PM	H2 MFC set to  500.000000
1/20/2011	12:39:59 PM	BCl3 MFC set to  0.000000
1/20/2011	12:39:59 PM	PHl3 MFC set to  0.000000
1/20/2011	12:39:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:39:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:39:59 PM	Tube furnace set to 0
1/20/2011	12:41:16 PM	Helium valve closed
1/20/2011	12:41:16 PM	BCl3 valve closed
1/20/2011	12:41:16 PM	PH3 valve closed
1/20/2011	12:41:16 PM	SiCl4 pre valve closed
1/20/2011	12:41:16 PM	SiCl4 post valve closed
1/20/2011	12:41:16 PM	Main Vac valve closed
1/20/2011	12:41:16 PM	Bypass valve closed
1/20/2011	12:41:16 PM	H2 valve opened
1/20/2011	12:41:16 PM	Bubbler valve opened
1/20/2011	12:41:16 PM	Helium MFC set to  0.000000
1/20/2011	12:41:16 PM	H2 MFC set to  500.000000
1/20/2011	12:41:16 PM	BCl3 MFC set to  0.000000
1/20/2011	12:41:16 PM	PHl3 MFC set to  0.000000
1/20/2011	12:41:16 PM	SiCl4 MFC set to  0.000000
1/20/2011	12:41:16 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	12:41:17 PM	Tube furnace set to 1000
1/20/2011	1:01:17 PM	Helium valve closed
1/20/2011	1:01:17 PM	BCl3 valve closed
1/20/2011	1:01:17 PM	Main Vac valve closed
1/20/2011	1:01:17 PM	Bypass valve closed
1/20/2011	1:01:17 PM	H2 valve opened
1/20/2011	1:01:17 PM	PH3 valve opened
1/20/2011	1:01:17 PM	SiCl4 pre valve opened
1/20/2011	1:01:17 PM	SiCl4 post valve opened
1/20/2011	1:01:17 PM	Bubbler valve opened
1/20/2011	1:01:17 PM	Helium MFC set to  0.000000
1/20/2011	1:01:17 PM	H2 MFC set to  500.000000
1/20/2011	1:01:17 PM	BCl3 MFC set to  0.000000
1/20/2011	1:01:17 PM	PHl3 MFC set to  1.000000
1/20/2011	1:01:17 PM	SiCl4 MFC set to  50.000000
1/20/2011	1:01:17 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	1:01:17 PM	Tube furnace set to 1000
1/20/2011	1:18:17 PM	H2 valve closed
1/20/2011	1:18:17 PM	BCl3 valve closed
1/20/2011	1:18:17 PM	PH3 valve closed
1/20/2011	1:18:17 PM	SiCl4 pre valve closed
1/20/2011	1:18:17 PM	SiCl4 post valve closed
1/20/2011	1:18:17 PM	Main Vac valve closed
1/20/2011	1:18:17 PM	Bypass valve closed
1/20/2011	1:18:17 PM	Helium valve opened
1/20/2011	1:18:17 PM	Bubbler valve opened
1/20/2011	1:18:17 PM	Helium MFC set to  500.000000
1/20/2011	1:18:17 PM	H2 MFC set to  0.000000
1/20/2011	1:18:17 PM	BCl3 MFC set to  0.000000
1/20/2011	1:18:17 PM	PHl3 MFC set to  0.000000
1/20/2011	1:18:17 PM	SiCl4 MFC set to  0.000000
1/20/2011	1:18:17 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	1:18:17 PM	Tube furnace set to 0
1/20/2011	1:38:17 PM	Helium valve closed
1/20/2011	1:38:17 PM	H2 valve closed
1/20/2011	1:38:17 PM	BCl3 valve closed
1/20/2011	1:38:17 PM	PH3 valve closed
1/20/2011	1:38:17 PM	SiCl4 pre valve closed
1/20/2011	1:38:17 PM	SiCl4 post valve closed
1/20/2011	1:38:17 PM	Main Vac valve closed
1/20/2011	1:38:17 PM	Bypass valve closed
1/20/2011	1:38:17 PM	Bubbler valve closed
1/20/2011	1:38:17 PM	Helium MFC set to  0.000000
1/20/2011	1:38:17 PM	H2 MFC set to  0.000000
1/20/2011	1:38:17 PM	BCl3 MFC set to  0.000000
1/20/2011	1:38:17 PM	PHl3 MFC set to  0.000000
1/20/2011	1:38:17 PM	SiCl4 MFC set to  0.000000
1/20/2011	1:38:17 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	1:38:17 PM	Tube furnace set to 0
1/20/2011	1:38:17 PM	Run finished at 1:38 PM
1/20/2011	2:02:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	2:02:10 PM	Recipe started at 2:02 PM
1/20/2011	2:02:10 PM	H2 valve closed
1/20/2011	2:02:10 PM	BCl3 valve closed
1/20/2011	2:02:10 PM	PH3 valve closed
1/20/2011	2:02:10 PM	SiCl4 pre valve closed
1/20/2011	2:02:10 PM	SiCl4 post valve closed
1/20/2011	2:02:10 PM	Main Vac valve closed
1/20/2011	2:02:10 PM	Bypass valve closed
1/20/2011	2:02:10 PM	Bubbler valve closed
1/20/2011	2:02:10 PM	Helium valve opened
1/20/2011	2:02:10 PM	Helium MFC set to  500.000000
1/20/2011	2:02:10 PM	H2 MFC set to  0.000000
1/20/2011	2:02:10 PM	BCl3 MFC set to  0.000000
1/20/2011	2:02:10 PM	PHl3 MFC set to  0.000000
1/20/2011	2:02:10 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:02:10 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:02:10 PM	Tube furnace set to 0
1/20/2011	2:02:16 PM	Helium valve closed
1/20/2011	2:02:16 PM	H2 valve closed
1/20/2011	2:02:16 PM	BCl3 valve closed
1/20/2011	2:02:16 PM	PH3 valve closed
1/20/2011	2:02:16 PM	SiCl4 pre valve closed
1/20/2011	2:02:16 PM	SiCl4 post valve closed
1/20/2011	2:02:16 PM	Main Vac valve closed
1/20/2011	2:02:16 PM	Bypass valve closed
1/20/2011	2:02:16 PM	Bubbler valve closed
1/20/2011	2:02:16 PM	Helium MFC set to  0.000000
1/20/2011	2:02:16 PM	H2 MFC set to  0.000000
1/20/2011	2:02:16 PM	BCl3 MFC set to  0.000000
1/20/2011	2:02:16 PM	PHl3 MFC set to  0.000000
1/20/2011	2:02:16 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:02:16 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:02:17 PM	Tube furnace set to 0
1/20/2011	2:02:17 PM	Run finished at 2:02 PM
1/20/2011	2:02:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	2:07:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	2:07:29 PM	Recipe started at 2:07 PM
1/20/2011	2:07:29 PM	Helium valve closed
1/20/2011	2:07:29 PM	H2 valve closed
1/20/2011	2:07:29 PM	BCl3 valve closed
1/20/2011	2:07:29 PM	PH3 valve closed
1/20/2011	2:07:29 PM	SiCl4 pre valve closed
1/20/2011	2:07:29 PM	SiCl4 post valve closed
1/20/2011	2:07:29 PM	Main Vac valve closed
1/20/2011	2:07:29 PM	Bubbler valve closed
1/20/2011	2:07:29 PM	Bypass valve opened
1/20/2011	2:07:29 PM	Helium MFC set to  0.000000
1/20/2011	2:07:29 PM	H2 MFC set to  0.000000
1/20/2011	2:07:29 PM	BCl3 MFC set to  0.000000
1/20/2011	2:07:29 PM	PHl3 MFC set to  0.000000
1/20/2011	2:07:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:07:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:07:29 PM	Tube furnace set to 0
1/20/2011	2:08:00 PM	Helium valve closed
1/20/2011	2:08:00 PM	H2 valve closed
1/20/2011	2:08:00 PM	BCl3 valve closed
1/20/2011	2:08:00 PM	PH3 valve closed
1/20/2011	2:08:00 PM	SiCl4 pre valve closed
1/20/2011	2:08:00 PM	SiCl4 post valve closed
1/20/2011	2:08:00 PM	Bubbler valve closed
1/20/2011	2:08:00 PM	Main Vac valve opened
1/20/2011	2:08:00 PM	Bypass valve opened
1/20/2011	2:08:00 PM	Helium MFC set to  0.000000
1/20/2011	2:08:00 PM	H2 MFC set to  0.000000
1/20/2011	2:08:00 PM	BCl3 MFC set to  0.000000
1/20/2011	2:08:00 PM	PHl3 MFC set to  0.000000
1/20/2011	2:08:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:08:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:08:00 PM	Tube furnace set to 0
1/20/2011	2:08:00 PM	Run finished at 2:08 PM
1/20/2011	2:08:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	2:09:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	2:09:35 PM	Recipe started at 2:09 PM
1/20/2011	2:09:35 PM	Helium valve closed
1/20/2011	2:09:35 PM	H2 valve closed
1/20/2011	2:09:35 PM	BCl3 valve closed
1/20/2011	2:09:35 PM	PH3 valve closed
1/20/2011	2:09:35 PM	SiCl4 pre valve closed
1/20/2011	2:09:35 PM	SiCl4 post valve closed
1/20/2011	2:09:35 PM	Main Vac valve closed
1/20/2011	2:09:35 PM	Bubbler valve closed
1/20/2011	2:09:35 PM	Bypass valve opened
1/20/2011	2:09:35 PM	Helium MFC set to  0.000000
1/20/2011	2:09:35 PM	H2 MFC set to  0.000000
1/20/2011	2:09:35 PM	BCl3 MFC set to  0.000000
1/20/2011	2:09:35 PM	PHl3 MFC set to  0.000000
1/20/2011	2:09:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:09:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:09:35 PM	Tube furnace set to 0
1/20/2011	2:09:35 PM	Helium valve closed
1/20/2011	2:09:35 PM	H2 valve closed
1/20/2011	2:09:35 PM	BCl3 valve closed
1/20/2011	2:09:35 PM	PH3 valve closed
1/20/2011	2:09:35 PM	SiCl4 pre valve closed
1/20/2011	2:09:35 PM	SiCl4 post valve closed
1/20/2011	2:09:35 PM	Bubbler valve closed
1/20/2011	2:09:35 PM	Main Vac valve opened
1/20/2011	2:09:35 PM	Bypass valve opened
1/20/2011	2:09:35 PM	Helium MFC set to  0.000000
1/20/2011	2:09:35 PM	H2 MFC set to  0.000000
1/20/2011	2:09:35 PM	BCl3 MFC set to  0.000000
1/20/2011	2:09:35 PM	PHl3 MFC set to  0.000000
1/20/2011	2:09:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:09:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:09:35 PM	Tube furnace set to 0
1/20/2011	2:10:35 PM	H2 valve closed
1/20/2011	2:10:35 PM	BCl3 valve closed
1/20/2011	2:10:35 PM	PH3 valve closed
1/20/2011	2:10:35 PM	SiCl4 pre valve closed
1/20/2011	2:10:35 PM	SiCl4 post valve closed
1/20/2011	2:10:35 PM	Bubbler valve closed
1/20/2011	2:10:36 PM	Helium valve opened
1/20/2011	2:10:36 PM	Main Vac valve opened
1/20/2011	2:10:36 PM	Bypass valve opened
1/20/2011	2:10:36 PM	Helium MFC set to  100.000000
1/20/2011	2:10:36 PM	H2 MFC set to  0.000000
1/20/2011	2:10:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:10:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:10:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:10:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:10:36 PM	Tube furnace set to 0
1/20/2011	2:11:36 PM	Helium valve closed
1/20/2011	2:11:36 PM	H2 valve closed
1/20/2011	2:11:36 PM	BCl3 valve closed
1/20/2011	2:11:36 PM	PH3 valve closed
1/20/2011	2:11:36 PM	SiCl4 pre valve closed
1/20/2011	2:11:36 PM	SiCl4 post valve closed
1/20/2011	2:11:36 PM	Bubbler valve closed
1/20/2011	2:11:36 PM	Main Vac valve opened
1/20/2011	2:11:36 PM	Bypass valve opened
1/20/2011	2:11:36 PM	Helium MFC set to  0.000000
1/20/2011	2:11:36 PM	H2 MFC set to  0.000000
1/20/2011	2:11:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:11:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:11:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:11:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:11:36 PM	Tube furnace set to 0
1/20/2011	2:12:36 PM	H2 valve closed
1/20/2011	2:12:36 PM	BCl3 valve closed
1/20/2011	2:12:36 PM	PH3 valve closed
1/20/2011	2:12:36 PM	SiCl4 pre valve closed
1/20/2011	2:12:36 PM	SiCl4 post valve closed
1/20/2011	2:12:36 PM	Bubbler valve closed
1/20/2011	2:12:36 PM	Helium valve opened
1/20/2011	2:12:36 PM	Main Vac valve opened
1/20/2011	2:12:36 PM	Bypass valve opened
1/20/2011	2:12:36 PM	Helium MFC set to  100.000000
1/20/2011	2:12:36 PM	H2 MFC set to  0.000000
1/20/2011	2:12:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:12:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:12:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:12:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:12:36 PM	Tube furnace set to 0
1/20/2011	2:13:36 PM	Helium valve closed
1/20/2011	2:13:36 PM	H2 valve closed
1/20/2011	2:13:36 PM	BCl3 valve closed
1/20/2011	2:13:36 PM	PH3 valve closed
1/20/2011	2:13:36 PM	SiCl4 pre valve closed
1/20/2011	2:13:36 PM	SiCl4 post valve closed
1/20/2011	2:13:36 PM	Bubbler valve closed
1/20/2011	2:13:36 PM	Main Vac valve opened
1/20/2011	2:13:36 PM	Bypass valve opened
1/20/2011	2:13:36 PM	Helium MFC set to  0.000000
1/20/2011	2:13:36 PM	H2 MFC set to  0.000000
1/20/2011	2:13:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:13:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:13:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:13:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:13:36 PM	Tube furnace set to 0
1/20/2011	2:14:36 PM	H2 valve closed
1/20/2011	2:14:36 PM	BCl3 valve closed
1/20/2011	2:14:36 PM	PH3 valve closed
1/20/2011	2:14:36 PM	SiCl4 pre valve closed
1/20/2011	2:14:36 PM	SiCl4 post valve closed
1/20/2011	2:14:36 PM	Bubbler valve closed
1/20/2011	2:14:36 PM	Helium valve opened
1/20/2011	2:14:36 PM	Main Vac valve opened
1/20/2011	2:14:36 PM	Bypass valve opened
1/20/2011	2:14:36 PM	Helium MFC set to  100.000000
1/20/2011	2:14:36 PM	H2 MFC set to  0.000000
1/20/2011	2:14:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:14:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:14:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:14:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:14:37 PM	Tube furnace set to 0
1/20/2011	2:15:37 PM	Helium valve closed
1/20/2011	2:15:37 PM	H2 valve closed
1/20/2011	2:15:37 PM	BCl3 valve closed
1/20/2011	2:15:37 PM	PH3 valve closed
1/20/2011	2:15:37 PM	SiCl4 pre valve closed
1/20/2011	2:15:37 PM	SiCl4 post valve closed
1/20/2011	2:15:37 PM	Bubbler valve closed
1/20/2011	2:15:37 PM	Main Vac valve opened
1/20/2011	2:15:37 PM	Bypass valve opened
1/20/2011	2:15:37 PM	Helium MFC set to  0.000000
1/20/2011	2:15:37 PM	H2 MFC set to  0.000000
1/20/2011	2:15:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:15:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:15:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:15:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:15:37 PM	Tube furnace set to 0
1/20/2011	2:16:37 PM	H2 valve closed
1/20/2011	2:16:37 PM	BCl3 valve closed
1/20/2011	2:16:37 PM	PH3 valve closed
1/20/2011	2:16:37 PM	SiCl4 pre valve closed
1/20/2011	2:16:37 PM	SiCl4 post valve closed
1/20/2011	2:16:37 PM	Bubbler valve closed
1/20/2011	2:16:37 PM	Helium valve opened
1/20/2011	2:16:37 PM	Main Vac valve opened
1/20/2011	2:16:37 PM	Bypass valve opened
1/20/2011	2:16:37 PM	Helium MFC set to  100.000000
1/20/2011	2:16:37 PM	H2 MFC set to  0.000000
1/20/2011	2:16:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:16:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:16:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:16:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:16:37 PM	Tube furnace set to 0
1/20/2011	2:17:37 PM	Helium valve closed
1/20/2011	2:17:37 PM	H2 valve closed
1/20/2011	2:17:37 PM	BCl3 valve closed
1/20/2011	2:17:37 PM	PH3 valve closed
1/20/2011	2:17:37 PM	SiCl4 pre valve closed
1/20/2011	2:17:37 PM	SiCl4 post valve closed
1/20/2011	2:17:37 PM	Bubbler valve closed
1/20/2011	2:17:37 PM	Main Vac valve opened
1/20/2011	2:17:37 PM	Bypass valve opened
1/20/2011	2:17:37 PM	Helium MFC set to  0.000000
1/20/2011	2:17:37 PM	H2 MFC set to  0.000000
1/20/2011	2:17:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:17:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:17:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:17:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:17:37 PM	Tube furnace set to 0
1/20/2011	2:18:37 PM	H2 valve closed
1/20/2011	2:18:37 PM	BCl3 valve closed
1/20/2011	2:18:37 PM	PH3 valve closed
1/20/2011	2:18:37 PM	SiCl4 pre valve closed
1/20/2011	2:18:37 PM	SiCl4 post valve closed
1/20/2011	2:18:37 PM	Bubbler valve closed
1/20/2011	2:18:37 PM	Helium valve opened
1/20/2011	2:18:37 PM	Main Vac valve opened
1/20/2011	2:18:37 PM	Bypass valve opened
1/20/2011	2:18:37 PM	Helium MFC set to  100.000000
1/20/2011	2:18:37 PM	H2 MFC set to  0.000000
1/20/2011	2:18:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:18:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:18:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:18:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:18:37 PM	Tube furnace set to 0
1/20/2011	2:19:37 PM	Helium valve closed
1/20/2011	2:19:37 PM	H2 valve closed
1/20/2011	2:19:37 PM	BCl3 valve closed
1/20/2011	2:19:37 PM	PH3 valve closed
1/20/2011	2:19:37 PM	SiCl4 pre valve closed
1/20/2011	2:19:37 PM	SiCl4 post valve closed
1/20/2011	2:19:37 PM	Bubbler valve closed
1/20/2011	2:19:37 PM	Main Vac valve opened
1/20/2011	2:19:37 PM	Bypass valve opened
1/20/2011	2:19:37 PM	Helium MFC set to  0.000000
1/20/2011	2:19:38 PM	H2 MFC set to  0.000000
1/20/2011	2:19:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:19:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:19:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:19:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:19:38 PM	Tube furnace set to 0
1/20/2011	2:20:38 PM	H2 valve closed
1/20/2011	2:20:38 PM	BCl3 valve closed
1/20/2011	2:20:38 PM	PH3 valve closed
1/20/2011	2:20:38 PM	SiCl4 pre valve closed
1/20/2011	2:20:38 PM	SiCl4 post valve closed
1/20/2011	2:20:38 PM	Bubbler valve closed
1/20/2011	2:20:38 PM	Helium valve opened
1/20/2011	2:20:38 PM	Main Vac valve opened
1/20/2011	2:20:38 PM	Bypass valve opened
1/20/2011	2:20:38 PM	Helium MFC set to  100.000000
1/20/2011	2:20:38 PM	H2 MFC set to  0.000000
1/20/2011	2:20:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:20:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:20:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:20:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:20:38 PM	Tube furnace set to 0
1/20/2011	2:21:38 PM	Helium valve closed
1/20/2011	2:21:38 PM	H2 valve closed
1/20/2011	2:21:38 PM	BCl3 valve closed
1/20/2011	2:21:38 PM	PH3 valve closed
1/20/2011	2:21:38 PM	SiCl4 pre valve closed
1/20/2011	2:21:38 PM	SiCl4 post valve closed
1/20/2011	2:21:38 PM	Bubbler valve closed
1/20/2011	2:21:38 PM	Main Vac valve opened
1/20/2011	2:21:38 PM	Bypass valve opened
1/20/2011	2:21:38 PM	Helium MFC set to  0.000000
1/20/2011	2:21:38 PM	H2 MFC set to  0.000000
1/20/2011	2:21:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:21:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:21:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:21:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:21:38 PM	Tube furnace set to 0
1/20/2011	2:22:38 PM	H2 valve closed
1/20/2011	2:22:38 PM	BCl3 valve closed
1/20/2011	2:22:38 PM	PH3 valve closed
1/20/2011	2:22:38 PM	SiCl4 pre valve closed
1/20/2011	2:22:38 PM	SiCl4 post valve closed
1/20/2011	2:22:38 PM	Bubbler valve closed
1/20/2011	2:22:38 PM	Helium valve opened
1/20/2011	2:22:38 PM	Main Vac valve opened
1/20/2011	2:22:38 PM	Bypass valve opened
1/20/2011	2:22:38 PM	Helium MFC set to  100.000000
1/20/2011	2:22:38 PM	H2 MFC set to  0.000000
1/20/2011	2:22:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:22:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:22:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:22:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:22:38 PM	Tube furnace set to 0
1/20/2011	2:23:38 PM	Helium valve closed
1/20/2011	2:23:38 PM	H2 valve closed
1/20/2011	2:23:38 PM	BCl3 valve closed
1/20/2011	2:23:38 PM	PH3 valve closed
1/20/2011	2:23:38 PM	SiCl4 pre valve closed
1/20/2011	2:23:38 PM	SiCl4 post valve closed
1/20/2011	2:23:38 PM	Bubbler valve closed
1/20/2011	2:23:38 PM	Main Vac valve opened
1/20/2011	2:23:38 PM	Bypass valve opened
1/20/2011	2:23:38 PM	Helium MFC set to  0.000000
1/20/2011	2:23:38 PM	H2 MFC set to  0.000000
1/20/2011	2:23:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:23:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:23:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:23:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:23:38 PM	Tube furnace set to 0
1/20/2011	2:24:38 PM	H2 valve closed
1/20/2011	2:24:38 PM	BCl3 valve closed
1/20/2011	2:24:38 PM	PH3 valve closed
1/20/2011	2:24:38 PM	SiCl4 pre valve closed
1/20/2011	2:24:38 PM	SiCl4 post valve closed
1/20/2011	2:24:38 PM	Bubbler valve closed
1/20/2011	2:24:38 PM	Helium valve opened
1/20/2011	2:24:38 PM	Main Vac valve opened
1/20/2011	2:24:38 PM	Bypass valve opened
1/20/2011	2:24:39 PM	Helium MFC set to  100.000000
1/20/2011	2:24:39 PM	H2 MFC set to  0.000000
1/20/2011	2:24:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:24:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:24:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:24:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:24:39 PM	Tube furnace set to 0
1/20/2011	2:25:39 PM	Helium valve closed
1/20/2011	2:25:39 PM	H2 valve closed
1/20/2011	2:25:39 PM	BCl3 valve closed
1/20/2011	2:25:39 PM	PH3 valve closed
1/20/2011	2:25:39 PM	SiCl4 pre valve closed
1/20/2011	2:25:39 PM	SiCl4 post valve closed
1/20/2011	2:25:39 PM	Bubbler valve closed
1/20/2011	2:25:39 PM	Main Vac valve opened
1/20/2011	2:25:39 PM	Bypass valve opened
1/20/2011	2:25:39 PM	Helium MFC set to  0.000000
1/20/2011	2:25:39 PM	H2 MFC set to  0.000000
1/20/2011	2:25:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:25:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:25:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:25:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:25:39 PM	Tube furnace set to 0
1/20/2011	2:26:39 PM	H2 valve closed
1/20/2011	2:26:39 PM	BCl3 valve closed
1/20/2011	2:26:39 PM	PH3 valve closed
1/20/2011	2:26:39 PM	SiCl4 pre valve closed
1/20/2011	2:26:39 PM	SiCl4 post valve closed
1/20/2011	2:26:39 PM	Bubbler valve closed
1/20/2011	2:26:39 PM	Helium valve opened
1/20/2011	2:26:39 PM	Main Vac valve opened
1/20/2011	2:26:39 PM	Bypass valve opened
1/20/2011	2:26:39 PM	Helium MFC set to  100.000000
1/20/2011	2:26:39 PM	H2 MFC set to  0.000000
1/20/2011	2:26:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:26:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:26:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:26:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:26:39 PM	Tube furnace set to 0
1/20/2011	2:27:39 PM	Helium valve closed
1/20/2011	2:27:39 PM	H2 valve closed
1/20/2011	2:27:39 PM	BCl3 valve closed
1/20/2011	2:27:39 PM	PH3 valve closed
1/20/2011	2:27:39 PM	SiCl4 pre valve closed
1/20/2011	2:27:39 PM	SiCl4 post valve closed
1/20/2011	2:27:39 PM	Bubbler valve closed
1/20/2011	2:27:39 PM	Main Vac valve opened
1/20/2011	2:27:39 PM	Bypass valve opened
1/20/2011	2:27:39 PM	Helium MFC set to  0.000000
1/20/2011	2:27:39 PM	H2 MFC set to  0.000000
1/20/2011	2:27:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:27:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:27:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:27:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:27:39 PM	Tube furnace set to 0
1/20/2011	2:28:39 PM	H2 valve closed
1/20/2011	2:28:39 PM	BCl3 valve closed
1/20/2011	2:28:39 PM	PH3 valve closed
1/20/2011	2:28:39 PM	SiCl4 pre valve closed
1/20/2011	2:28:39 PM	SiCl4 post valve closed
1/20/2011	2:28:39 PM	Bubbler valve closed
1/20/2011	2:28:39 PM	Helium valve opened
1/20/2011	2:28:39 PM	Main Vac valve opened
1/20/2011	2:28:39 PM	Bypass valve opened
1/20/2011	2:28:39 PM	Helium MFC set to  100.000000
1/20/2011	2:28:39 PM	H2 MFC set to  0.000000
1/20/2011	2:28:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:28:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:28:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:28:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:28:39 PM	Tube furnace set to 0
1/20/2011	2:29:39 PM	Helium valve closed
1/20/2011	2:29:39 PM	H2 valve closed
1/20/2011	2:29:39 PM	BCl3 valve closed
1/20/2011	2:29:39 PM	PH3 valve closed
1/20/2011	2:29:39 PM	SiCl4 pre valve closed
1/20/2011	2:29:39 PM	SiCl4 post valve closed
1/20/2011	2:29:39 PM	Bubbler valve closed
1/20/2011	2:29:39 PM	Main Vac valve opened
1/20/2011	2:29:39 PM	Bypass valve opened
1/20/2011	2:29:39 PM	Helium MFC set to  0.000000
1/20/2011	2:29:39 PM	H2 MFC set to  0.000000
1/20/2011	2:29:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:29:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:29:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:29:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:29:40 PM	Tube furnace set to 0
1/20/2011	2:29:41 PM	Run finished at 2:29 PM
1/20/2011	2:29:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	2:36:09 PM	Bypass valve closed
1/20/2011	2:36:10 PM	Main Vac valve closed
1/20/2011	2:36:19 PM	Main Vac valve opened
1/20/2011	2:36:20 PM	Bypass valve opened
1/20/2011	2:36:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	2:36:36 PM	Recipe started at 2:36 PM
1/20/2011	2:36:36 PM	Helium valve closed
1/20/2011	2:36:36 PM	H2 valve closed
1/20/2011	2:36:36 PM	BCl3 valve closed
1/20/2011	2:36:36 PM	PH3 valve closed
1/20/2011	2:36:36 PM	SiCl4 pre valve closed
1/20/2011	2:36:36 PM	SiCl4 post valve closed
1/20/2011	2:36:36 PM	Main Vac valve closed
1/20/2011	2:36:36 PM	Bubbler valve closed
1/20/2011	2:36:36 PM	Bypass valve opened
1/20/2011	2:36:36 PM	Helium MFC set to  0.000000
1/20/2011	2:36:36 PM	H2 MFC set to  0.000000
1/20/2011	2:36:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:36:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:36:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:36:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:36:36 PM	Tube furnace set to 0
1/20/2011	2:36:36 PM	Helium valve closed
1/20/2011	2:36:36 PM	H2 valve closed
1/20/2011	2:36:36 PM	BCl3 valve closed
1/20/2011	2:36:36 PM	PH3 valve closed
1/20/2011	2:36:36 PM	SiCl4 pre valve closed
1/20/2011	2:36:36 PM	SiCl4 post valve closed
1/20/2011	2:36:36 PM	Bubbler valve closed
1/20/2011	2:36:36 PM	Main Vac valve opened
1/20/2011	2:36:36 PM	Bypass valve opened
1/20/2011	2:36:36 PM	Helium MFC set to  0.000000
1/20/2011	2:36:36 PM	H2 MFC set to  0.000000
1/20/2011	2:36:36 PM	BCl3 MFC set to  0.000000
1/20/2011	2:36:36 PM	PHl3 MFC set to  0.000000
1/20/2011	2:36:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:36:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:36:37 PM	Tube furnace set to 0
1/20/2011	2:37:37 PM	H2 valve closed
1/20/2011	2:37:37 PM	BCl3 valve closed
1/20/2011	2:37:37 PM	PH3 valve closed
1/20/2011	2:37:37 PM	SiCl4 pre valve closed
1/20/2011	2:37:37 PM	SiCl4 post valve closed
1/20/2011	2:37:37 PM	Bubbler valve closed
1/20/2011	2:37:37 PM	Helium valve opened
1/20/2011	2:37:37 PM	Main Vac valve opened
1/20/2011	2:37:37 PM	Bypass valve opened
1/20/2011	2:37:37 PM	Helium MFC set to  100.000000
1/20/2011	2:37:37 PM	H2 MFC set to  0.000000
1/20/2011	2:37:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:37:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:37:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:37:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:37:37 PM	Tube furnace set to 0
1/20/2011	2:38:37 PM	Helium valve closed
1/20/2011	2:38:37 PM	H2 valve closed
1/20/2011	2:38:37 PM	BCl3 valve closed
1/20/2011	2:38:37 PM	PH3 valve closed
1/20/2011	2:38:37 PM	SiCl4 pre valve closed
1/20/2011	2:38:37 PM	SiCl4 post valve closed
1/20/2011	2:38:37 PM	Bubbler valve closed
1/20/2011	2:38:37 PM	Main Vac valve opened
1/20/2011	2:38:37 PM	Bypass valve opened
1/20/2011	2:38:37 PM	Helium MFC set to  0.000000
1/20/2011	2:38:37 PM	H2 MFC set to  0.000000
1/20/2011	2:38:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:38:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:38:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:38:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:38:37 PM	Tube furnace set to 0
1/20/2011	2:39:37 PM	H2 valve closed
1/20/2011	2:39:37 PM	BCl3 valve closed
1/20/2011	2:39:37 PM	PH3 valve closed
1/20/2011	2:39:37 PM	SiCl4 pre valve closed
1/20/2011	2:39:37 PM	SiCl4 post valve closed
1/20/2011	2:39:37 PM	Bubbler valve closed
1/20/2011	2:39:37 PM	Helium valve opened
1/20/2011	2:39:37 PM	Main Vac valve opened
1/20/2011	2:39:37 PM	Bypass valve opened
1/20/2011	2:39:37 PM	Helium MFC set to  100.000000
1/20/2011	2:39:37 PM	H2 MFC set to  0.000000
1/20/2011	2:39:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:39:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:39:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:39:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:39:37 PM	Tube furnace set to 0
1/20/2011	2:40:37 PM	Helium valve closed
1/20/2011	2:40:37 PM	H2 valve closed
1/20/2011	2:40:37 PM	BCl3 valve closed
1/20/2011	2:40:37 PM	PH3 valve closed
1/20/2011	2:40:37 PM	SiCl4 pre valve closed
1/20/2011	2:40:37 PM	SiCl4 post valve closed
1/20/2011	2:40:37 PM	Bubbler valve closed
1/20/2011	2:40:37 PM	Main Vac valve opened
1/20/2011	2:40:37 PM	Bypass valve opened
1/20/2011	2:40:37 PM	Helium MFC set to  0.000000
1/20/2011	2:40:37 PM	H2 MFC set to  0.000000
1/20/2011	2:40:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:40:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:40:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:40:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:40:37 PM	Tube furnace set to 0
1/20/2011	2:41:37 PM	H2 valve closed
1/20/2011	2:41:37 PM	BCl3 valve closed
1/20/2011	2:41:37 PM	PH3 valve closed
1/20/2011	2:41:37 PM	SiCl4 pre valve closed
1/20/2011	2:41:37 PM	SiCl4 post valve closed
1/20/2011	2:41:37 PM	Bubbler valve closed
1/20/2011	2:41:37 PM	Helium valve opened
1/20/2011	2:41:37 PM	Main Vac valve opened
1/20/2011	2:41:37 PM	Bypass valve opened
1/20/2011	2:41:37 PM	Helium MFC set to  100.000000
1/20/2011	2:41:37 PM	H2 MFC set to  0.000000
1/20/2011	2:41:37 PM	BCl3 MFC set to  0.000000
1/20/2011	2:41:37 PM	PHl3 MFC set to  0.000000
1/20/2011	2:41:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:41:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:41:38 PM	Tube furnace set to 0
1/20/2011	2:42:38 PM	Helium valve closed
1/20/2011	2:42:38 PM	H2 valve closed
1/20/2011	2:42:38 PM	BCl3 valve closed
1/20/2011	2:42:38 PM	PH3 valve closed
1/20/2011	2:42:38 PM	SiCl4 pre valve closed
1/20/2011	2:42:38 PM	SiCl4 post valve closed
1/20/2011	2:42:38 PM	Bubbler valve closed
1/20/2011	2:42:38 PM	Main Vac valve opened
1/20/2011	2:42:38 PM	Bypass valve opened
1/20/2011	2:42:38 PM	Helium MFC set to  0.000000
1/20/2011	2:42:38 PM	H2 MFC set to  0.000000
1/20/2011	2:42:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:42:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:42:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:42:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:42:38 PM	Tube furnace set to 0
1/20/2011	2:43:38 PM	H2 valve closed
1/20/2011	2:43:38 PM	BCl3 valve closed
1/20/2011	2:43:38 PM	PH3 valve closed
1/20/2011	2:43:38 PM	SiCl4 pre valve closed
1/20/2011	2:43:38 PM	SiCl4 post valve closed
1/20/2011	2:43:38 PM	Bubbler valve closed
1/20/2011	2:43:38 PM	Helium valve opened
1/20/2011	2:43:38 PM	Main Vac valve opened
1/20/2011	2:43:38 PM	Bypass valve opened
1/20/2011	2:43:38 PM	Helium MFC set to  100.000000
1/20/2011	2:43:38 PM	H2 MFC set to  0.000000
1/20/2011	2:43:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:43:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:43:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:43:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:43:38 PM	Tube furnace set to 0
1/20/2011	2:44:38 PM	Helium valve closed
1/20/2011	2:44:38 PM	H2 valve closed
1/20/2011	2:44:38 PM	BCl3 valve closed
1/20/2011	2:44:38 PM	PH3 valve closed
1/20/2011	2:44:38 PM	SiCl4 pre valve closed
1/20/2011	2:44:38 PM	SiCl4 post valve closed
1/20/2011	2:44:38 PM	Bubbler valve closed
1/20/2011	2:44:38 PM	Main Vac valve opened
1/20/2011	2:44:38 PM	Bypass valve opened
1/20/2011	2:44:38 PM	Helium MFC set to  0.000000
1/20/2011	2:44:38 PM	H2 MFC set to  0.000000
1/20/2011	2:44:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:44:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:44:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:44:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:44:38 PM	Tube furnace set to 0
1/20/2011	2:45:38 PM	H2 valve closed
1/20/2011	2:45:38 PM	BCl3 valve closed
1/20/2011	2:45:38 PM	PH3 valve closed
1/20/2011	2:45:38 PM	SiCl4 pre valve closed
1/20/2011	2:45:38 PM	SiCl4 post valve closed
1/20/2011	2:45:38 PM	Bubbler valve closed
1/20/2011	2:45:38 PM	Helium valve opened
1/20/2011	2:45:38 PM	Main Vac valve opened
1/20/2011	2:45:38 PM	Bypass valve opened
1/20/2011	2:45:38 PM	Helium MFC set to  100.000000
1/20/2011	2:45:38 PM	H2 MFC set to  0.000000
1/20/2011	2:45:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:45:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:45:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:45:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:45:38 PM	Tube furnace set to 0
1/20/2011	2:46:38 PM	Helium valve closed
1/20/2011	2:46:38 PM	H2 valve closed
1/20/2011	2:46:38 PM	BCl3 valve closed
1/20/2011	2:46:38 PM	PH3 valve closed
1/20/2011	2:46:38 PM	SiCl4 pre valve closed
1/20/2011	2:46:38 PM	SiCl4 post valve closed
1/20/2011	2:46:38 PM	Bubbler valve closed
1/20/2011	2:46:38 PM	Main Vac valve opened
1/20/2011	2:46:38 PM	Bypass valve opened
1/20/2011	2:46:38 PM	Helium MFC set to  0.000000
1/20/2011	2:46:38 PM	H2 MFC set to  0.000000
1/20/2011	2:46:38 PM	BCl3 MFC set to  0.000000
1/20/2011	2:46:38 PM	PHl3 MFC set to  0.000000
1/20/2011	2:46:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:46:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:46:39 PM	Tube furnace set to 0
1/20/2011	2:47:39 PM	H2 valve closed
1/20/2011	2:47:39 PM	BCl3 valve closed
1/20/2011	2:47:39 PM	PH3 valve closed
1/20/2011	2:47:39 PM	SiCl4 pre valve closed
1/20/2011	2:47:39 PM	SiCl4 post valve closed
1/20/2011	2:47:39 PM	Bubbler valve closed
1/20/2011	2:47:39 PM	Helium valve opened
1/20/2011	2:47:39 PM	Main Vac valve opened
1/20/2011	2:47:39 PM	Bypass valve opened
1/20/2011	2:47:39 PM	Helium MFC set to  100.000000
1/20/2011	2:47:39 PM	H2 MFC set to  0.000000
1/20/2011	2:47:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:47:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:47:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:47:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:47:39 PM	Tube furnace set to 0
1/20/2011	2:48:39 PM	Helium valve closed
1/20/2011	2:48:39 PM	H2 valve closed
1/20/2011	2:48:39 PM	BCl3 valve closed
1/20/2011	2:48:39 PM	PH3 valve closed
1/20/2011	2:48:39 PM	SiCl4 pre valve closed
1/20/2011	2:48:39 PM	SiCl4 post valve closed
1/20/2011	2:48:39 PM	Bubbler valve closed
1/20/2011	2:48:39 PM	Main Vac valve opened
1/20/2011	2:48:39 PM	Bypass valve opened
1/20/2011	2:48:39 PM	Helium MFC set to  0.000000
1/20/2011	2:48:39 PM	H2 MFC set to  0.000000
1/20/2011	2:48:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:48:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:48:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:48:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:48:39 PM	Tube furnace set to 0
1/20/2011	2:49:39 PM	H2 valve closed
1/20/2011	2:49:39 PM	BCl3 valve closed
1/20/2011	2:49:39 PM	PH3 valve closed
1/20/2011	2:49:39 PM	SiCl4 pre valve closed
1/20/2011	2:49:39 PM	SiCl4 post valve closed
1/20/2011	2:49:39 PM	Bubbler valve closed
1/20/2011	2:49:39 PM	Helium valve opened
1/20/2011	2:49:39 PM	Main Vac valve opened
1/20/2011	2:49:39 PM	Bypass valve opened
1/20/2011	2:49:39 PM	Helium MFC set to  100.000000
1/20/2011	2:49:39 PM	H2 MFC set to  0.000000
1/20/2011	2:49:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:49:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:49:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:49:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:49:39 PM	Tube furnace set to 0
1/20/2011	2:50:39 PM	Helium valve closed
1/20/2011	2:50:39 PM	H2 valve closed
1/20/2011	2:50:39 PM	BCl3 valve closed
1/20/2011	2:50:39 PM	PH3 valve closed
1/20/2011	2:50:39 PM	SiCl4 pre valve closed
1/20/2011	2:50:39 PM	SiCl4 post valve closed
1/20/2011	2:50:39 PM	Bubbler valve closed
1/20/2011	2:50:39 PM	Main Vac valve opened
1/20/2011	2:50:39 PM	Bypass valve opened
1/20/2011	2:50:39 PM	Helium MFC set to  0.000000
1/20/2011	2:50:39 PM	H2 MFC set to  0.000000
1/20/2011	2:50:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:50:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:50:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:50:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:50:39 PM	Tube furnace set to 0
1/20/2011	2:51:39 PM	H2 valve closed
1/20/2011	2:51:39 PM	BCl3 valve closed
1/20/2011	2:51:39 PM	PH3 valve closed
1/20/2011	2:51:39 PM	SiCl4 pre valve closed
1/20/2011	2:51:39 PM	SiCl4 post valve closed
1/20/2011	2:51:39 PM	Bubbler valve closed
1/20/2011	2:51:39 PM	Helium valve opened
1/20/2011	2:51:39 PM	Main Vac valve opened
1/20/2011	2:51:39 PM	Bypass valve opened
1/20/2011	2:51:39 PM	Helium MFC set to  100.000000
1/20/2011	2:51:39 PM	H2 MFC set to  0.000000
1/20/2011	2:51:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:51:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:51:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:51:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:51:40 PM	Tube furnace set to 0
1/20/2011	2:52:40 PM	Helium valve closed
1/20/2011	2:52:40 PM	H2 valve closed
1/20/2011	2:52:40 PM	BCl3 valve closed
1/20/2011	2:52:40 PM	PH3 valve closed
1/20/2011	2:52:40 PM	SiCl4 pre valve closed
1/20/2011	2:52:40 PM	SiCl4 post valve closed
1/20/2011	2:52:40 PM	Bubbler valve closed
1/20/2011	2:52:40 PM	Main Vac valve opened
1/20/2011	2:52:40 PM	Bypass valve opened
1/20/2011	2:52:40 PM	Helium MFC set to  0.000000
1/20/2011	2:52:40 PM	H2 MFC set to  0.000000
1/20/2011	2:52:40 PM	BCl3 MFC set to  0.000000
1/20/2011	2:52:40 PM	PHl3 MFC set to  0.000000
1/20/2011	2:52:40 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:52:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:52:40 PM	Tube furnace set to 0
1/20/2011	2:53:40 PM	H2 valve closed
1/20/2011	2:53:40 PM	BCl3 valve closed
1/20/2011	2:53:40 PM	PH3 valve closed
1/20/2011	2:53:40 PM	SiCl4 pre valve closed
1/20/2011	2:53:40 PM	SiCl4 post valve closed
1/20/2011	2:53:40 PM	Bubbler valve closed
1/20/2011	2:53:40 PM	Helium valve opened
1/20/2011	2:53:40 PM	Main Vac valve opened
1/20/2011	2:53:40 PM	Bypass valve opened
1/20/2011	2:53:40 PM	Helium MFC set to  100.000000
1/20/2011	2:53:40 PM	H2 MFC set to  0.000000
1/20/2011	2:53:40 PM	BCl3 MFC set to  0.000000
1/20/2011	2:53:40 PM	PHl3 MFC set to  0.000000
1/20/2011	2:53:40 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:53:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:53:40 PM	Tube furnace set to 0
1/20/2011	2:54:40 PM	Helium valve closed
1/20/2011	2:54:40 PM	H2 valve closed
1/20/2011	2:54:40 PM	BCl3 valve closed
1/20/2011	2:54:40 PM	PH3 valve closed
1/20/2011	2:54:40 PM	SiCl4 pre valve closed
1/20/2011	2:54:40 PM	SiCl4 post valve closed
1/20/2011	2:54:40 PM	Bubbler valve closed
1/20/2011	2:54:40 PM	Main Vac valve opened
1/20/2011	2:54:40 PM	Bypass valve opened
1/20/2011	2:54:40 PM	Helium MFC set to  0.000000
1/20/2011	2:54:40 PM	H2 MFC set to  0.000000
1/20/2011	2:54:40 PM	BCl3 MFC set to  0.000000
1/20/2011	2:54:40 PM	PHl3 MFC set to  0.000000
1/20/2011	2:54:40 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:54:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:54:40 PM	Tube furnace set to 0
1/20/2011	2:55:40 PM	H2 valve closed
1/20/2011	2:55:40 PM	BCl3 valve closed
1/20/2011	2:55:40 PM	PH3 valve closed
1/20/2011	2:55:40 PM	SiCl4 pre valve closed
1/20/2011	2:55:40 PM	SiCl4 post valve closed
1/20/2011	2:55:40 PM	Bubbler valve closed
1/20/2011	2:55:40 PM	Helium valve opened
1/20/2011	2:55:40 PM	Main Vac valve opened
1/20/2011	2:55:40 PM	Bypass valve opened
1/20/2011	2:55:40 PM	Helium MFC set to  100.000000
1/20/2011	2:55:40 PM	H2 MFC set to  0.000000
1/20/2011	2:55:40 PM	BCl3 MFC set to  0.000000
1/20/2011	2:55:40 PM	PHl3 MFC set to  0.000000
1/20/2011	2:55:40 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:55:40 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:55:41 PM	Tube furnace set to 0
1/20/2011	2:56:41 PM	Helium valve closed
1/20/2011	2:56:41 PM	H2 valve closed
1/20/2011	2:56:41 PM	BCl3 valve closed
1/20/2011	2:56:41 PM	PH3 valve closed
1/20/2011	2:56:41 PM	SiCl4 pre valve closed
1/20/2011	2:56:41 PM	SiCl4 post valve closed
1/20/2011	2:56:41 PM	Bubbler valve closed
1/20/2011	2:56:41 PM	Main Vac valve opened
1/20/2011	2:56:41 PM	Bypass valve opened
1/20/2011	2:56:41 PM	Helium MFC set to  0.000000
1/20/2011	2:56:41 PM	H2 MFC set to  0.000000
1/20/2011	2:56:41 PM	BCl3 MFC set to  0.000000
1/20/2011	2:56:41 PM	PHl3 MFC set to  0.000000
1/20/2011	2:56:41 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:56:41 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:56:41 PM	Tube furnace set to 0
1/20/2011	2:56:42 PM	Run finished at 2:56 PM
1/20/2011	2:56:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	2:59:39 PM	Recipe started at 2:59 PM
1/20/2011	2:59:39 PM	Helium valve closed
1/20/2011	2:59:39 PM	BCl3 valve closed
1/20/2011	2:59:39 PM	PH3 valve closed
1/20/2011	2:59:39 PM	SiCl4 pre valve closed
1/20/2011	2:59:39 PM	SiCl4 post valve closed
1/20/2011	2:59:39 PM	Main Vac valve closed
1/20/2011	2:59:39 PM	Bypass valve closed
1/20/2011	2:59:39 PM	Bubbler valve closed
1/20/2011	2:59:39 PM	H2 valve opened
1/20/2011	2:59:39 PM	Helium MFC set to  0.000000
1/20/2011	2:59:39 PM	H2 MFC set to  500.000000
1/20/2011	2:59:39 PM	BCl3 MFC set to  0.000000
1/20/2011	2:59:39 PM	PHl3 MFC set to  0.000000
1/20/2011	2:59:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	2:59:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	2:59:39 PM	Tube furnace set to 0
1/20/2011	3:00:57 PM	Helium valve closed
1/20/2011	3:00:57 PM	BCl3 valve closed
1/20/2011	3:00:57 PM	PH3 valve closed
1/20/2011	3:00:57 PM	SiCl4 pre valve closed
1/20/2011	3:00:57 PM	SiCl4 post valve closed
1/20/2011	3:00:57 PM	Main Vac valve closed
1/20/2011	3:00:57 PM	Bypass valve closed
1/20/2011	3:00:57 PM	H2 valve opened
1/20/2011	3:00:57 PM	Bubbler valve opened
1/20/2011	3:00:57 PM	Helium MFC set to  0.000000
1/20/2011	3:00:57 PM	H2 MFC set to  500.000000
1/20/2011	3:00:57 PM	BCl3 MFC set to  0.000000
1/20/2011	3:00:57 PM	PHl3 MFC set to  0.000000
1/20/2011	3:00:57 PM	SiCl4 MFC set to  0.000000
1/20/2011	3:00:57 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	3:00:58 PM	Tube furnace set to 1000
1/20/2011	3:20:58 PM	Helium valve closed
1/20/2011	3:20:58 PM	BCl3 valve closed
1/20/2011	3:20:58 PM	Main Vac valve closed
1/20/2011	3:20:58 PM	Bypass valve closed
1/20/2011	3:20:58 PM	H2 valve opened
1/20/2011	3:20:58 PM	PH3 valve opened
1/20/2011	3:20:58 PM	SiCl4 pre valve opened
1/20/2011	3:20:58 PM	SiCl4 post valve opened
1/20/2011	3:20:58 PM	Bubbler valve opened
1/20/2011	3:20:58 PM	Helium MFC set to  0.000000
1/20/2011	3:20:58 PM	H2 MFC set to  500.000000
1/20/2011	3:20:58 PM	BCl3 MFC set to  0.000000
1/20/2011	3:20:58 PM	PHl3 MFC set to  1.000000
1/20/2011	3:20:58 PM	SiCl4 MFC set to  50.000000
1/20/2011	3:20:58 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	3:20:58 PM	Tube furnace set to 1000
1/20/2011	3:37:58 PM	H2 valve closed
1/20/2011	3:37:58 PM	BCl3 valve closed
1/20/2011	3:37:58 PM	PH3 valve closed
1/20/2011	3:37:58 PM	SiCl4 pre valve closed
1/20/2011	3:37:58 PM	SiCl4 post valve closed
1/20/2011	3:37:58 PM	Main Vac valve closed
1/20/2011	3:37:58 PM	Bypass valve closed
1/20/2011	3:37:58 PM	Helium valve opened
1/20/2011	3:37:58 PM	Bubbler valve opened
1/20/2011	3:37:58 PM	Helium MFC set to  500.000000
1/20/2011	3:37:58 PM	H2 MFC set to  0.000000
1/20/2011	3:37:58 PM	BCl3 MFC set to  0.000000
1/20/2011	3:37:58 PM	PHl3 MFC set to  0.000000
1/20/2011	3:37:58 PM	SiCl4 MFC set to  0.000000
1/20/2011	3:37:58 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	3:37:58 PM	Tube furnace set to 0
1/20/2011	3:57:58 PM	Helium valve closed
1/20/2011	3:57:58 PM	H2 valve closed
1/20/2011	3:57:58 PM	BCl3 valve closed
1/20/2011	3:57:58 PM	PH3 valve closed
1/20/2011	3:57:58 PM	SiCl4 pre valve closed
1/20/2011	3:57:58 PM	SiCl4 post valve closed
1/20/2011	3:57:58 PM	Main Vac valve closed
1/20/2011	3:57:58 PM	Bypass valve closed
1/20/2011	3:57:58 PM	Bubbler valve closed
1/20/2011	3:57:58 PM	Helium MFC set to  0.000000
1/20/2011	3:57:58 PM	H2 MFC set to  0.000000
1/20/2011	3:57:58 PM	BCl3 MFC set to  0.000000
1/20/2011	3:57:58 PM	PHl3 MFC set to  0.000000
1/20/2011	3:57:58 PM	SiCl4 MFC set to  0.000000
1/20/2011	3:57:58 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	3:57:58 PM	Tube furnace set to 0
1/20/2011	3:57:58 PM	Run finished at 3:57 PM
1/20/2011	4:12:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	4:12:08 PM	Recipe started at 4:12 PM
1/20/2011	4:12:08 PM	H2 valve closed
1/20/2011	4:12:08 PM	BCl3 valve closed
1/20/2011	4:12:08 PM	PH3 valve closed
1/20/2011	4:12:08 PM	SiCl4 pre valve closed
1/20/2011	4:12:08 PM	SiCl4 post valve closed
1/20/2011	4:12:08 PM	Main Vac valve closed
1/20/2011	4:12:08 PM	Bypass valve closed
1/20/2011	4:12:08 PM	Bubbler valve closed
1/20/2011	4:12:08 PM	Helium valve opened
1/20/2011	4:12:08 PM	Helium MFC set to  500.000000
1/20/2011	4:12:08 PM	H2 MFC set to  0.000000
1/20/2011	4:12:08 PM	BCl3 MFC set to  0.000000
1/20/2011	4:12:08 PM	PHl3 MFC set to  0.000000
1/20/2011	4:12:08 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:12:08 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:12:08 PM	Tube furnace set to 0
1/20/2011	4:12:13 PM	Helium valve closed
1/20/2011	4:12:13 PM	H2 valve closed
1/20/2011	4:12:13 PM	BCl3 valve closed
1/20/2011	4:12:13 PM	PH3 valve closed
1/20/2011	4:12:13 PM	SiCl4 pre valve closed
1/20/2011	4:12:13 PM	SiCl4 post valve closed
1/20/2011	4:12:13 PM	Main Vac valve closed
1/20/2011	4:12:13 PM	Bypass valve closed
1/20/2011	4:12:13 PM	Bubbler valve closed
1/20/2011	4:12:13 PM	Helium MFC set to  0.000000
1/20/2011	4:12:13 PM	H2 MFC set to  0.000000
1/20/2011	4:12:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:12:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:12:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:12:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:12:14 PM	Tube furnace set to 0
1/20/2011	4:12:14 PM	Run finished at 4:12 PM
1/20/2011	4:12:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	4:17:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	4:17:36 PM	Recipe started at 4:17 PM
1/20/2011	4:17:36 PM	Helium valve closed
1/20/2011	4:17:36 PM	H2 valve closed
1/20/2011	4:17:36 PM	BCl3 valve closed
1/20/2011	4:17:36 PM	PH3 valve closed
1/20/2011	4:17:36 PM	SiCl4 pre valve closed
1/20/2011	4:17:36 PM	SiCl4 post valve closed
1/20/2011	4:17:36 PM	Main Vac valve closed
1/20/2011	4:17:36 PM	Bubbler valve closed
1/20/2011	4:17:36 PM	Bypass valve opened
1/20/2011	4:17:36 PM	Helium MFC set to  0.000000
1/20/2011	4:17:36 PM	H2 MFC set to  0.000000
1/20/2011	4:17:36 PM	BCl3 MFC set to  0.000000
1/20/2011	4:17:36 PM	PHl3 MFC set to  0.000000
1/20/2011	4:17:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:17:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:17:36 PM	Tube furnace set to 0
1/20/2011	4:18:07 PM	Helium valve closed
1/20/2011	4:18:07 PM	H2 valve closed
1/20/2011	4:18:07 PM	BCl3 valve closed
1/20/2011	4:18:07 PM	PH3 valve closed
1/20/2011	4:18:07 PM	SiCl4 pre valve closed
1/20/2011	4:18:07 PM	SiCl4 post valve closed
1/20/2011	4:18:07 PM	Bubbler valve closed
1/20/2011	4:18:07 PM	Main Vac valve opened
1/20/2011	4:18:07 PM	Bypass valve opened
1/20/2011	4:18:07 PM	Helium MFC set to  0.000000
1/20/2011	4:18:07 PM	H2 MFC set to  0.000000
1/20/2011	4:18:07 PM	BCl3 MFC set to  0.000000
1/20/2011	4:18:07 PM	PHl3 MFC set to  0.000000
1/20/2011	4:18:07 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:18:07 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:18:07 PM	Tube furnace set to 0
1/20/2011	4:18:07 PM	Run finished at 4:18 PM
1/20/2011	4:18:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	4:19:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	4:19:42 PM	Recipe started at 4:19 PM
1/20/2011	4:19:42 PM	Helium valve closed
1/20/2011	4:19:42 PM	H2 valve closed
1/20/2011	4:19:42 PM	BCl3 valve closed
1/20/2011	4:19:42 PM	PH3 valve closed
1/20/2011	4:19:42 PM	SiCl4 pre valve closed
1/20/2011	4:19:42 PM	SiCl4 post valve closed
1/20/2011	4:19:42 PM	Main Vac valve closed
1/20/2011	4:19:42 PM	Bubbler valve closed
1/20/2011	4:19:42 PM	Bypass valve opened
1/20/2011	4:19:42 PM	Helium MFC set to  0.000000
1/20/2011	4:19:42 PM	H2 MFC set to  0.000000
1/20/2011	4:19:42 PM	BCl3 MFC set to  0.000000
1/20/2011	4:19:42 PM	PHl3 MFC set to  0.000000
1/20/2011	4:19:42 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:19:42 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:19:43 PM	Tube furnace set to 0
1/20/2011	4:19:43 PM	Helium valve closed
1/20/2011	4:19:43 PM	H2 valve closed
1/20/2011	4:19:43 PM	BCl3 valve closed
1/20/2011	4:19:43 PM	PH3 valve closed
1/20/2011	4:19:43 PM	SiCl4 pre valve closed
1/20/2011	4:19:43 PM	SiCl4 post valve closed
1/20/2011	4:19:43 PM	Bubbler valve closed
1/20/2011	4:19:43 PM	Main Vac valve opened
1/20/2011	4:19:43 PM	Bypass valve opened
1/20/2011	4:19:43 PM	Helium MFC set to  0.000000
1/20/2011	4:19:43 PM	H2 MFC set to  0.000000
1/20/2011	4:19:43 PM	BCl3 MFC set to  0.000000
1/20/2011	4:19:43 PM	PHl3 MFC set to  0.000000
1/20/2011	4:19:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:19:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:19:43 PM	Tube furnace set to 0
1/20/2011	4:20:43 PM	H2 valve closed
1/20/2011	4:20:43 PM	BCl3 valve closed
1/20/2011	4:20:43 PM	PH3 valve closed
1/20/2011	4:20:43 PM	SiCl4 pre valve closed
1/20/2011	4:20:43 PM	SiCl4 post valve closed
1/20/2011	4:20:43 PM	Bubbler valve closed
1/20/2011	4:20:43 PM	Helium valve opened
1/20/2011	4:20:43 PM	Main Vac valve opened
1/20/2011	4:20:43 PM	Bypass valve opened
1/20/2011	4:20:43 PM	Helium MFC set to  100.000000
1/20/2011	4:20:43 PM	H2 MFC set to  0.000000
1/20/2011	4:20:43 PM	BCl3 MFC set to  0.000000
1/20/2011	4:20:43 PM	PHl3 MFC set to  0.000000
1/20/2011	4:20:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:20:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:20:43 PM	Tube furnace set to 0
1/20/2011	4:21:43 PM	Helium valve closed
1/20/2011	4:21:43 PM	H2 valve closed
1/20/2011	4:21:43 PM	BCl3 valve closed
1/20/2011	4:21:43 PM	PH3 valve closed
1/20/2011	4:21:43 PM	SiCl4 pre valve closed
1/20/2011	4:21:43 PM	SiCl4 post valve closed
1/20/2011	4:21:43 PM	Bubbler valve closed
1/20/2011	4:21:43 PM	Main Vac valve opened
1/20/2011	4:21:43 PM	Bypass valve opened
1/20/2011	4:21:43 PM	Helium MFC set to  0.000000
1/20/2011	4:21:43 PM	H2 MFC set to  0.000000
1/20/2011	4:21:43 PM	BCl3 MFC set to  0.000000
1/20/2011	4:21:43 PM	PHl3 MFC set to  0.000000
1/20/2011	4:21:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:21:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:21:43 PM	Tube furnace set to 0
1/20/2011	4:22:43 PM	H2 valve closed
1/20/2011	4:22:43 PM	BCl3 valve closed
1/20/2011	4:22:43 PM	PH3 valve closed
1/20/2011	4:22:43 PM	SiCl4 pre valve closed
1/20/2011	4:22:43 PM	SiCl4 post valve closed
1/20/2011	4:22:43 PM	Bubbler valve closed
1/20/2011	4:22:43 PM	Helium valve opened
1/20/2011	4:22:43 PM	Main Vac valve opened
1/20/2011	4:22:43 PM	Bypass valve opened
1/20/2011	4:22:43 PM	Helium MFC set to  100.000000
1/20/2011	4:22:43 PM	H2 MFC set to  0.000000
1/20/2011	4:22:43 PM	BCl3 MFC set to  0.000000
1/20/2011	4:22:43 PM	PHl3 MFC set to  0.000000
1/20/2011	4:22:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:22:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:22:44 PM	Tube furnace set to 0
1/20/2011	4:23:44 PM	Helium valve closed
1/20/2011	4:23:44 PM	H2 valve closed
1/20/2011	4:23:44 PM	BCl3 valve closed
1/20/2011	4:23:44 PM	PH3 valve closed
1/20/2011	4:23:44 PM	SiCl4 pre valve closed
1/20/2011	4:23:44 PM	SiCl4 post valve closed
1/20/2011	4:23:44 PM	Bubbler valve closed
1/20/2011	4:23:44 PM	Main Vac valve opened
1/20/2011	4:23:44 PM	Bypass valve opened
1/20/2011	4:23:44 PM	Helium MFC set to  0.000000
1/20/2011	4:23:44 PM	H2 MFC set to  0.000000
1/20/2011	4:23:44 PM	BCl3 MFC set to  0.000000
1/20/2011	4:23:44 PM	PHl3 MFC set to  0.000000
1/20/2011	4:23:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:23:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:23:44 PM	Tube furnace set to 0
1/20/2011	4:24:44 PM	H2 valve closed
1/20/2011	4:24:44 PM	BCl3 valve closed
1/20/2011	4:24:44 PM	PH3 valve closed
1/20/2011	4:24:44 PM	SiCl4 pre valve closed
1/20/2011	4:24:44 PM	SiCl4 post valve closed
1/20/2011	4:24:44 PM	Bubbler valve closed
1/20/2011	4:24:44 PM	Helium valve opened
1/20/2011	4:24:44 PM	Main Vac valve opened
1/20/2011	4:24:44 PM	Bypass valve opened
1/20/2011	4:24:44 PM	Helium MFC set to  100.000000
1/20/2011	4:24:44 PM	H2 MFC set to  0.000000
1/20/2011	4:24:44 PM	BCl3 MFC set to  0.000000
1/20/2011	4:24:44 PM	PHl3 MFC set to  0.000000
1/20/2011	4:24:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:24:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:24:44 PM	Tube furnace set to 0
1/20/2011	4:25:44 PM	Helium valve closed
1/20/2011	4:25:44 PM	H2 valve closed
1/20/2011	4:25:44 PM	BCl3 valve closed
1/20/2011	4:25:44 PM	PH3 valve closed
1/20/2011	4:25:44 PM	SiCl4 pre valve closed
1/20/2011	4:25:44 PM	SiCl4 post valve closed
1/20/2011	4:25:44 PM	Bubbler valve closed
1/20/2011	4:25:44 PM	Main Vac valve opened
1/20/2011	4:25:44 PM	Bypass valve opened
1/20/2011	4:25:44 PM	Helium MFC set to  0.000000
1/20/2011	4:25:44 PM	H2 MFC set to  0.000000
1/20/2011	4:25:44 PM	BCl3 MFC set to  0.000000
1/20/2011	4:25:44 PM	PHl3 MFC set to  0.000000
1/20/2011	4:25:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:25:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:25:44 PM	Tube furnace set to 0
1/20/2011	4:26:44 PM	H2 valve closed
1/20/2011	4:26:44 PM	BCl3 valve closed
1/20/2011	4:26:44 PM	PH3 valve closed
1/20/2011	4:26:44 PM	SiCl4 pre valve closed
1/20/2011	4:26:44 PM	SiCl4 post valve closed
1/20/2011	4:26:44 PM	Bubbler valve closed
1/20/2011	4:26:44 PM	Helium valve opened
1/20/2011	4:26:44 PM	Main Vac valve opened
1/20/2011	4:26:44 PM	Bypass valve opened
1/20/2011	4:26:44 PM	Helium MFC set to  100.000000
1/20/2011	4:26:44 PM	H2 MFC set to  0.000000
1/20/2011	4:26:44 PM	BCl3 MFC set to  0.000000
1/20/2011	4:26:44 PM	PHl3 MFC set to  0.000000
1/20/2011	4:26:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:26:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:26:44 PM	Tube furnace set to 0
1/20/2011	4:27:44 PM	Helium valve closed
1/20/2011	4:27:44 PM	H2 valve closed
1/20/2011	4:27:44 PM	BCl3 valve closed
1/20/2011	4:27:44 PM	PH3 valve closed
1/20/2011	4:27:44 PM	SiCl4 pre valve closed
1/20/2011	4:27:44 PM	SiCl4 post valve closed
1/20/2011	4:27:44 PM	Bubbler valve closed
1/20/2011	4:27:44 PM	Main Vac valve opened
1/20/2011	4:27:44 PM	Bypass valve opened
1/20/2011	4:27:44 PM	Helium MFC set to  0.000000
1/20/2011	4:27:44 PM	H2 MFC set to  0.000000
1/20/2011	4:27:44 PM	BCl3 MFC set to  0.000000
1/20/2011	4:27:44 PM	PHl3 MFC set to  0.000000
1/20/2011	4:27:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:27:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:27:45 PM	Tube furnace set to 0
1/20/2011	4:28:45 PM	H2 valve closed
1/20/2011	4:28:45 PM	BCl3 valve closed
1/20/2011	4:28:45 PM	PH3 valve closed
1/20/2011	4:28:45 PM	SiCl4 pre valve closed
1/20/2011	4:28:45 PM	SiCl4 post valve closed
1/20/2011	4:28:45 PM	Bubbler valve closed
1/20/2011	4:28:45 PM	Helium valve opened
1/20/2011	4:28:45 PM	Main Vac valve opened
1/20/2011	4:28:45 PM	Bypass valve opened
1/20/2011	4:28:45 PM	Helium MFC set to  100.000000
1/20/2011	4:28:45 PM	H2 MFC set to  0.000000
1/20/2011	4:28:45 PM	BCl3 MFC set to  0.000000
1/20/2011	4:28:45 PM	PHl3 MFC set to  0.000000
1/20/2011	4:28:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:28:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:28:45 PM	Tube furnace set to 0
1/20/2011	4:29:45 PM	Helium valve closed
1/20/2011	4:29:45 PM	H2 valve closed
1/20/2011	4:29:45 PM	BCl3 valve closed
1/20/2011	4:29:45 PM	PH3 valve closed
1/20/2011	4:29:45 PM	SiCl4 pre valve closed
1/20/2011	4:29:45 PM	SiCl4 post valve closed
1/20/2011	4:29:45 PM	Bubbler valve closed
1/20/2011	4:29:45 PM	Main Vac valve opened
1/20/2011	4:29:45 PM	Bypass valve opened
1/20/2011	4:29:45 PM	Helium MFC set to  0.000000
1/20/2011	4:29:45 PM	H2 MFC set to  0.000000
1/20/2011	4:29:45 PM	BCl3 MFC set to  0.000000
1/20/2011	4:29:45 PM	PHl3 MFC set to  0.000000
1/20/2011	4:29:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:29:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:29:45 PM	Tube furnace set to 0
1/20/2011	4:30:45 PM	H2 valve closed
1/20/2011	4:30:45 PM	BCl3 valve closed
1/20/2011	4:30:45 PM	PH3 valve closed
1/20/2011	4:30:45 PM	SiCl4 pre valve closed
1/20/2011	4:30:45 PM	SiCl4 post valve closed
1/20/2011	4:30:45 PM	Bubbler valve closed
1/20/2011	4:30:45 PM	Helium valve opened
1/20/2011	4:30:45 PM	Main Vac valve opened
1/20/2011	4:30:45 PM	Bypass valve opened
1/20/2011	4:30:45 PM	Helium MFC set to  100.000000
1/20/2011	4:30:45 PM	H2 MFC set to  0.000000
1/20/2011	4:30:45 PM	BCl3 MFC set to  0.000000
1/20/2011	4:30:45 PM	PHl3 MFC set to  0.000000
1/20/2011	4:30:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:30:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:30:45 PM	Tube furnace set to 0
1/20/2011	4:31:45 PM	Helium valve closed
1/20/2011	4:31:45 PM	H2 valve closed
1/20/2011	4:31:45 PM	BCl3 valve closed
1/20/2011	4:31:45 PM	PH3 valve closed
1/20/2011	4:31:45 PM	SiCl4 pre valve closed
1/20/2011	4:31:45 PM	SiCl4 post valve closed
1/20/2011	4:31:45 PM	Bubbler valve closed
1/20/2011	4:31:45 PM	Main Vac valve opened
1/20/2011	4:31:45 PM	Bypass valve opened
1/20/2011	4:31:45 PM	Helium MFC set to  0.000000
1/20/2011	4:31:45 PM	H2 MFC set to  0.000000
1/20/2011	4:31:45 PM	BCl3 MFC set to  0.000000
1/20/2011	4:31:45 PM	PHl3 MFC set to  0.000000
1/20/2011	4:31:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:31:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:31:45 PM	Tube furnace set to 0
1/20/2011	4:32:45 PM	H2 valve closed
1/20/2011	4:32:45 PM	BCl3 valve closed
1/20/2011	4:32:45 PM	PH3 valve closed
1/20/2011	4:32:45 PM	SiCl4 pre valve closed
1/20/2011	4:32:45 PM	SiCl4 post valve closed
1/20/2011	4:32:45 PM	Bubbler valve closed
1/20/2011	4:32:45 PM	Helium valve opened
1/20/2011	4:32:45 PM	Main Vac valve opened
1/20/2011	4:32:45 PM	Bypass valve opened
1/20/2011	4:32:45 PM	Helium MFC set to  100.000000
1/20/2011	4:32:45 PM	H2 MFC set to  0.000000
1/20/2011	4:32:45 PM	BCl3 MFC set to  0.000000
1/20/2011	4:32:45 PM	PHl3 MFC set to  0.000000
1/20/2011	4:32:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:32:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:32:46 PM	Tube furnace set to 0
1/20/2011	4:33:46 PM	Helium valve closed
1/20/2011	4:33:46 PM	H2 valve closed
1/20/2011	4:33:46 PM	BCl3 valve closed
1/20/2011	4:33:46 PM	PH3 valve closed
1/20/2011	4:33:46 PM	SiCl4 pre valve closed
1/20/2011	4:33:46 PM	SiCl4 post valve closed
1/20/2011	4:33:46 PM	Bubbler valve closed
1/20/2011	4:33:46 PM	Main Vac valve opened
1/20/2011	4:33:46 PM	Bypass valve opened
1/20/2011	4:33:46 PM	Helium MFC set to  0.000000
1/20/2011	4:33:46 PM	H2 MFC set to  0.000000
1/20/2011	4:33:46 PM	BCl3 MFC set to  0.000000
1/20/2011	4:33:46 PM	PHl3 MFC set to  0.000000
1/20/2011	4:33:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:33:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:33:46 PM	Tube furnace set to 0
1/20/2011	4:34:46 PM	H2 valve closed
1/20/2011	4:34:46 PM	BCl3 valve closed
1/20/2011	4:34:46 PM	PH3 valve closed
1/20/2011	4:34:46 PM	SiCl4 pre valve closed
1/20/2011	4:34:46 PM	SiCl4 post valve closed
1/20/2011	4:34:46 PM	Bubbler valve closed
1/20/2011	4:34:46 PM	Helium valve opened
1/20/2011	4:34:46 PM	Main Vac valve opened
1/20/2011	4:34:46 PM	Bypass valve opened
1/20/2011	4:34:46 PM	Helium MFC set to  100.000000
1/20/2011	4:34:46 PM	H2 MFC set to  0.000000
1/20/2011	4:34:46 PM	BCl3 MFC set to  0.000000
1/20/2011	4:34:46 PM	PHl3 MFC set to  0.000000
1/20/2011	4:34:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:34:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:34:46 PM	Tube furnace set to 0
1/20/2011	4:35:46 PM	Helium valve closed
1/20/2011	4:35:46 PM	H2 valve closed
1/20/2011	4:35:46 PM	BCl3 valve closed
1/20/2011	4:35:46 PM	PH3 valve closed
1/20/2011	4:35:46 PM	SiCl4 pre valve closed
1/20/2011	4:35:46 PM	SiCl4 post valve closed
1/20/2011	4:35:46 PM	Bubbler valve closed
1/20/2011	4:35:46 PM	Main Vac valve opened
1/20/2011	4:35:46 PM	Bypass valve opened
1/20/2011	4:35:46 PM	Helium MFC set to  0.000000
1/20/2011	4:35:46 PM	H2 MFC set to  0.000000
1/20/2011	4:35:46 PM	BCl3 MFC set to  0.000000
1/20/2011	4:35:46 PM	PHl3 MFC set to  0.000000
1/20/2011	4:35:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:35:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:35:46 PM	Tube furnace set to 0
1/20/2011	4:36:46 PM	H2 valve closed
1/20/2011	4:36:46 PM	BCl3 valve closed
1/20/2011	4:36:46 PM	PH3 valve closed
1/20/2011	4:36:46 PM	SiCl4 pre valve closed
1/20/2011	4:36:46 PM	SiCl4 post valve closed
1/20/2011	4:36:46 PM	Bubbler valve closed
1/20/2011	4:36:46 PM	Helium valve opened
1/20/2011	4:36:46 PM	Main Vac valve opened
1/20/2011	4:36:46 PM	Bypass valve opened
1/20/2011	4:36:46 PM	Helium MFC set to  100.000000
1/20/2011	4:36:46 PM	H2 MFC set to  0.000000
1/20/2011	4:36:46 PM	BCl3 MFC set to  0.000000
1/20/2011	4:36:46 PM	PHl3 MFC set to  0.000000
1/20/2011	4:36:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:36:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:36:46 PM	Tube furnace set to 0
1/20/2011	4:37:47 PM	Helium valve closed
1/20/2011	4:37:47 PM	H2 valve closed
1/20/2011	4:37:47 PM	BCl3 valve closed
1/20/2011	4:37:47 PM	PH3 valve closed
1/20/2011	4:37:47 PM	SiCl4 pre valve closed
1/20/2011	4:37:47 PM	SiCl4 post valve closed
1/20/2011	4:37:47 PM	Bubbler valve closed
1/20/2011	4:37:47 PM	Main Vac valve opened
1/20/2011	4:37:47 PM	Bypass valve opened
1/20/2011	4:37:47 PM	Helium MFC set to  0.000000
1/20/2011	4:37:47 PM	H2 MFC set to  0.000000
1/20/2011	4:37:47 PM	BCl3 MFC set to  0.000000
1/20/2011	4:37:47 PM	PHl3 MFC set to  0.000000
1/20/2011	4:37:47 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:37:47 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:37:47 PM	Tube furnace set to 0
1/20/2011	4:38:47 PM	H2 valve closed
1/20/2011	4:38:47 PM	BCl3 valve closed
1/20/2011	4:38:47 PM	PH3 valve closed
1/20/2011	4:38:47 PM	SiCl4 pre valve closed
1/20/2011	4:38:47 PM	SiCl4 post valve closed
1/20/2011	4:38:47 PM	Bubbler valve closed
1/20/2011	4:38:47 PM	Helium valve opened
1/20/2011	4:38:47 PM	Main Vac valve opened
1/20/2011	4:38:47 PM	Bypass valve opened
1/20/2011	4:38:47 PM	Helium MFC set to  100.000000
1/20/2011	4:38:47 PM	H2 MFC set to  0.000000
1/20/2011	4:38:47 PM	BCl3 MFC set to  0.000000
1/20/2011	4:38:47 PM	PHl3 MFC set to  0.000000
1/20/2011	4:38:47 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:38:47 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:38:47 PM	Tube furnace set to 0
1/20/2011	4:39:47 PM	Helium valve closed
1/20/2011	4:39:47 PM	H2 valve closed
1/20/2011	4:39:47 PM	BCl3 valve closed
1/20/2011	4:39:47 PM	PH3 valve closed
1/20/2011	4:39:47 PM	SiCl4 pre valve closed
1/20/2011	4:39:47 PM	SiCl4 post valve closed
1/20/2011	4:39:47 PM	Bubbler valve closed
1/20/2011	4:39:47 PM	Main Vac valve opened
1/20/2011	4:39:47 PM	Bypass valve opened
1/20/2011	4:39:47 PM	Helium MFC set to  0.000000
1/20/2011	4:39:47 PM	H2 MFC set to  0.000000
1/20/2011	4:39:47 PM	BCl3 MFC set to  0.000000
1/20/2011	4:39:47 PM	PHl3 MFC set to  0.000000
1/20/2011	4:39:47 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:39:47 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:39:47 PM	Tube furnace set to 0
1/20/2011	4:39:48 PM	Run finished at 4:39 PM
1/20/2011	4:39:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	4:41:26 PM	Bypass valve closed
1/20/2011	4:41:27 PM	Main Vac valve closed
1/20/2011	4:41:39 PM	Main Vac valve opened
1/20/2011	4:41:40 PM	Bypass valve opened
1/20/2011	4:41:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	4:42:02 PM	Recipe started at 4:41 PM
1/20/2011	4:42:02 PM	Helium valve closed
1/20/2011	4:42:02 PM	H2 valve closed
1/20/2011	4:42:02 PM	BCl3 valve closed
1/20/2011	4:42:02 PM	PH3 valve closed
1/20/2011	4:42:02 PM	SiCl4 pre valve closed
1/20/2011	4:42:02 PM	SiCl4 post valve closed
1/20/2011	4:42:02 PM	Main Vac valve closed
1/20/2011	4:42:02 PM	Bubbler valve closed
1/20/2011	4:42:02 PM	Bypass valve opened
1/20/2011	4:42:02 PM	Helium MFC set to  0.000000
1/20/2011	4:42:02 PM	H2 MFC set to  0.000000
1/20/2011	4:42:02 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:02 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:02 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:02 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:03 PM	Tube furnace set to 0
1/20/2011	4:42:03 PM	Helium valve closed
1/20/2011	4:42:03 PM	H2 valve closed
1/20/2011	4:42:03 PM	BCl3 valve closed
1/20/2011	4:42:03 PM	PH3 valve closed
1/20/2011	4:42:03 PM	SiCl4 pre valve closed
1/20/2011	4:42:03 PM	SiCl4 post valve closed
1/20/2011	4:42:03 PM	Bubbler valve closed
1/20/2011	4:42:03 PM	Main Vac valve opened
1/20/2011	4:42:03 PM	Bypass valve opened
1/20/2011	4:42:03 PM	Helium MFC set to  0.000000
1/20/2011	4:42:03 PM	H2 MFC set to  0.000000
1/20/2011	4:42:03 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:03 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:03 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:03 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:03 PM	Tube furnace set to 0
1/20/2011	4:42:05 PM	H2 valve closed
1/20/2011	4:42:05 PM	BCl3 valve closed
1/20/2011	4:42:05 PM	PH3 valve closed
1/20/2011	4:42:05 PM	SiCl4 pre valve closed
1/20/2011	4:42:05 PM	SiCl4 post valve closed
1/20/2011	4:42:05 PM	Bubbler valve closed
1/20/2011	4:42:05 PM	Helium valve opened
1/20/2011	4:42:05 PM	Main Vac valve opened
1/20/2011	4:42:05 PM	Bypass valve opened
1/20/2011	4:42:05 PM	Helium MFC set to  100.000000
1/20/2011	4:42:05 PM	H2 MFC set to  0.000000
1/20/2011	4:42:05 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:05 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:05 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:05 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:05 PM	Tube furnace set to 0
1/20/2011	4:42:05 PM	Helium valve closed
1/20/2011	4:42:05 PM	H2 valve closed
1/20/2011	4:42:05 PM	BCl3 valve closed
1/20/2011	4:42:05 PM	PH3 valve closed
1/20/2011	4:42:05 PM	SiCl4 pre valve closed
1/20/2011	4:42:05 PM	SiCl4 post valve closed
1/20/2011	4:42:05 PM	Bubbler valve closed
1/20/2011	4:42:05 PM	Main Vac valve opened
1/20/2011	4:42:05 PM	Bypass valve opened
1/20/2011	4:42:05 PM	Helium MFC set to  0.000000
1/20/2011	4:42:05 PM	H2 MFC set to  0.000000
1/20/2011	4:42:05 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:05 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:05 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:05 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:05 PM	Tube furnace set to 0
1/20/2011	4:42:11 PM	H2 valve closed
1/20/2011	4:42:11 PM	BCl3 valve closed
1/20/2011	4:42:11 PM	PH3 valve closed
1/20/2011	4:42:11 PM	SiCl4 pre valve closed
1/20/2011	4:42:11 PM	SiCl4 post valve closed
1/20/2011	4:42:11 PM	Bubbler valve closed
1/20/2011	4:42:11 PM	Helium valve opened
1/20/2011	4:42:11 PM	Main Vac valve opened
1/20/2011	4:42:11 PM	Bypass valve opened
1/20/2011	4:42:11 PM	Helium MFC set to  100.000000
1/20/2011	4:42:11 PM	H2 MFC set to  0.000000
1/20/2011	4:42:11 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:11 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:11 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:11 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:11 PM	Tube furnace set to 0
1/20/2011	4:42:11 PM	Helium valve closed
1/20/2011	4:42:11 PM	H2 valve closed
1/20/2011	4:42:11 PM	BCl3 valve closed
1/20/2011	4:42:11 PM	PH3 valve closed
1/20/2011	4:42:11 PM	SiCl4 pre valve closed
1/20/2011	4:42:11 PM	SiCl4 post valve closed
1/20/2011	4:42:11 PM	Bubbler valve closed
1/20/2011	4:42:11 PM	Main Vac valve opened
1/20/2011	4:42:11 PM	Bypass valve opened
1/20/2011	4:42:11 PM	Helium MFC set to  0.000000
1/20/2011	4:42:11 PM	H2 MFC set to  0.000000
1/20/2011	4:42:11 PM	BCl3 MFC set to  0.000000
1/20/2011	4:42:11 PM	PHl3 MFC set to  0.000000
1/20/2011	4:42:11 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:42:11 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:42:11 PM	Tube furnace set to 0
1/20/2011	4:43:11 PM	H2 valve closed
1/20/2011	4:43:11 PM	BCl3 valve closed
1/20/2011	4:43:11 PM	PH3 valve closed
1/20/2011	4:43:11 PM	SiCl4 pre valve closed
1/20/2011	4:43:11 PM	SiCl4 post valve closed
1/20/2011	4:43:11 PM	Bubbler valve closed
1/20/2011	4:43:11 PM	Helium valve opened
1/20/2011	4:43:11 PM	Main Vac valve opened
1/20/2011	4:43:11 PM	Bypass valve opened
1/20/2011	4:43:11 PM	Helium MFC set to  100.000000
1/20/2011	4:43:11 PM	H2 MFC set to  0.000000
1/20/2011	4:43:11 PM	BCl3 MFC set to  0.000000
1/20/2011	4:43:11 PM	PHl3 MFC set to  0.000000
1/20/2011	4:43:11 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:43:11 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:43:12 PM	Tube furnace set to 0
1/20/2011	4:44:12 PM	Helium valve closed
1/20/2011	4:44:12 PM	H2 valve closed
1/20/2011	4:44:12 PM	BCl3 valve closed
1/20/2011	4:44:12 PM	PH3 valve closed
1/20/2011	4:44:12 PM	SiCl4 pre valve closed
1/20/2011	4:44:12 PM	SiCl4 post valve closed
1/20/2011	4:44:12 PM	Bubbler valve closed
1/20/2011	4:44:12 PM	Main Vac valve opened
1/20/2011	4:44:12 PM	Bypass valve opened
1/20/2011	4:44:12 PM	Helium MFC set to  0.000000
1/20/2011	4:44:12 PM	H2 MFC set to  0.000000
1/20/2011	4:44:12 PM	BCl3 MFC set to  0.000000
1/20/2011	4:44:12 PM	PHl3 MFC set to  0.000000
1/20/2011	4:44:12 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:44:12 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:44:12 PM	Tube furnace set to 0
1/20/2011	4:45:12 PM	H2 valve closed
1/20/2011	4:45:12 PM	BCl3 valve closed
1/20/2011	4:45:12 PM	PH3 valve closed
1/20/2011	4:45:12 PM	SiCl4 pre valve closed
1/20/2011	4:45:12 PM	SiCl4 post valve closed
1/20/2011	4:45:12 PM	Bubbler valve closed
1/20/2011	4:45:12 PM	Helium valve opened
1/20/2011	4:45:12 PM	Main Vac valve opened
1/20/2011	4:45:12 PM	Bypass valve opened
1/20/2011	4:45:12 PM	Helium MFC set to  100.000000
1/20/2011	4:45:12 PM	H2 MFC set to  0.000000
1/20/2011	4:45:12 PM	BCl3 MFC set to  0.000000
1/20/2011	4:45:12 PM	PHl3 MFC set to  0.000000
1/20/2011	4:45:12 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:45:12 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:45:12 PM	Tube furnace set to 0
1/20/2011	4:46:12 PM	Helium valve closed
1/20/2011	4:46:12 PM	H2 valve closed
1/20/2011	4:46:12 PM	BCl3 valve closed
1/20/2011	4:46:12 PM	PH3 valve closed
1/20/2011	4:46:12 PM	SiCl4 pre valve closed
1/20/2011	4:46:12 PM	SiCl4 post valve closed
1/20/2011	4:46:12 PM	Bubbler valve closed
1/20/2011	4:46:12 PM	Main Vac valve opened
1/20/2011	4:46:12 PM	Bypass valve opened
1/20/2011	4:46:12 PM	Helium MFC set to  0.000000
1/20/2011	4:46:12 PM	H2 MFC set to  0.000000
1/20/2011	4:46:12 PM	BCl3 MFC set to  0.000000
1/20/2011	4:46:12 PM	PHl3 MFC set to  0.000000
1/20/2011	4:46:12 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:46:12 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:46:12 PM	Tube furnace set to 0
1/20/2011	4:47:12 PM	H2 valve closed
1/20/2011	4:47:12 PM	BCl3 valve closed
1/20/2011	4:47:12 PM	PH3 valve closed
1/20/2011	4:47:12 PM	SiCl4 pre valve closed
1/20/2011	4:47:12 PM	SiCl4 post valve closed
1/20/2011	4:47:12 PM	Bubbler valve closed
1/20/2011	4:47:12 PM	Helium valve opened
1/20/2011	4:47:12 PM	Main Vac valve opened
1/20/2011	4:47:12 PM	Bypass valve opened
1/20/2011	4:47:12 PM	Helium MFC set to  100.000000
1/20/2011	4:47:12 PM	H2 MFC set to  0.000000
1/20/2011	4:47:12 PM	BCl3 MFC set to  0.000000
1/20/2011	4:47:12 PM	PHl3 MFC set to  0.000000
1/20/2011	4:47:12 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:47:12 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:47:12 PM	Tube furnace set to 0
1/20/2011	4:48:12 PM	Helium valve closed
1/20/2011	4:48:12 PM	H2 valve closed
1/20/2011	4:48:12 PM	BCl3 valve closed
1/20/2011	4:48:12 PM	PH3 valve closed
1/20/2011	4:48:12 PM	SiCl4 pre valve closed
1/20/2011	4:48:12 PM	SiCl4 post valve closed
1/20/2011	4:48:12 PM	Bubbler valve closed
1/20/2011	4:48:12 PM	Main Vac valve opened
1/20/2011	4:48:12 PM	Bypass valve opened
1/20/2011	4:48:12 PM	Helium MFC set to  0.000000
1/20/2011	4:48:12 PM	H2 MFC set to  0.000000
1/20/2011	4:48:12 PM	BCl3 MFC set to  0.000000
1/20/2011	4:48:12 PM	PHl3 MFC set to  0.000000
1/20/2011	4:48:12 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:48:12 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:48:13 PM	Tube furnace set to 0
1/20/2011	4:49:13 PM	H2 valve closed
1/20/2011	4:49:13 PM	BCl3 valve closed
1/20/2011	4:49:13 PM	PH3 valve closed
1/20/2011	4:49:13 PM	SiCl4 pre valve closed
1/20/2011	4:49:13 PM	SiCl4 post valve closed
1/20/2011	4:49:13 PM	Bubbler valve closed
1/20/2011	4:49:13 PM	Helium valve opened
1/20/2011	4:49:13 PM	Main Vac valve opened
1/20/2011	4:49:13 PM	Bypass valve opened
1/20/2011	4:49:13 PM	Helium MFC set to  100.000000
1/20/2011	4:49:13 PM	H2 MFC set to  0.000000
1/20/2011	4:49:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:49:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:49:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:49:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:49:13 PM	Tube furnace set to 0
1/20/2011	4:50:13 PM	Helium valve closed
1/20/2011	4:50:13 PM	H2 valve closed
1/20/2011	4:50:13 PM	BCl3 valve closed
1/20/2011	4:50:13 PM	PH3 valve closed
1/20/2011	4:50:13 PM	SiCl4 pre valve closed
1/20/2011	4:50:13 PM	SiCl4 post valve closed
1/20/2011	4:50:13 PM	Bubbler valve closed
1/20/2011	4:50:13 PM	Main Vac valve opened
1/20/2011	4:50:13 PM	Bypass valve opened
1/20/2011	4:50:13 PM	Helium MFC set to  0.000000
1/20/2011	4:50:13 PM	H2 MFC set to  0.000000
1/20/2011	4:50:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:50:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:50:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:50:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:50:13 PM	Tube furnace set to 0
1/20/2011	4:51:13 PM	H2 valve closed
1/20/2011	4:51:13 PM	BCl3 valve closed
1/20/2011	4:51:13 PM	PH3 valve closed
1/20/2011	4:51:13 PM	SiCl4 pre valve closed
1/20/2011	4:51:13 PM	SiCl4 post valve closed
1/20/2011	4:51:13 PM	Bubbler valve closed
1/20/2011	4:51:13 PM	Helium valve opened
1/20/2011	4:51:13 PM	Main Vac valve opened
1/20/2011	4:51:13 PM	Bypass valve opened
1/20/2011	4:51:13 PM	Helium MFC set to  100.000000
1/20/2011	4:51:13 PM	H2 MFC set to  0.000000
1/20/2011	4:51:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:51:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:51:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:51:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:51:13 PM	Tube furnace set to 0
1/20/2011	4:52:13 PM	Helium valve closed
1/20/2011	4:52:13 PM	H2 valve closed
1/20/2011	4:52:13 PM	BCl3 valve closed
1/20/2011	4:52:13 PM	PH3 valve closed
1/20/2011	4:52:13 PM	SiCl4 pre valve closed
1/20/2011	4:52:13 PM	SiCl4 post valve closed
1/20/2011	4:52:13 PM	Bubbler valve closed
1/20/2011	4:52:13 PM	Main Vac valve opened
1/20/2011	4:52:13 PM	Bypass valve opened
1/20/2011	4:52:13 PM	Helium MFC set to  0.000000
1/20/2011	4:52:13 PM	H2 MFC set to  0.000000
1/20/2011	4:52:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:52:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:52:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:52:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:52:13 PM	Tube furnace set to 0
1/20/2011	4:53:13 PM	H2 valve closed
1/20/2011	4:53:13 PM	BCl3 valve closed
1/20/2011	4:53:13 PM	PH3 valve closed
1/20/2011	4:53:13 PM	SiCl4 pre valve closed
1/20/2011	4:53:13 PM	SiCl4 post valve closed
1/20/2011	4:53:13 PM	Bubbler valve closed
1/20/2011	4:53:13 PM	Helium valve opened
1/20/2011	4:53:13 PM	Main Vac valve opened
1/20/2011	4:53:13 PM	Bypass valve opened
1/20/2011	4:53:13 PM	Helium MFC set to  100.000000
1/20/2011	4:53:13 PM	H2 MFC set to  0.000000
1/20/2011	4:53:13 PM	BCl3 MFC set to  0.000000
1/20/2011	4:53:13 PM	PHl3 MFC set to  0.000000
1/20/2011	4:53:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:53:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:53:14 PM	Tube furnace set to 0
1/20/2011	4:54:14 PM	Helium valve closed
1/20/2011	4:54:14 PM	H2 valve closed
1/20/2011	4:54:14 PM	BCl3 valve closed
1/20/2011	4:54:14 PM	PH3 valve closed
1/20/2011	4:54:14 PM	SiCl4 pre valve closed
1/20/2011	4:54:14 PM	SiCl4 post valve closed
1/20/2011	4:54:14 PM	Bubbler valve closed
1/20/2011	4:54:14 PM	Main Vac valve opened
1/20/2011	4:54:14 PM	Bypass valve opened
1/20/2011	4:54:14 PM	Helium MFC set to  0.000000
1/20/2011	4:54:14 PM	H2 MFC set to  0.000000
1/20/2011	4:54:14 PM	BCl3 MFC set to  0.000000
1/20/2011	4:54:14 PM	PHl3 MFC set to  0.000000
1/20/2011	4:54:14 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:54:14 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:54:14 PM	Tube furnace set to 0
1/20/2011	4:55:14 PM	H2 valve closed
1/20/2011	4:55:14 PM	BCl3 valve closed
1/20/2011	4:55:14 PM	PH3 valve closed
1/20/2011	4:55:14 PM	SiCl4 pre valve closed
1/20/2011	4:55:14 PM	SiCl4 post valve closed
1/20/2011	4:55:14 PM	Bubbler valve closed
1/20/2011	4:55:14 PM	Helium valve opened
1/20/2011	4:55:14 PM	Main Vac valve opened
1/20/2011	4:55:14 PM	Bypass valve opened
1/20/2011	4:55:14 PM	Helium MFC set to  100.000000
1/20/2011	4:55:14 PM	H2 MFC set to  0.000000
1/20/2011	4:55:14 PM	BCl3 MFC set to  0.000000
1/20/2011	4:55:14 PM	PHl3 MFC set to  0.000000
1/20/2011	4:55:14 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:55:14 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:55:14 PM	Tube furnace set to 0
1/20/2011	4:56:10 PM	Helium valve closed
1/20/2011	4:56:10 PM	H2 valve closed
1/20/2011	4:56:10 PM	BCl3 valve closed
1/20/2011	4:56:10 PM	PH3 valve closed
1/20/2011	4:56:10 PM	SiCl4 pre valve closed
1/20/2011	4:56:10 PM	SiCl4 post valve closed
1/20/2011	4:56:10 PM	Bubbler valve closed
1/20/2011	4:56:10 PM	Main Vac valve opened
1/20/2011	4:56:10 PM	Bypass valve opened
1/20/2011	4:56:10 PM	Helium MFC set to  0.000000
1/20/2011	4:56:10 PM	H2 MFC set to  0.000000
1/20/2011	4:56:10 PM	BCl3 MFC set to  0.000000
1/20/2011	4:56:10 PM	PHl3 MFC set to  0.000000
1/20/2011	4:56:10 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:56:10 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:56:10 PM	Tube furnace set to 0
1/20/2011	4:56:11 PM	H2 valve closed
1/20/2011	4:56:11 PM	BCl3 valve closed
1/20/2011	4:56:11 PM	PH3 valve closed
1/20/2011	4:56:11 PM	SiCl4 pre valve closed
1/20/2011	4:56:11 PM	SiCl4 post valve closed
1/20/2011	4:56:11 PM	Bubbler valve closed
1/20/2011	4:56:11 PM	Helium valve opened
1/20/2011	4:56:11 PM	Main Vac valve opened
1/20/2011	4:56:11 PM	Bypass valve opened
1/20/2011	4:56:11 PM	Helium MFC set to  100.000000
1/20/2011	4:56:11 PM	H2 MFC set to  0.000000
1/20/2011	4:56:11 PM	BCl3 MFC set to  0.000000
1/20/2011	4:56:11 PM	PHl3 MFC set to  0.000000
1/20/2011	4:56:11 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:56:11 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:56:11 PM	Tube furnace set to 0
1/20/2011	4:57:11 PM	Helium valve closed
1/20/2011	4:57:11 PM	H2 valve closed
1/20/2011	4:57:11 PM	BCl3 valve closed
1/20/2011	4:57:11 PM	PH3 valve closed
1/20/2011	4:57:11 PM	SiCl4 pre valve closed
1/20/2011	4:57:11 PM	SiCl4 post valve closed
1/20/2011	4:57:11 PM	Bubbler valve closed
1/20/2011	4:57:11 PM	Main Vac valve opened
1/20/2011	4:57:11 PM	Bypass valve opened
1/20/2011	4:57:11 PM	Helium MFC set to  0.000000
1/20/2011	4:57:11 PM	H2 MFC set to  0.000000
1/20/2011	4:57:11 PM	BCl3 MFC set to  0.000000
1/20/2011	4:57:11 PM	PHl3 MFC set to  0.000000
1/20/2011	4:57:11 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:57:11 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:57:11 PM	Tube furnace set to 0
1/20/2011	4:57:12 PM	Run finished at 4:57 PM
1/20/2011	4:57:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	4:58:56 PM	Recipe started at 4:58 PM
1/20/2011	4:58:56 PM	Helium valve closed
1/20/2011	4:58:56 PM	BCl3 valve closed
1/20/2011	4:58:56 PM	PH3 valve closed
1/20/2011	4:58:56 PM	SiCl4 pre valve closed
1/20/2011	4:58:56 PM	SiCl4 post valve closed
1/20/2011	4:58:56 PM	Main Vac valve closed
1/20/2011	4:58:56 PM	Bypass valve closed
1/20/2011	4:58:56 PM	Bubbler valve closed
1/20/2011	4:58:56 PM	H2 valve opened
1/20/2011	4:58:56 PM	Helium MFC set to  0.000000
1/20/2011	4:58:56 PM	H2 MFC set to  500.000000
1/20/2011	4:58:56 PM	BCl3 MFC set to  0.000000
1/20/2011	4:58:56 PM	PHl3 MFC set to  0.000000
1/20/2011	4:58:56 PM	SiCl4 MFC set to  0.000000
1/20/2011	4:58:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	4:58:56 PM	Tube furnace set to 0
1/20/2011	5:00:13 PM	Helium valve closed
1/20/2011	5:00:13 PM	BCl3 valve closed
1/20/2011	5:00:13 PM	PH3 valve closed
1/20/2011	5:00:13 PM	SiCl4 pre valve closed
1/20/2011	5:00:13 PM	SiCl4 post valve closed
1/20/2011	5:00:13 PM	Main Vac valve closed
1/20/2011	5:00:13 PM	Bypass valve closed
1/20/2011	5:00:13 PM	H2 valve opened
1/20/2011	5:00:13 PM	Bubbler valve opened
1/20/2011	5:00:13 PM	Helium MFC set to  0.000000
1/20/2011	5:00:13 PM	H2 MFC set to  500.000000
1/20/2011	5:00:13 PM	BCl3 MFC set to  0.000000
1/20/2011	5:00:13 PM	PHl3 MFC set to  0.000000
1/20/2011	5:00:13 PM	SiCl4 MFC set to  0.000000
1/20/2011	5:00:13 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	5:00:14 PM	Tube furnace set to 1000
1/20/2011	5:20:14 PM	Helium valve closed
1/20/2011	5:20:14 PM	BCl3 valve closed
1/20/2011	5:20:14 PM	Main Vac valve closed
1/20/2011	5:20:14 PM	Bypass valve closed
1/20/2011	5:20:14 PM	H2 valve opened
1/20/2011	5:20:14 PM	PH3 valve opened
1/20/2011	5:20:14 PM	SiCl4 pre valve opened
1/20/2011	5:20:14 PM	SiCl4 post valve opened
1/20/2011	5:20:14 PM	Bubbler valve opened
1/20/2011	5:20:14 PM	Helium MFC set to  0.000000
1/20/2011	5:20:14 PM	H2 MFC set to  500.000000
1/20/2011	5:20:14 PM	BCl3 MFC set to  0.000000
1/20/2011	5:20:14 PM	PHl3 MFC set to  0.500000
1/20/2011	5:20:14 PM	SiCl4 MFC set to  50.000000
1/20/2011	5:20:14 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	5:20:14 PM	Tube furnace set to 1000
1/20/2011	5:37:14 PM	H2 valve closed
1/20/2011	5:37:14 PM	BCl3 valve closed
1/20/2011	5:37:14 PM	PH3 valve closed
1/20/2011	5:37:14 PM	SiCl4 pre valve closed
1/20/2011	5:37:14 PM	SiCl4 post valve closed
1/20/2011	5:37:14 PM	Main Vac valve closed
1/20/2011	5:37:14 PM	Bypass valve closed
1/20/2011	5:37:14 PM	Helium valve opened
1/20/2011	5:37:14 PM	Bubbler valve opened
1/20/2011	5:37:14 PM	Helium MFC set to  500.000000
1/20/2011	5:37:14 PM	H2 MFC set to  0.000000
1/20/2011	5:37:14 PM	BCl3 MFC set to  0.000000
1/20/2011	5:37:14 PM	PHl3 MFC set to  0.000000
1/20/2011	5:37:14 PM	SiCl4 MFC set to  0.000000
1/20/2011	5:37:14 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	5:37:14 PM	Tube furnace set to 0
1/20/2011	5:57:14 PM	Helium valve closed
1/20/2011	5:57:14 PM	H2 valve closed
1/20/2011	5:57:14 PM	BCl3 valve closed
1/20/2011	5:57:14 PM	PH3 valve closed
1/20/2011	5:57:14 PM	SiCl4 pre valve closed
1/20/2011	5:57:14 PM	SiCl4 post valve closed
1/20/2011	5:57:14 PM	Main Vac valve closed
1/20/2011	5:57:14 PM	Bypass valve closed
1/20/2011	5:57:14 PM	Bubbler valve closed
1/20/2011	5:57:14 PM	Helium MFC set to  0.000000
1/20/2011	5:57:14 PM	H2 MFC set to  0.000000
1/20/2011	5:57:14 PM	BCl3 MFC set to  0.000000
1/20/2011	5:57:14 PM	PHl3 MFC set to  0.000000
1/20/2011	5:57:14 PM	SiCl4 MFC set to  0.000000
1/20/2011	5:57:14 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	5:57:14 PM	Tube furnace set to 0
1/20/2011	5:57:14 PM	Run finished at 5:57 PM
1/20/2011	6:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	6:10:57 PM	Recipe started at 6:10 PM
1/20/2011	6:10:57 PM	Helium valve closed
1/20/2011	6:10:57 PM	H2 valve closed
1/20/2011	6:10:57 PM	BCl3 valve closed
1/20/2011	6:10:57 PM	PH3 valve closed
1/20/2011	6:10:57 PM	SiCl4 pre valve closed
1/20/2011	6:10:57 PM	SiCl4 post valve closed
1/20/2011	6:10:57 PM	Main Vac valve closed
1/20/2011	6:10:57 PM	Bubbler valve closed
1/20/2011	6:10:57 PM	Bypass valve opened
1/20/2011	6:10:57 PM	Helium MFC set to  0.000000
1/20/2011	6:10:57 PM	H2 MFC set to  0.000000
1/20/2011	6:10:57 PM	BCl3 MFC set to  0.000000
1/20/2011	6:10:57 PM	PHl3 MFC set to  0.000000
1/20/2011	6:10:57 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:10:57 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:10:58 PM	Tube furnace set to 0
1/20/2011	6:11:28 PM	Helium valve closed
1/20/2011	6:11:28 PM	H2 valve closed
1/20/2011	6:11:28 PM	BCl3 valve closed
1/20/2011	6:11:28 PM	PH3 valve closed
1/20/2011	6:11:28 PM	SiCl4 pre valve closed
1/20/2011	6:11:28 PM	SiCl4 post valve closed
1/20/2011	6:11:28 PM	Bubbler valve closed
1/20/2011	6:11:28 PM	Main Vac valve opened
1/20/2011	6:11:28 PM	Bypass valve opened
1/20/2011	6:11:28 PM	Helium MFC set to  0.000000
1/20/2011	6:11:28 PM	H2 MFC set to  0.000000
1/20/2011	6:11:28 PM	BCl3 MFC set to  0.000000
1/20/2011	6:11:28 PM	PHl3 MFC set to  0.000000
1/20/2011	6:11:28 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:11:28 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:11:29 PM	Tube furnace set to 0
1/20/2011	6:11:29 PM	Run finished at 6:11 PM
1/20/2011	6:11:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	6:12:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	6:12:33 PM	Recipe started at 6:12 PM
1/20/2011	6:12:33 PM	Helium valve closed
1/20/2011	6:12:33 PM	H2 valve closed
1/20/2011	6:12:33 PM	BCl3 valve closed
1/20/2011	6:12:33 PM	PH3 valve closed
1/20/2011	6:12:33 PM	SiCl4 pre valve closed
1/20/2011	6:12:33 PM	SiCl4 post valve closed
1/20/2011	6:12:33 PM	Main Vac valve closed
1/20/2011	6:12:33 PM	Bubbler valve closed
1/20/2011	6:12:33 PM	Bypass valve opened
1/20/2011	6:12:33 PM	Helium MFC set to  0.000000
1/20/2011	6:12:33 PM	H2 MFC set to  0.000000
1/20/2011	6:12:33 PM	BCl3 MFC set to  0.000000
1/20/2011	6:12:33 PM	PHl3 MFC set to  0.000000
1/20/2011	6:12:33 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:12:33 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:12:33 PM	Tube furnace set to 0
1/20/2011	6:12:33 PM	Helium valve closed
1/20/2011	6:12:33 PM	H2 valve closed
1/20/2011	6:12:33 PM	BCl3 valve closed
1/20/2011	6:12:33 PM	PH3 valve closed
1/20/2011	6:12:33 PM	SiCl4 pre valve closed
1/20/2011	6:12:33 PM	SiCl4 post valve closed
1/20/2011	6:12:33 PM	Bubbler valve closed
1/20/2011	6:12:33 PM	Main Vac valve opened
1/20/2011	6:12:33 PM	Bypass valve opened
1/20/2011	6:12:33 PM	Helium MFC set to  0.000000
1/20/2011	6:12:33 PM	H2 MFC set to  0.000000
1/20/2011	6:12:33 PM	BCl3 MFC set to  0.000000
1/20/2011	6:12:33 PM	PHl3 MFC set to  0.000000
1/20/2011	6:12:33 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:12:33 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:12:34 PM	Tube furnace set to 0
1/20/2011	6:13:34 PM	H2 valve closed
1/20/2011	6:13:34 PM	BCl3 valve closed
1/20/2011	6:13:34 PM	PH3 valve closed
1/20/2011	6:13:34 PM	SiCl4 pre valve closed
1/20/2011	6:13:34 PM	SiCl4 post valve closed
1/20/2011	6:13:34 PM	Bubbler valve closed
1/20/2011	6:13:34 PM	Helium valve opened
1/20/2011	6:13:34 PM	Main Vac valve opened
1/20/2011	6:13:34 PM	Bypass valve opened
1/20/2011	6:13:34 PM	Helium MFC set to  100.000000
1/20/2011	6:13:34 PM	H2 MFC set to  0.000000
1/20/2011	6:13:34 PM	BCl3 MFC set to  0.000000
1/20/2011	6:13:34 PM	PHl3 MFC set to  0.000000
1/20/2011	6:13:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:13:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:13:34 PM	Tube furnace set to 0
1/20/2011	6:14:34 PM	Helium valve closed
1/20/2011	6:14:34 PM	H2 valve closed
1/20/2011	6:14:34 PM	BCl3 valve closed
1/20/2011	6:14:34 PM	PH3 valve closed
1/20/2011	6:14:34 PM	SiCl4 pre valve closed
1/20/2011	6:14:34 PM	SiCl4 post valve closed
1/20/2011	6:14:34 PM	Bubbler valve closed
1/20/2011	6:14:34 PM	Main Vac valve opened
1/20/2011	6:14:34 PM	Bypass valve opened
1/20/2011	6:14:34 PM	Helium MFC set to  0.000000
1/20/2011	6:14:34 PM	H2 MFC set to  0.000000
1/20/2011	6:14:34 PM	BCl3 MFC set to  0.000000
1/20/2011	6:14:34 PM	PHl3 MFC set to  0.000000
1/20/2011	6:14:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:14:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:14:34 PM	Tube furnace set to 0
1/20/2011	6:15:34 PM	H2 valve closed
1/20/2011	6:15:34 PM	BCl3 valve closed
1/20/2011	6:15:34 PM	PH3 valve closed
1/20/2011	6:15:34 PM	SiCl4 pre valve closed
1/20/2011	6:15:34 PM	SiCl4 post valve closed
1/20/2011	6:15:34 PM	Bubbler valve closed
1/20/2011	6:15:34 PM	Helium valve opened
1/20/2011	6:15:34 PM	Main Vac valve opened
1/20/2011	6:15:34 PM	Bypass valve opened
1/20/2011	6:15:34 PM	Helium MFC set to  100.000000
1/20/2011	6:15:34 PM	H2 MFC set to  0.000000
1/20/2011	6:15:34 PM	BCl3 MFC set to  0.000000
1/20/2011	6:15:34 PM	PHl3 MFC set to  0.000000
1/20/2011	6:15:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:15:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:15:34 PM	Tube furnace set to 0
1/20/2011	6:16:34 PM	Helium valve closed
1/20/2011	6:16:34 PM	H2 valve closed
1/20/2011	6:16:34 PM	BCl3 valve closed
1/20/2011	6:16:34 PM	PH3 valve closed
1/20/2011	6:16:34 PM	SiCl4 pre valve closed
1/20/2011	6:16:34 PM	SiCl4 post valve closed
1/20/2011	6:16:34 PM	Bubbler valve closed
1/20/2011	6:16:34 PM	Main Vac valve opened
1/20/2011	6:16:34 PM	Bypass valve opened
1/20/2011	6:16:34 PM	Helium MFC set to  0.000000
1/20/2011	6:16:34 PM	H2 MFC set to  0.000000
1/20/2011	6:16:34 PM	BCl3 MFC set to  0.000000
1/20/2011	6:16:34 PM	PHl3 MFC set to  0.000000
1/20/2011	6:16:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:16:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:16:34 PM	Tube furnace set to 0
1/20/2011	6:17:34 PM	H2 valve closed
1/20/2011	6:17:34 PM	BCl3 valve closed
1/20/2011	6:17:34 PM	PH3 valve closed
1/20/2011	6:17:34 PM	SiCl4 pre valve closed
1/20/2011	6:17:34 PM	SiCl4 post valve closed
1/20/2011	6:17:34 PM	Bubbler valve closed
1/20/2011	6:17:34 PM	Helium valve opened
1/20/2011	6:17:34 PM	Main Vac valve opened
1/20/2011	6:17:34 PM	Bypass valve opened
1/20/2011	6:17:34 PM	Helium MFC set to  100.000000
1/20/2011	6:17:34 PM	H2 MFC set to  0.000000
1/20/2011	6:17:34 PM	BCl3 MFC set to  0.000000
1/20/2011	6:17:34 PM	PHl3 MFC set to  0.000000
1/20/2011	6:17:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:17:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:17:35 PM	Tube furnace set to 0
1/20/2011	6:18:35 PM	Helium valve closed
1/20/2011	6:18:35 PM	H2 valve closed
1/20/2011	6:18:35 PM	BCl3 valve closed
1/20/2011	6:18:35 PM	PH3 valve closed
1/20/2011	6:18:35 PM	SiCl4 pre valve closed
1/20/2011	6:18:35 PM	SiCl4 post valve closed
1/20/2011	6:18:35 PM	Bubbler valve closed
1/20/2011	6:18:35 PM	Main Vac valve opened
1/20/2011	6:18:35 PM	Bypass valve opened
1/20/2011	6:18:35 PM	Helium MFC set to  0.000000
1/20/2011	6:18:35 PM	H2 MFC set to  0.000000
1/20/2011	6:18:35 PM	BCl3 MFC set to  0.000000
1/20/2011	6:18:35 PM	PHl3 MFC set to  0.000000
1/20/2011	6:18:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:18:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:18:35 PM	Tube furnace set to 0
1/20/2011	6:19:35 PM	H2 valve closed
1/20/2011	6:19:35 PM	BCl3 valve closed
1/20/2011	6:19:35 PM	PH3 valve closed
1/20/2011	6:19:35 PM	SiCl4 pre valve closed
1/20/2011	6:19:35 PM	SiCl4 post valve closed
1/20/2011	6:19:35 PM	Bubbler valve closed
1/20/2011	6:19:35 PM	Helium valve opened
1/20/2011	6:19:35 PM	Main Vac valve opened
1/20/2011	6:19:35 PM	Bypass valve opened
1/20/2011	6:19:35 PM	Helium MFC set to  100.000000
1/20/2011	6:19:35 PM	H2 MFC set to  0.000000
1/20/2011	6:19:35 PM	BCl3 MFC set to  0.000000
1/20/2011	6:19:35 PM	PHl3 MFC set to  0.000000
1/20/2011	6:19:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:19:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:19:35 PM	Tube furnace set to 0
1/20/2011	6:20:35 PM	Helium valve closed
1/20/2011	6:20:35 PM	H2 valve closed
1/20/2011	6:20:35 PM	BCl3 valve closed
1/20/2011	6:20:35 PM	PH3 valve closed
1/20/2011	6:20:35 PM	SiCl4 pre valve closed
1/20/2011	6:20:35 PM	SiCl4 post valve closed
1/20/2011	6:20:35 PM	Bubbler valve closed
1/20/2011	6:20:35 PM	Main Vac valve opened
1/20/2011	6:20:35 PM	Bypass valve opened
1/20/2011	6:20:35 PM	Helium MFC set to  0.000000
1/20/2011	6:20:35 PM	H2 MFC set to  0.000000
1/20/2011	6:20:35 PM	BCl3 MFC set to  0.000000
1/20/2011	6:20:35 PM	PHl3 MFC set to  0.000000
1/20/2011	6:20:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:20:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:20:35 PM	Tube furnace set to 0
1/20/2011	6:21:35 PM	H2 valve closed
1/20/2011	6:21:35 PM	BCl3 valve closed
1/20/2011	6:21:35 PM	PH3 valve closed
1/20/2011	6:21:35 PM	SiCl4 pre valve closed
1/20/2011	6:21:35 PM	SiCl4 post valve closed
1/20/2011	6:21:35 PM	Bubbler valve closed
1/20/2011	6:21:35 PM	Helium valve opened
1/20/2011	6:21:35 PM	Main Vac valve opened
1/20/2011	6:21:35 PM	Bypass valve opened
1/20/2011	6:21:35 PM	Helium MFC set to  100.000000
1/20/2011	6:21:35 PM	H2 MFC set to  0.000000
1/20/2011	6:21:35 PM	BCl3 MFC set to  0.000000
1/20/2011	6:21:35 PM	PHl3 MFC set to  0.000000
1/20/2011	6:21:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:21:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:21:35 PM	Tube furnace set to 0
1/20/2011	6:22:35 PM	Helium valve closed
1/20/2011	6:22:35 PM	H2 valve closed
1/20/2011	6:22:35 PM	BCl3 valve closed
1/20/2011	6:22:35 PM	PH3 valve closed
1/20/2011	6:22:35 PM	SiCl4 pre valve closed
1/20/2011	6:22:35 PM	SiCl4 post valve closed
1/20/2011	6:22:35 PM	Bubbler valve closed
1/20/2011	6:22:35 PM	Main Vac valve opened
1/20/2011	6:22:35 PM	Bypass valve opened
1/20/2011	6:22:35 PM	Helium MFC set to  0.000000
1/20/2011	6:22:35 PM	H2 MFC set to  0.000000
1/20/2011	6:22:35 PM	BCl3 MFC set to  0.000000
1/20/2011	6:22:35 PM	PHl3 MFC set to  0.000000
1/20/2011	6:22:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:22:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:22:36 PM	Tube furnace set to 0
1/20/2011	6:23:36 PM	H2 valve closed
1/20/2011	6:23:36 PM	BCl3 valve closed
1/20/2011	6:23:36 PM	PH3 valve closed
1/20/2011	6:23:36 PM	SiCl4 pre valve closed
1/20/2011	6:23:36 PM	SiCl4 post valve closed
1/20/2011	6:23:36 PM	Bubbler valve closed
1/20/2011	6:23:36 PM	Helium valve opened
1/20/2011	6:23:36 PM	Main Vac valve opened
1/20/2011	6:23:36 PM	Bypass valve opened
1/20/2011	6:23:36 PM	Helium MFC set to  100.000000
1/20/2011	6:23:36 PM	H2 MFC set to  0.000000
1/20/2011	6:23:36 PM	BCl3 MFC set to  0.000000
1/20/2011	6:23:36 PM	PHl3 MFC set to  0.000000
1/20/2011	6:23:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:23:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:23:36 PM	Tube furnace set to 0
1/20/2011	6:24:36 PM	Helium valve closed
1/20/2011	6:24:36 PM	H2 valve closed
1/20/2011	6:24:36 PM	BCl3 valve closed
1/20/2011	6:24:36 PM	PH3 valve closed
1/20/2011	6:24:36 PM	SiCl4 pre valve closed
1/20/2011	6:24:36 PM	SiCl4 post valve closed
1/20/2011	6:24:36 PM	Bubbler valve closed
1/20/2011	6:24:36 PM	Main Vac valve opened
1/20/2011	6:24:36 PM	Bypass valve opened
1/20/2011	6:24:36 PM	Helium MFC set to  0.000000
1/20/2011	6:24:36 PM	H2 MFC set to  0.000000
1/20/2011	6:24:36 PM	BCl3 MFC set to  0.000000
1/20/2011	6:24:36 PM	PHl3 MFC set to  0.000000
1/20/2011	6:24:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:24:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:24:36 PM	Tube furnace set to 0
1/20/2011	6:25:36 PM	H2 valve closed
1/20/2011	6:25:36 PM	BCl3 valve closed
1/20/2011	6:25:36 PM	PH3 valve closed
1/20/2011	6:25:36 PM	SiCl4 pre valve closed
1/20/2011	6:25:36 PM	SiCl4 post valve closed
1/20/2011	6:25:36 PM	Bubbler valve closed
1/20/2011	6:25:36 PM	Helium valve opened
1/20/2011	6:25:36 PM	Main Vac valve opened
1/20/2011	6:25:36 PM	Bypass valve opened
1/20/2011	6:25:36 PM	Helium MFC set to  100.000000
1/20/2011	6:25:36 PM	H2 MFC set to  0.000000
1/20/2011	6:25:36 PM	BCl3 MFC set to  0.000000
1/20/2011	6:25:36 PM	PHl3 MFC set to  0.000000
1/20/2011	6:25:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:25:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:25:36 PM	Tube furnace set to 0
1/20/2011	6:26:36 PM	Helium valve closed
1/20/2011	6:26:36 PM	H2 valve closed
1/20/2011	6:26:36 PM	BCl3 valve closed
1/20/2011	6:26:36 PM	PH3 valve closed
1/20/2011	6:26:36 PM	SiCl4 pre valve closed
1/20/2011	6:26:36 PM	SiCl4 post valve closed
1/20/2011	6:26:36 PM	Bubbler valve closed
1/20/2011	6:26:36 PM	Main Vac valve opened
1/20/2011	6:26:36 PM	Bypass valve opened
1/20/2011	6:26:36 PM	Helium MFC set to  0.000000
1/20/2011	6:26:36 PM	H2 MFC set to  0.000000
1/20/2011	6:26:36 PM	BCl3 MFC set to  0.000000
1/20/2011	6:26:36 PM	PHl3 MFC set to  0.000000
1/20/2011	6:26:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:26:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:26:36 PM	Tube furnace set to 0
1/20/2011	6:27:37 PM	H2 valve closed
1/20/2011	6:27:37 PM	BCl3 valve closed
1/20/2011	6:27:37 PM	PH3 valve closed
1/20/2011	6:27:37 PM	SiCl4 pre valve closed
1/20/2011	6:27:37 PM	SiCl4 post valve closed
1/20/2011	6:27:37 PM	Bubbler valve closed
1/20/2011	6:27:37 PM	Helium valve opened
1/20/2011	6:27:37 PM	Main Vac valve opened
1/20/2011	6:27:37 PM	Bypass valve opened
1/20/2011	6:27:37 PM	Helium MFC set to  100.000000
1/20/2011	6:27:37 PM	H2 MFC set to  0.000000
1/20/2011	6:27:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:27:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:27:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:27:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:27:37 PM	Tube furnace set to 0
1/20/2011	6:28:37 PM	Helium valve closed
1/20/2011	6:28:37 PM	H2 valve closed
1/20/2011	6:28:37 PM	BCl3 valve closed
1/20/2011	6:28:37 PM	PH3 valve closed
1/20/2011	6:28:37 PM	SiCl4 pre valve closed
1/20/2011	6:28:37 PM	SiCl4 post valve closed
1/20/2011	6:28:37 PM	Bubbler valve closed
1/20/2011	6:28:37 PM	Main Vac valve opened
1/20/2011	6:28:37 PM	Bypass valve opened
1/20/2011	6:28:37 PM	Helium MFC set to  0.000000
1/20/2011	6:28:37 PM	H2 MFC set to  0.000000
1/20/2011	6:28:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:28:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:28:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:28:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:28:37 PM	Tube furnace set to 0
1/20/2011	6:29:37 PM	H2 valve closed
1/20/2011	6:29:37 PM	BCl3 valve closed
1/20/2011	6:29:37 PM	PH3 valve closed
1/20/2011	6:29:37 PM	SiCl4 pre valve closed
1/20/2011	6:29:37 PM	SiCl4 post valve closed
1/20/2011	6:29:37 PM	Bubbler valve closed
1/20/2011	6:29:37 PM	Helium valve opened
1/20/2011	6:29:37 PM	Main Vac valve opened
1/20/2011	6:29:37 PM	Bypass valve opened
1/20/2011	6:29:37 PM	Helium MFC set to  100.000000
1/20/2011	6:29:37 PM	H2 MFC set to  0.000000
1/20/2011	6:29:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:29:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:29:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:29:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:29:37 PM	Tube furnace set to 0
1/20/2011	6:30:37 PM	Helium valve closed
1/20/2011	6:30:37 PM	H2 valve closed
1/20/2011	6:30:37 PM	BCl3 valve closed
1/20/2011	6:30:37 PM	PH3 valve closed
1/20/2011	6:30:37 PM	SiCl4 pre valve closed
1/20/2011	6:30:37 PM	SiCl4 post valve closed
1/20/2011	6:30:37 PM	Bubbler valve closed
1/20/2011	6:30:37 PM	Main Vac valve opened
1/20/2011	6:30:37 PM	Bypass valve opened
1/20/2011	6:30:37 PM	Helium MFC set to  0.000000
1/20/2011	6:30:37 PM	H2 MFC set to  0.000000
1/20/2011	6:30:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:30:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:30:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:30:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:30:37 PM	Tube furnace set to 0
1/20/2011	6:31:37 PM	H2 valve closed
1/20/2011	6:31:37 PM	BCl3 valve closed
1/20/2011	6:31:37 PM	PH3 valve closed
1/20/2011	6:31:37 PM	SiCl4 pre valve closed
1/20/2011	6:31:37 PM	SiCl4 post valve closed
1/20/2011	6:31:37 PM	Bubbler valve closed
1/20/2011	6:31:37 PM	Helium valve opened
1/20/2011	6:31:37 PM	Main Vac valve opened
1/20/2011	6:31:37 PM	Bypass valve opened
1/20/2011	6:31:37 PM	Helium MFC set to  100.000000
1/20/2011	6:31:37 PM	H2 MFC set to  0.000000
1/20/2011	6:31:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:31:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:31:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:31:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:31:38 PM	Tube furnace set to 0
1/20/2011	6:32:38 PM	Helium valve closed
1/20/2011	6:32:38 PM	H2 valve closed
1/20/2011	6:32:38 PM	BCl3 valve closed
1/20/2011	6:32:38 PM	PH3 valve closed
1/20/2011	6:32:38 PM	SiCl4 pre valve closed
1/20/2011	6:32:38 PM	SiCl4 post valve closed
1/20/2011	6:32:38 PM	Bubbler valve closed
1/20/2011	6:32:38 PM	Main Vac valve opened
1/20/2011	6:32:38 PM	Bypass valve opened
1/20/2011	6:32:38 PM	Helium MFC set to  0.000000
1/20/2011	6:32:38 PM	H2 MFC set to  0.000000
1/20/2011	6:32:38 PM	BCl3 MFC set to  0.000000
1/20/2011	6:32:38 PM	PHl3 MFC set to  0.000000
1/20/2011	6:32:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:32:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:32:38 PM	Tube furnace set to 0
1/20/2011	6:32:39 PM	Run finished at 6:32 PM
1/20/2011	6:32:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	6:33:11 PM	Bypass valve closed
1/20/2011	6:33:11 PM	Main Vac valve closed
1/20/2011	6:33:21 PM	Main Vac valve opened
1/20/2011	6:33:22 PM	Bypass valve opened
1/20/2011	6:33:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	6:33:37 PM	Recipe started at 6:33 PM
1/20/2011	6:33:37 PM	Helium valve closed
1/20/2011	6:33:37 PM	H2 valve closed
1/20/2011	6:33:37 PM	BCl3 valve closed
1/20/2011	6:33:37 PM	PH3 valve closed
1/20/2011	6:33:37 PM	SiCl4 pre valve closed
1/20/2011	6:33:37 PM	SiCl4 post valve closed
1/20/2011	6:33:37 PM	Main Vac valve closed
1/20/2011	6:33:37 PM	Bubbler valve closed
1/20/2011	6:33:37 PM	Bypass valve opened
1/20/2011	6:33:37 PM	Helium MFC set to  0.000000
1/20/2011	6:33:37 PM	H2 MFC set to  0.000000
1/20/2011	6:33:37 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:37 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:37 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:37 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:37 PM	Tube furnace set to 0
1/20/2011	6:33:38 PM	Helium valve closed
1/20/2011	6:33:38 PM	H2 valve closed
1/20/2011	6:33:38 PM	BCl3 valve closed
1/20/2011	6:33:38 PM	PH3 valve closed
1/20/2011	6:33:38 PM	SiCl4 pre valve closed
1/20/2011	6:33:38 PM	SiCl4 post valve closed
1/20/2011	6:33:38 PM	Bubbler valve closed
1/20/2011	6:33:38 PM	Main Vac valve opened
1/20/2011	6:33:38 PM	Bypass valve opened
1/20/2011	6:33:38 PM	Helium MFC set to  0.000000
1/20/2011	6:33:38 PM	H2 MFC set to  0.000000
1/20/2011	6:33:38 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:38 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:38 PM	Tube furnace set to 0
1/20/2011	6:33:56 PM	H2 valve closed
1/20/2011	6:33:56 PM	BCl3 valve closed
1/20/2011	6:33:56 PM	PH3 valve closed
1/20/2011	6:33:56 PM	SiCl4 pre valve closed
1/20/2011	6:33:56 PM	SiCl4 post valve closed
1/20/2011	6:33:56 PM	Bubbler valve closed
1/20/2011	6:33:56 PM	Helium valve opened
1/20/2011	6:33:56 PM	Main Vac valve opened
1/20/2011	6:33:56 PM	Bypass valve opened
1/20/2011	6:33:56 PM	Helium MFC set to  100.000000
1/20/2011	6:33:56 PM	H2 MFC set to  0.000000
1/20/2011	6:33:56 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:56 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:56 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:56 PM	Tube furnace set to 0
1/20/2011	6:33:56 PM	Helium valve closed
1/20/2011	6:33:56 PM	H2 valve closed
1/20/2011	6:33:56 PM	BCl3 valve closed
1/20/2011	6:33:56 PM	PH3 valve closed
1/20/2011	6:33:56 PM	SiCl4 pre valve closed
1/20/2011	6:33:56 PM	SiCl4 post valve closed
1/20/2011	6:33:56 PM	Bubbler valve closed
1/20/2011	6:33:56 PM	Main Vac valve opened
1/20/2011	6:33:56 PM	Bypass valve opened
1/20/2011	6:33:56 PM	Helium MFC set to  0.000000
1/20/2011	6:33:56 PM	H2 MFC set to  0.000000
1/20/2011	6:33:56 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:56 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:56 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:56 PM	Tube furnace set to 0
1/20/2011	6:33:58 PM	H2 valve closed
1/20/2011	6:33:58 PM	BCl3 valve closed
1/20/2011	6:33:58 PM	PH3 valve closed
1/20/2011	6:33:58 PM	SiCl4 pre valve closed
1/20/2011	6:33:58 PM	SiCl4 post valve closed
1/20/2011	6:33:58 PM	Bubbler valve closed
1/20/2011	6:33:58 PM	Helium valve opened
1/20/2011	6:33:58 PM	Main Vac valve opened
1/20/2011	6:33:58 PM	Bypass valve opened
1/20/2011	6:33:58 PM	Helium MFC set to  100.000000
1/20/2011	6:33:58 PM	H2 MFC set to  0.000000
1/20/2011	6:33:59 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:59 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:59 PM	Tube furnace set to 0
1/20/2011	6:33:59 PM	Helium valve closed
1/20/2011	6:33:59 PM	H2 valve closed
1/20/2011	6:33:59 PM	BCl3 valve closed
1/20/2011	6:33:59 PM	PH3 valve closed
1/20/2011	6:33:59 PM	SiCl4 pre valve closed
1/20/2011	6:33:59 PM	SiCl4 post valve closed
1/20/2011	6:33:59 PM	Bubbler valve closed
1/20/2011	6:33:59 PM	Main Vac valve opened
1/20/2011	6:33:59 PM	Bypass valve opened
1/20/2011	6:33:59 PM	Helium MFC set to  0.000000
1/20/2011	6:33:59 PM	H2 MFC set to  0.000000
1/20/2011	6:33:59 PM	BCl3 MFC set to  0.000000
1/20/2011	6:33:59 PM	PHl3 MFC set to  0.000000
1/20/2011	6:33:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:33:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:33:59 PM	Tube furnace set to 0
1/20/2011	6:34:59 PM	H2 valve closed
1/20/2011	6:34:59 PM	BCl3 valve closed
1/20/2011	6:34:59 PM	PH3 valve closed
1/20/2011	6:34:59 PM	SiCl4 pre valve closed
1/20/2011	6:34:59 PM	SiCl4 post valve closed
1/20/2011	6:34:59 PM	Bubbler valve closed
1/20/2011	6:34:59 PM	Helium valve opened
1/20/2011	6:34:59 PM	Main Vac valve opened
1/20/2011	6:34:59 PM	Bypass valve opened
1/20/2011	6:34:59 PM	Helium MFC set to  100.000000
1/20/2011	6:34:59 PM	H2 MFC set to  0.000000
1/20/2011	6:34:59 PM	BCl3 MFC set to  0.000000
1/20/2011	6:34:59 PM	PHl3 MFC set to  0.000000
1/20/2011	6:34:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:34:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:34:59 PM	Tube furnace set to 0
1/20/2011	6:35:59 PM	Helium valve closed
1/20/2011	6:35:59 PM	H2 valve closed
1/20/2011	6:35:59 PM	BCl3 valve closed
1/20/2011	6:35:59 PM	PH3 valve closed
1/20/2011	6:35:59 PM	SiCl4 pre valve closed
1/20/2011	6:35:59 PM	SiCl4 post valve closed
1/20/2011	6:35:59 PM	Bubbler valve closed
1/20/2011	6:35:59 PM	Main Vac valve opened
1/20/2011	6:35:59 PM	Bypass valve opened
1/20/2011	6:35:59 PM	Helium MFC set to  0.000000
1/20/2011	6:35:59 PM	H2 MFC set to  0.000000
1/20/2011	6:35:59 PM	BCl3 MFC set to  0.000000
1/20/2011	6:35:59 PM	PHl3 MFC set to  0.000000
1/20/2011	6:35:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:35:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:36:00 PM	Tube furnace set to 0
1/20/2011	6:37:00 PM	H2 valve closed
1/20/2011	6:37:00 PM	BCl3 valve closed
1/20/2011	6:37:00 PM	PH3 valve closed
1/20/2011	6:37:00 PM	SiCl4 pre valve closed
1/20/2011	6:37:00 PM	SiCl4 post valve closed
1/20/2011	6:37:00 PM	Bubbler valve closed
1/20/2011	6:37:00 PM	Helium valve opened
1/20/2011	6:37:00 PM	Main Vac valve opened
1/20/2011	6:37:00 PM	Bypass valve opened
1/20/2011	6:37:00 PM	Helium MFC set to  100.000000
1/20/2011	6:37:00 PM	H2 MFC set to  0.000000
1/20/2011	6:37:00 PM	BCl3 MFC set to  0.000000
1/20/2011	6:37:00 PM	PHl3 MFC set to  0.000000
1/20/2011	6:37:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:37:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:37:00 PM	Tube furnace set to 0
1/20/2011	6:38:00 PM	Helium valve closed
1/20/2011	6:38:00 PM	H2 valve closed
1/20/2011	6:38:00 PM	BCl3 valve closed
1/20/2011	6:38:00 PM	PH3 valve closed
1/20/2011	6:38:00 PM	SiCl4 pre valve closed
1/20/2011	6:38:00 PM	SiCl4 post valve closed
1/20/2011	6:38:00 PM	Bubbler valve closed
1/20/2011	6:38:00 PM	Main Vac valve opened
1/20/2011	6:38:00 PM	Bypass valve opened
1/20/2011	6:38:00 PM	Helium MFC set to  0.000000
1/20/2011	6:38:00 PM	H2 MFC set to  0.000000
1/20/2011	6:38:00 PM	BCl3 MFC set to  0.000000
1/20/2011	6:38:00 PM	PHl3 MFC set to  0.000000
1/20/2011	6:38:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:38:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:38:00 PM	Tube furnace set to 0
1/20/2011	6:39:00 PM	H2 valve closed
1/20/2011	6:39:00 PM	BCl3 valve closed
1/20/2011	6:39:00 PM	PH3 valve closed
1/20/2011	6:39:00 PM	SiCl4 pre valve closed
1/20/2011	6:39:00 PM	SiCl4 post valve closed
1/20/2011	6:39:00 PM	Bubbler valve closed
1/20/2011	6:39:00 PM	Helium valve opened
1/20/2011	6:39:00 PM	Main Vac valve opened
1/20/2011	6:39:00 PM	Bypass valve opened
1/20/2011	6:39:00 PM	Helium MFC set to  100.000000
1/20/2011	6:39:00 PM	H2 MFC set to  0.000000
1/20/2011	6:39:00 PM	BCl3 MFC set to  0.000000
1/20/2011	6:39:00 PM	PHl3 MFC set to  0.000000
1/20/2011	6:39:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:39:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:39:00 PM	Tube furnace set to 0
1/20/2011	6:40:00 PM	Helium valve closed
1/20/2011	6:40:00 PM	H2 valve closed
1/20/2011	6:40:00 PM	BCl3 valve closed
1/20/2011	6:40:00 PM	PH3 valve closed
1/20/2011	6:40:00 PM	SiCl4 pre valve closed
1/20/2011	6:40:00 PM	SiCl4 post valve closed
1/20/2011	6:40:00 PM	Bubbler valve closed
1/20/2011	6:40:00 PM	Main Vac valve opened
1/20/2011	6:40:00 PM	Bypass valve opened
1/20/2011	6:40:00 PM	Helium MFC set to  0.000000
1/20/2011	6:40:00 PM	H2 MFC set to  0.000000
1/20/2011	6:40:00 PM	BCl3 MFC set to  0.000000
1/20/2011	6:40:00 PM	PHl3 MFC set to  0.000000
1/20/2011	6:40:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:40:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:40:00 PM	Tube furnace set to 0
1/20/2011	6:41:00 PM	H2 valve closed
1/20/2011	6:41:00 PM	BCl3 valve closed
1/20/2011	6:41:00 PM	PH3 valve closed
1/20/2011	6:41:00 PM	SiCl4 pre valve closed
1/20/2011	6:41:00 PM	SiCl4 post valve closed
1/20/2011	6:41:00 PM	Bubbler valve closed
1/20/2011	6:41:00 PM	Helium valve opened
1/20/2011	6:41:00 PM	Main Vac valve opened
1/20/2011	6:41:00 PM	Bypass valve opened
1/20/2011	6:41:00 PM	Helium MFC set to  100.000000
1/20/2011	6:41:00 PM	H2 MFC set to  0.000000
1/20/2011	6:41:00 PM	BCl3 MFC set to  0.000000
1/20/2011	6:41:00 PM	PHl3 MFC set to  0.000000
1/20/2011	6:41:00 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:41:00 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:41:01 PM	Tube furnace set to 0
1/20/2011	6:42:01 PM	Helium valve closed
1/20/2011	6:42:01 PM	H2 valve closed
1/20/2011	6:42:01 PM	BCl3 valve closed
1/20/2011	6:42:01 PM	PH3 valve closed
1/20/2011	6:42:01 PM	SiCl4 pre valve closed
1/20/2011	6:42:01 PM	SiCl4 post valve closed
1/20/2011	6:42:01 PM	Bubbler valve closed
1/20/2011	6:42:01 PM	Main Vac valve opened
1/20/2011	6:42:01 PM	Bypass valve opened
1/20/2011	6:42:01 PM	Helium MFC set to  0.000000
1/20/2011	6:42:01 PM	H2 MFC set to  0.000000
1/20/2011	6:42:01 PM	BCl3 MFC set to  0.000000
1/20/2011	6:42:01 PM	PHl3 MFC set to  0.000000
1/20/2011	6:42:01 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:42:01 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:42:01 PM	Tube furnace set to 0
1/20/2011	6:43:01 PM	H2 valve closed
1/20/2011	6:43:01 PM	BCl3 valve closed
1/20/2011	6:43:01 PM	PH3 valve closed
1/20/2011	6:43:01 PM	SiCl4 pre valve closed
1/20/2011	6:43:01 PM	SiCl4 post valve closed
1/20/2011	6:43:01 PM	Bubbler valve closed
1/20/2011	6:43:01 PM	Helium valve opened
1/20/2011	6:43:01 PM	Main Vac valve opened
1/20/2011	6:43:01 PM	Bypass valve opened
1/20/2011	6:43:01 PM	Helium MFC set to  100.000000
1/20/2011	6:43:01 PM	H2 MFC set to  0.000000
1/20/2011	6:43:01 PM	BCl3 MFC set to  0.000000
1/20/2011	6:43:01 PM	PHl3 MFC set to  0.000000
1/20/2011	6:43:01 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:43:01 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:43:01 PM	Tube furnace set to 0
1/20/2011	6:44:01 PM	Helium valve closed
1/20/2011	6:44:01 PM	H2 valve closed
1/20/2011	6:44:01 PM	BCl3 valve closed
1/20/2011	6:44:01 PM	PH3 valve closed
1/20/2011	6:44:01 PM	SiCl4 pre valve closed
1/20/2011	6:44:01 PM	SiCl4 post valve closed
1/20/2011	6:44:01 PM	Bubbler valve closed
1/20/2011	6:44:01 PM	Main Vac valve opened
1/20/2011	6:44:01 PM	Bypass valve opened
1/20/2011	6:44:01 PM	Helium MFC set to  0.000000
1/20/2011	6:44:01 PM	H2 MFC set to  0.000000
1/20/2011	6:44:01 PM	BCl3 MFC set to  0.000000
1/20/2011	6:44:01 PM	PHl3 MFC set to  0.000000
1/20/2011	6:44:01 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:44:01 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:44:01 PM	Tube furnace set to 0
1/20/2011	6:45:01 PM	H2 valve closed
1/20/2011	6:45:01 PM	BCl3 valve closed
1/20/2011	6:45:01 PM	PH3 valve closed
1/20/2011	6:45:01 PM	SiCl4 pre valve closed
1/20/2011	6:45:01 PM	SiCl4 post valve closed
1/20/2011	6:45:01 PM	Bubbler valve closed
1/20/2011	6:45:01 PM	Helium valve opened
1/20/2011	6:45:01 PM	Main Vac valve opened
1/20/2011	6:45:01 PM	Bypass valve opened
1/20/2011	6:45:01 PM	Helium MFC set to  100.000000
1/20/2011	6:45:01 PM	H2 MFC set to  0.000000
1/20/2011	6:45:01 PM	BCl3 MFC set to  0.000000
1/20/2011	6:45:01 PM	PHl3 MFC set to  0.000000
1/20/2011	6:45:01 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:45:01 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:45:01 PM	Tube furnace set to 0
1/20/2011	6:46:01 PM	Helium valve closed
1/20/2011	6:46:01 PM	H2 valve closed
1/20/2011	6:46:01 PM	BCl3 valve closed
1/20/2011	6:46:01 PM	PH3 valve closed
1/20/2011	6:46:01 PM	SiCl4 pre valve closed
1/20/2011	6:46:01 PM	SiCl4 post valve closed
1/20/2011	6:46:01 PM	Bubbler valve closed
1/20/2011	6:46:01 PM	Main Vac valve opened
1/20/2011	6:46:01 PM	Bypass valve opened
1/20/2011	6:46:01 PM	Helium MFC set to  0.000000
1/20/2011	6:46:01 PM	H2 MFC set to  0.000000
1/20/2011	6:46:01 PM	BCl3 MFC set to  0.000000
1/20/2011	6:46:01 PM	PHl3 MFC set to  0.000000
1/20/2011	6:46:01 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:46:01 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:46:02 PM	Tube furnace set to 0
1/20/2011	6:47:02 PM	H2 valve closed
1/20/2011	6:47:02 PM	BCl3 valve closed
1/20/2011	6:47:02 PM	PH3 valve closed
1/20/2011	6:47:02 PM	SiCl4 pre valve closed
1/20/2011	6:47:02 PM	SiCl4 post valve closed
1/20/2011	6:47:02 PM	Bubbler valve closed
1/20/2011	6:47:02 PM	Helium valve opened
1/20/2011	6:47:02 PM	Main Vac valve opened
1/20/2011	6:47:02 PM	Bypass valve opened
1/20/2011	6:47:02 PM	Helium MFC set to  100.000000
1/20/2011	6:47:02 PM	H2 MFC set to  0.000000
1/20/2011	6:47:02 PM	BCl3 MFC set to  0.000000
1/20/2011	6:47:02 PM	PHl3 MFC set to  0.000000
1/20/2011	6:47:02 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:47:02 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:47:02 PM	Tube furnace set to 0
1/20/2011	6:48:02 PM	Helium valve closed
1/20/2011	6:48:02 PM	H2 valve closed
1/20/2011	6:48:02 PM	BCl3 valve closed
1/20/2011	6:48:02 PM	PH3 valve closed
1/20/2011	6:48:02 PM	SiCl4 pre valve closed
1/20/2011	6:48:02 PM	SiCl4 post valve closed
1/20/2011	6:48:02 PM	Bubbler valve closed
1/20/2011	6:48:02 PM	Main Vac valve opened
1/20/2011	6:48:02 PM	Bypass valve opened
1/20/2011	6:48:02 PM	Helium MFC set to  0.000000
1/20/2011	6:48:02 PM	H2 MFC set to  0.000000
1/20/2011	6:48:02 PM	BCl3 MFC set to  0.000000
1/20/2011	6:48:02 PM	PHl3 MFC set to  0.000000
1/20/2011	6:48:02 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:48:02 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:48:02 PM	Tube furnace set to 0
1/20/2011	6:49:02 PM	H2 valve closed
1/20/2011	6:49:02 PM	BCl3 valve closed
1/20/2011	6:49:02 PM	PH3 valve closed
1/20/2011	6:49:02 PM	SiCl4 pre valve closed
1/20/2011	6:49:02 PM	SiCl4 post valve closed
1/20/2011	6:49:02 PM	Bubbler valve closed
1/20/2011	6:49:02 PM	Helium valve opened
1/20/2011	6:49:02 PM	Main Vac valve opened
1/20/2011	6:49:02 PM	Bypass valve opened
1/20/2011	6:49:02 PM	Helium MFC set to  100.000000
1/20/2011	6:49:02 PM	H2 MFC set to  0.000000
1/20/2011	6:49:02 PM	BCl3 MFC set to  0.000000
1/20/2011	6:49:02 PM	PHl3 MFC set to  0.000000
1/20/2011	6:49:02 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:49:02 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:49:02 PM	Tube furnace set to 0
1/20/2011	6:50:02 PM	Helium valve closed
1/20/2011	6:50:02 PM	H2 valve closed
1/20/2011	6:50:02 PM	BCl3 valve closed
1/20/2011	6:50:02 PM	PH3 valve closed
1/20/2011	6:50:02 PM	SiCl4 pre valve closed
1/20/2011	6:50:02 PM	SiCl4 post valve closed
1/20/2011	6:50:02 PM	Bubbler valve closed
1/20/2011	6:50:02 PM	Main Vac valve opened
1/20/2011	6:50:02 PM	Bypass valve opened
1/20/2011	6:50:02 PM	Helium MFC set to  0.000000
1/20/2011	6:50:02 PM	H2 MFC set to  0.000000
1/20/2011	6:50:02 PM	BCl3 MFC set to  0.000000
1/20/2011	6:50:02 PM	PHl3 MFC set to  0.000000
1/20/2011	6:50:02 PM	SiCl4 MFC set to  0.000000
1/20/2011	6:50:02 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	6:50:02 PM	Tube furnace set to 0
1/20/2011	6:50:03 PM	Run finished at 6:50 PM
1/20/2011	6:50:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	7:04:14 PM	Helium valve opened
1/20/2011	7:04:15 PM	Helium valve closed
1/20/2011	7:04:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	7:04:29 PM	Recipe started at 7:04 PM
1/20/2011	7:04:29 PM	Helium valve closed
1/20/2011	7:04:29 PM	H2 valve closed
1/20/2011	7:04:29 PM	BCl3 valve closed
1/20/2011	7:04:29 PM	PH3 valve closed
1/20/2011	7:04:29 PM	SiCl4 pre valve closed
1/20/2011	7:04:29 PM	SiCl4 post valve closed
1/20/2011	7:04:29 PM	Main Vac valve closed
1/20/2011	7:04:29 PM	Bubbler valve closed
1/20/2011	7:04:29 PM	Bypass valve opened
1/20/2011	7:04:29 PM	Helium MFC set to  0.000000
1/20/2011	7:04:29 PM	H2 MFC set to  0.000000
1/20/2011	7:04:29 PM	BCl3 MFC set to  0.000000
1/20/2011	7:04:29 PM	PHl3 MFC set to  0.000000
1/20/2011	7:04:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:04:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:04:29 PM	Tube furnace set to 0
1/20/2011	7:04:29 PM	Helium valve closed
1/20/2011	7:04:29 PM	H2 valve closed
1/20/2011	7:04:29 PM	BCl3 valve closed
1/20/2011	7:04:29 PM	PH3 valve closed
1/20/2011	7:04:29 PM	SiCl4 pre valve closed
1/20/2011	7:04:29 PM	SiCl4 post valve closed
1/20/2011	7:04:29 PM	Bubbler valve closed
1/20/2011	7:04:29 PM	Main Vac valve opened
1/20/2011	7:04:29 PM	Bypass valve opened
1/20/2011	7:04:29 PM	Helium MFC set to  0.000000
1/20/2011	7:04:29 PM	H2 MFC set to  0.000000
1/20/2011	7:04:29 PM	BCl3 MFC set to  0.000000
1/20/2011	7:04:29 PM	PHl3 MFC set to  0.000000
1/20/2011	7:04:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:04:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:04:29 PM	Tube furnace set to 0
1/20/2011	7:04:34 PM	H2 valve closed
1/20/2011	7:04:34 PM	BCl3 valve closed
1/20/2011	7:04:34 PM	PH3 valve closed
1/20/2011	7:04:34 PM	SiCl4 pre valve closed
1/20/2011	7:04:34 PM	SiCl4 post valve closed
1/20/2011	7:04:34 PM	Bubbler valve closed
1/20/2011	7:04:34 PM	Helium valve opened
1/20/2011	7:04:34 PM	Main Vac valve opened
1/20/2011	7:04:34 PM	Bypass valve opened
1/20/2011	7:04:34 PM	Helium MFC set to  100.000000
1/20/2011	7:04:34 PM	H2 MFC set to  0.000000
1/20/2011	7:04:34 PM	BCl3 MFC set to  0.000000
1/20/2011	7:04:34 PM	PHl3 MFC set to  0.000000
1/20/2011	7:04:34 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:04:34 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:04:34 PM	Tube furnace set to 0
1/20/2011	7:04:36 PM	Helium valve closed
1/20/2011	7:04:36 PM	H2 valve closed
1/20/2011	7:04:36 PM	BCl3 valve closed
1/20/2011	7:04:36 PM	PH3 valve closed
1/20/2011	7:04:36 PM	SiCl4 pre valve closed
1/20/2011	7:04:36 PM	SiCl4 post valve closed
1/20/2011	7:04:36 PM	Bubbler valve closed
1/20/2011	7:04:36 PM	Main Vac valve opened
1/20/2011	7:04:36 PM	Bypass valve opened
1/20/2011	7:04:36 PM	Helium MFC set to  0.000000
1/20/2011	7:04:36 PM	H2 MFC set to  0.000000
1/20/2011	7:04:36 PM	BCl3 MFC set to  0.000000
1/20/2011	7:04:36 PM	PHl3 MFC set to  0.000000
1/20/2011	7:04:36 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:04:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:04:36 PM	Tube furnace set to 0
1/20/2011	7:04:39 PM	H2 valve closed
1/20/2011	7:04:39 PM	BCl3 valve closed
1/20/2011	7:04:39 PM	PH3 valve closed
1/20/2011	7:04:39 PM	SiCl4 pre valve closed
1/20/2011	7:04:39 PM	SiCl4 post valve closed
1/20/2011	7:04:39 PM	Bubbler valve closed
1/20/2011	7:04:39 PM	Helium valve opened
1/20/2011	7:04:39 PM	Main Vac valve opened
1/20/2011	7:04:39 PM	Bypass valve opened
1/20/2011	7:04:39 PM	Helium MFC set to  100.000000
1/20/2011	7:04:39 PM	H2 MFC set to  0.000000
1/20/2011	7:04:39 PM	BCl3 MFC set to  0.000000
1/20/2011	7:04:39 PM	PHl3 MFC set to  0.000000
1/20/2011	7:04:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:04:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:04:39 PM	Tube furnace set to 0
1/20/2011	7:05:39 PM	Helium valve closed
1/20/2011	7:05:39 PM	H2 valve closed
1/20/2011	7:05:39 PM	BCl3 valve closed
1/20/2011	7:05:39 PM	PH3 valve closed
1/20/2011	7:05:39 PM	SiCl4 pre valve closed
1/20/2011	7:05:39 PM	SiCl4 post valve closed
1/20/2011	7:05:39 PM	Bubbler valve closed
1/20/2011	7:05:39 PM	Main Vac valve opened
1/20/2011	7:05:39 PM	Bypass valve opened
1/20/2011	7:05:39 PM	Helium MFC set to  0.000000
1/20/2011	7:05:39 PM	H2 MFC set to  0.000000
1/20/2011	7:05:39 PM	BCl3 MFC set to  0.000000
1/20/2011	7:05:39 PM	PHl3 MFC set to  0.000000
1/20/2011	7:05:39 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:05:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:05:39 PM	Tube furnace set to 0
1/20/2011	7:05:46 PM	Run aborted at 7:05 PM
1/20/2011	7:05:47 PM	Helium valve closed
1/20/2011	7:05:47 PM	H2 valve closed
1/20/2011	7:05:47 PM	BCl3 valve closed
1/20/2011	7:05:47 PM	PH3 valve closed
1/20/2011	7:05:47 PM	SiCl4 pre valve closed
1/20/2011	7:05:47 PM	SiCl4 post valve closed
1/20/2011	7:05:47 PM	Bypass valve closed
1/20/2011	7:05:47 PM	Main Vac valve closed
1/20/2011	7:05:47 PM	Bubbler valve closed
1/20/2011	7:05:47 PM	Helium MFC set to  0.000000
1/20/2011	7:05:47 PM	H2 MFC set to  0.000000
1/20/2011	7:05:47 PM	BCl3 MFC set to  0.000000
1/20/2011	7:05:47 PM	PHl3 MFC set to  0.000000
1/20/2011	7:05:47 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:05:47 PM	Tube furnace set to 0
1/20/2011	7:05:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	7:05:49 PM	Bypass valve opened
1/20/2011	7:05:49 PM	Main Vac valve opened
1/20/2011	7:06:38 PM	Recipe started at 7:06 PM
1/20/2011	7:06:38 PM	Helium valve closed
1/20/2011	7:06:38 PM	BCl3 valve closed
1/20/2011	7:06:38 PM	PH3 valve closed
1/20/2011	7:06:38 PM	SiCl4 pre valve closed
1/20/2011	7:06:38 PM	SiCl4 post valve closed
1/20/2011	7:06:38 PM	Main Vac valve closed
1/20/2011	7:06:38 PM	Bypass valve closed
1/20/2011	7:06:38 PM	Bubbler valve closed
1/20/2011	7:06:38 PM	H2 valve opened
1/20/2011	7:06:38 PM	Helium MFC set to  0.000000
1/20/2011	7:06:38 PM	H2 MFC set to  500.000000
1/20/2011	7:06:38 PM	BCl3 MFC set to  0.000000
1/20/2011	7:06:38 PM	PHl3 MFC set to  0.000000
1/20/2011	7:06:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:06:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:06:39 PM	Tube furnace set to 0
1/20/2011	7:07:56 PM	Helium valve closed
1/20/2011	7:07:56 PM	BCl3 valve closed
1/20/2011	7:07:56 PM	PH3 valve closed
1/20/2011	7:07:56 PM	SiCl4 pre valve closed
1/20/2011	7:07:56 PM	SiCl4 post valve closed
1/20/2011	7:07:56 PM	Main Vac valve closed
1/20/2011	7:07:56 PM	Bypass valve closed
1/20/2011	7:07:56 PM	H2 valve opened
1/20/2011	7:07:56 PM	Bubbler valve opened
1/20/2011	7:07:56 PM	Helium MFC set to  0.000000
1/20/2011	7:07:56 PM	H2 MFC set to  500.000000
1/20/2011	7:07:56 PM	BCl3 MFC set to  0.000000
1/20/2011	7:07:56 PM	PHl3 MFC set to  0.000000
1/20/2011	7:07:56 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:07:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:07:56 PM	Tube furnace set to 1000
1/20/2011	7:27:56 PM	Helium valve closed
1/20/2011	7:27:56 PM	BCl3 valve closed
1/20/2011	7:27:56 PM	Main Vac valve closed
1/20/2011	7:27:56 PM	Bypass valve closed
1/20/2011	7:27:56 PM	H2 valve opened
1/20/2011	7:27:56 PM	PH3 valve opened
1/20/2011	7:27:56 PM	SiCl4 pre valve opened
1/20/2011	7:27:56 PM	SiCl4 post valve opened
1/20/2011	7:27:56 PM	Bubbler valve opened
1/20/2011	7:27:56 PM	Helium MFC set to  0.000000
1/20/2011	7:27:56 PM	H2 MFC set to  500.000000
1/20/2011	7:27:56 PM	BCl3 MFC set to  0.000000
1/20/2011	7:27:56 PM	PHl3 MFC set to  0.500000
1/20/2011	7:27:56 PM	SiCl4 MFC set to  50.000000
1/20/2011	7:27:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:27:57 PM	Tube furnace set to 1000
1/20/2011	7:44:57 PM	H2 valve closed
1/20/2011	7:44:57 PM	BCl3 valve closed
1/20/2011	7:44:57 PM	PH3 valve closed
1/20/2011	7:44:57 PM	SiCl4 pre valve closed
1/20/2011	7:44:57 PM	SiCl4 post valve closed
1/20/2011	7:44:57 PM	Main Vac valve closed
1/20/2011	7:44:57 PM	Bypass valve closed
1/20/2011	7:44:57 PM	Helium valve opened
1/20/2011	7:44:57 PM	Bubbler valve opened
1/20/2011	7:44:57 PM	Helium MFC set to  500.000000
1/20/2011	7:44:57 PM	H2 MFC set to  0.000000
1/20/2011	7:44:57 PM	BCl3 MFC set to  0.000000
1/20/2011	7:44:57 PM	PHl3 MFC set to  0.000000
1/20/2011	7:44:57 PM	SiCl4 MFC set to  0.000000
1/20/2011	7:44:57 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	7:44:57 PM	Tube furnace set to 0
1/20/2011	8:04:57 PM	Helium valve closed
1/20/2011	8:04:57 PM	H2 valve closed
1/20/2011	8:04:57 PM	BCl3 valve closed
1/20/2011	8:04:57 PM	PH3 valve closed
1/20/2011	8:04:57 PM	SiCl4 pre valve closed
1/20/2011	8:04:57 PM	SiCl4 post valve closed
1/20/2011	8:04:57 PM	Main Vac valve closed
1/20/2011	8:04:57 PM	Bypass valve closed
1/20/2011	8:04:57 PM	Bubbler valve closed
1/20/2011	8:04:57 PM	Helium MFC set to  0.000000
1/20/2011	8:04:57 PM	H2 MFC set to  0.000000
1/20/2011	8:04:57 PM	BCl3 MFC set to  0.000000
1/20/2011	8:04:57 PM	PHl3 MFC set to  0.000000
1/20/2011	8:04:57 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:04:57 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:04:57 PM	Tube furnace set to 0
1/20/2011	8:04:57 PM	Run finished at 8:04 PM
1/20/2011	8:07:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	8:07:29 PM	Recipe started at 8:07 PM
1/20/2011	8:07:29 PM	H2 valve closed
1/20/2011	8:07:29 PM	BCl3 valve closed
1/20/2011	8:07:29 PM	PH3 valve closed
1/20/2011	8:07:29 PM	SiCl4 pre valve closed
1/20/2011	8:07:29 PM	SiCl4 post valve closed
1/20/2011	8:07:29 PM	Main Vac valve closed
1/20/2011	8:07:29 PM	Bypass valve closed
1/20/2011	8:07:29 PM	Bubbler valve closed
1/20/2011	8:07:29 PM	Helium valve opened
1/20/2011	8:07:29 PM	Helium MFC set to  500.000000
1/20/2011	8:07:29 PM	H2 MFC set to  0.000000
1/20/2011	8:07:29 PM	BCl3 MFC set to  0.000000
1/20/2011	8:07:29 PM	PHl3 MFC set to  0.000000
1/20/2011	8:07:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:07:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:07:29 PM	Tube furnace set to 0
1/20/2011	8:07:29 PM	Helium valve closed
1/20/2011	8:07:29 PM	H2 valve closed
1/20/2011	8:07:29 PM	BCl3 valve closed
1/20/2011	8:07:29 PM	PH3 valve closed
1/20/2011	8:07:29 PM	SiCl4 pre valve closed
1/20/2011	8:07:29 PM	SiCl4 post valve closed
1/20/2011	8:07:29 PM	Main Vac valve closed
1/20/2011	8:07:29 PM	Bypass valve closed
1/20/2011	8:07:29 PM	Bubbler valve closed
1/20/2011	8:07:29 PM	Helium MFC set to  0.000000
1/20/2011	8:07:29 PM	H2 MFC set to  0.000000
1/20/2011	8:07:29 PM	BCl3 MFC set to  0.000000
1/20/2011	8:07:29 PM	PHl3 MFC set to  0.000000
1/20/2011	8:07:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:07:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:07:30 PM	Tube furnace set to 0
1/20/2011	8:07:30 PM	Run finished at 8:07 PM
1/20/2011	8:07:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2011	8:09:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	8:09:29 PM	Recipe started at 8:09 PM
1/20/2011	8:09:29 PM	Helium valve closed
1/20/2011	8:09:29 PM	H2 valve closed
1/20/2011	8:09:29 PM	BCl3 valve closed
1/20/2011	8:09:29 PM	PH3 valve closed
1/20/2011	8:09:29 PM	SiCl4 pre valve closed
1/20/2011	8:09:29 PM	SiCl4 post valve closed
1/20/2011	8:09:29 PM	Main Vac valve closed
1/20/2011	8:09:29 PM	Bubbler valve closed
1/20/2011	8:09:29 PM	Bypass valve opened
1/20/2011	8:09:29 PM	Helium MFC set to  0.000000
1/20/2011	8:09:29 PM	H2 MFC set to  0.000000
1/20/2011	8:09:29 PM	BCl3 MFC set to  0.000000
1/20/2011	8:09:29 PM	PHl3 MFC set to  0.000000
1/20/2011	8:09:29 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:09:29 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:09:29 PM	Tube furnace set to 0
1/20/2011	8:09:58 PM	Helium valve closed
1/20/2011	8:09:58 PM	H2 valve closed
1/20/2011	8:09:58 PM	BCl3 valve closed
1/20/2011	8:09:58 PM	PH3 valve closed
1/20/2011	8:09:58 PM	SiCl4 pre valve closed
1/20/2011	8:09:58 PM	SiCl4 post valve closed
1/20/2011	8:09:58 PM	Bubbler valve closed
1/20/2011	8:09:59 PM	Main Vac valve opened
1/20/2011	8:09:59 PM	Bypass valve opened
1/20/2011	8:09:59 PM	Helium MFC set to  0.000000
1/20/2011	8:09:59 PM	H2 MFC set to  0.000000
1/20/2011	8:09:59 PM	BCl3 MFC set to  0.000000
1/20/2011	8:09:59 PM	PHl3 MFC set to  0.000000
1/20/2011	8:09:59 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:09:59 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:09:59 PM	Tube furnace set to 0
1/20/2011	8:09:59 PM	Run finished at 8:09 PM
1/20/2011	8:09:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2011	8:10:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	8:10:35 PM	Recipe started at 8:10 PM
1/20/2011	8:10:35 PM	Helium valve closed
1/20/2011	8:10:35 PM	H2 valve closed
1/20/2011	8:10:35 PM	BCl3 valve closed
1/20/2011	8:10:35 PM	PH3 valve closed
1/20/2011	8:10:35 PM	SiCl4 pre valve closed
1/20/2011	8:10:35 PM	SiCl4 post valve closed
1/20/2011	8:10:35 PM	Main Vac valve closed
1/20/2011	8:10:35 PM	Bubbler valve closed
1/20/2011	8:10:35 PM	Bypass valve opened
1/20/2011	8:10:35 PM	Helium MFC set to  0.000000
1/20/2011	8:10:35 PM	H2 MFC set to  0.000000
1/20/2011	8:10:35 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:35 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:35 PM	Tube furnace set to 0
1/20/2011	8:10:35 PM	Helium valve closed
1/20/2011	8:10:35 PM	H2 valve closed
1/20/2011	8:10:35 PM	BCl3 valve closed
1/20/2011	8:10:35 PM	PH3 valve closed
1/20/2011	8:10:35 PM	SiCl4 pre valve closed
1/20/2011	8:10:35 PM	SiCl4 post valve closed
1/20/2011	8:10:35 PM	Bubbler valve closed
1/20/2011	8:10:35 PM	Main Vac valve opened
1/20/2011	8:10:35 PM	Bypass valve opened
1/20/2011	8:10:35 PM	Helium MFC set to  0.000000
1/20/2011	8:10:35 PM	H2 MFC set to  0.000000
1/20/2011	8:10:35 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:35 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:35 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:35 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:35 PM	Tube furnace set to 0
1/20/2011	8:10:38 PM	H2 valve closed
1/20/2011	8:10:38 PM	BCl3 valve closed
1/20/2011	8:10:38 PM	PH3 valve closed
1/20/2011	8:10:38 PM	SiCl4 pre valve closed
1/20/2011	8:10:38 PM	SiCl4 post valve closed
1/20/2011	8:10:38 PM	Bubbler valve closed
1/20/2011	8:10:38 PM	Helium valve opened
1/20/2011	8:10:38 PM	Main Vac valve opened
1/20/2011	8:10:38 PM	Bypass valve opened
1/20/2011	8:10:38 PM	Helium MFC set to  100.000000
1/20/2011	8:10:38 PM	H2 MFC set to  0.000000
1/20/2011	8:10:38 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:38 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:38 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:38 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:38 PM	Tube furnace set to 0
1/20/2011	8:10:41 PM	Helium valve closed
1/20/2011	8:10:41 PM	H2 valve closed
1/20/2011	8:10:41 PM	BCl3 valve closed
1/20/2011	8:10:41 PM	PH3 valve closed
1/20/2011	8:10:41 PM	SiCl4 pre valve closed
1/20/2011	8:10:41 PM	SiCl4 post valve closed
1/20/2011	8:10:41 PM	Bubbler valve closed
1/20/2011	8:10:41 PM	Main Vac valve opened
1/20/2011	8:10:41 PM	Bypass valve opened
1/20/2011	8:10:41 PM	Helium MFC set to  0.000000
1/20/2011	8:10:41 PM	H2 MFC set to  0.000000
1/20/2011	8:10:41 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:41 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:41 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:41 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:41 PM	Tube furnace set to 0
1/20/2011	8:10:42 PM	H2 valve closed
1/20/2011	8:10:42 PM	BCl3 valve closed
1/20/2011	8:10:42 PM	PH3 valve closed
1/20/2011	8:10:42 PM	SiCl4 pre valve closed
1/20/2011	8:10:42 PM	SiCl4 post valve closed
1/20/2011	8:10:42 PM	Bubbler valve closed
1/20/2011	8:10:42 PM	Helium valve opened
1/20/2011	8:10:42 PM	Main Vac valve opened
1/20/2011	8:10:42 PM	Bypass valve opened
1/20/2011	8:10:42 PM	Helium MFC set to  100.000000
1/20/2011	8:10:42 PM	H2 MFC set to  0.000000
1/20/2011	8:10:42 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:42 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:42 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:42 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:42 PM	Tube furnace set to 0
1/20/2011	8:10:42 PM	Helium valve closed
1/20/2011	8:10:42 PM	H2 valve closed
1/20/2011	8:10:42 PM	BCl3 valve closed
1/20/2011	8:10:42 PM	PH3 valve closed
1/20/2011	8:10:42 PM	SiCl4 pre valve closed
1/20/2011	8:10:42 PM	SiCl4 post valve closed
1/20/2011	8:10:42 PM	Bubbler valve closed
1/20/2011	8:10:42 PM	Main Vac valve opened
1/20/2011	8:10:42 PM	Bypass valve opened
1/20/2011	8:10:42 PM	Helium MFC set to  0.000000
1/20/2011	8:10:42 PM	H2 MFC set to  0.000000
1/20/2011	8:10:42 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:42 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:42 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:42 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:42 PM	Tube furnace set to 0
1/20/2011	8:10:43 PM	H2 valve closed
1/20/2011	8:10:43 PM	BCl3 valve closed
1/20/2011	8:10:43 PM	PH3 valve closed
1/20/2011	8:10:43 PM	SiCl4 pre valve closed
1/20/2011	8:10:43 PM	SiCl4 post valve closed
1/20/2011	8:10:43 PM	Bubbler valve closed
1/20/2011	8:10:43 PM	Helium valve opened
1/20/2011	8:10:43 PM	Main Vac valve opened
1/20/2011	8:10:43 PM	Bypass valve opened
1/20/2011	8:10:43 PM	Helium MFC set to  100.000000
1/20/2011	8:10:43 PM	H2 MFC set to  0.000000
1/20/2011	8:10:43 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:43 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:43 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:43 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:43 PM	Tube furnace set to 0
1/20/2011	8:10:44 PM	Helium valve closed
1/20/2011	8:10:44 PM	H2 valve closed
1/20/2011	8:10:44 PM	BCl3 valve closed
1/20/2011	8:10:44 PM	PH3 valve closed
1/20/2011	8:10:44 PM	SiCl4 pre valve closed
1/20/2011	8:10:44 PM	SiCl4 post valve closed
1/20/2011	8:10:44 PM	Bubbler valve closed
1/20/2011	8:10:44 PM	Main Vac valve opened
1/20/2011	8:10:44 PM	Bypass valve opened
1/20/2011	8:10:44 PM	Helium MFC set to  0.000000
1/20/2011	8:10:44 PM	H2 MFC set to  0.000000
1/20/2011	8:10:44 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:44 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:44 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:44 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:44 PM	Tube furnace set to 0
1/20/2011	8:10:45 PM	H2 valve closed
1/20/2011	8:10:45 PM	BCl3 valve closed
1/20/2011	8:10:45 PM	PH3 valve closed
1/20/2011	8:10:45 PM	SiCl4 pre valve closed
1/20/2011	8:10:45 PM	SiCl4 post valve closed
1/20/2011	8:10:45 PM	Bubbler valve closed
1/20/2011	8:10:45 PM	Helium valve opened
1/20/2011	8:10:45 PM	Main Vac valve opened
1/20/2011	8:10:45 PM	Bypass valve opened
1/20/2011	8:10:45 PM	Helium MFC set to  100.000000
1/20/2011	8:10:45 PM	H2 MFC set to  0.000000
1/20/2011	8:10:45 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:45 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:45 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:46 PM	Tube furnace set to 0
1/20/2011	8:10:46 PM	Helium valve closed
1/20/2011	8:10:46 PM	H2 valve closed
1/20/2011	8:10:46 PM	BCl3 valve closed
1/20/2011	8:10:46 PM	PH3 valve closed
1/20/2011	8:10:46 PM	SiCl4 pre valve closed
1/20/2011	8:10:46 PM	SiCl4 post valve closed
1/20/2011	8:10:46 PM	Bubbler valve closed
1/20/2011	8:10:46 PM	Main Vac valve opened
1/20/2011	8:10:46 PM	Bypass valve opened
1/20/2011	8:10:46 PM	Helium MFC set to  0.000000
1/20/2011	8:10:46 PM	H2 MFC set to  0.000000
1/20/2011	8:10:46 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:46 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:46 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:46 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:46 PM	Tube furnace set to 0
1/20/2011	8:10:47 PM	H2 valve closed
1/20/2011	8:10:47 PM	BCl3 valve closed
1/20/2011	8:10:47 PM	PH3 valve closed
1/20/2011	8:10:47 PM	SiCl4 pre valve closed
1/20/2011	8:10:47 PM	SiCl4 post valve closed
1/20/2011	8:10:47 PM	Bubbler valve closed
1/20/2011	8:10:47 PM	Helium valve opened
1/20/2011	8:10:47 PM	Main Vac valve opened
1/20/2011	8:10:47 PM	Bypass valve opened
1/20/2011	8:10:47 PM	Helium MFC set to  100.000000
1/20/2011	8:10:47 PM	H2 MFC set to  0.000000
1/20/2011	8:10:47 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:47 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:47 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:47 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:47 PM	Tube furnace set to 0
1/20/2011	8:10:48 PM	Helium valve closed
1/20/2011	8:10:48 PM	H2 valve closed
1/20/2011	8:10:48 PM	BCl3 valve closed
1/20/2011	8:10:48 PM	PH3 valve closed
1/20/2011	8:10:48 PM	SiCl4 pre valve closed
1/20/2011	8:10:48 PM	SiCl4 post valve closed
1/20/2011	8:10:48 PM	Bubbler valve closed
1/20/2011	8:10:48 PM	Main Vac valve opened
1/20/2011	8:10:48 PM	Bypass valve opened
1/20/2011	8:10:48 PM	Helium MFC set to  0.000000
1/20/2011	8:10:48 PM	H2 MFC set to  0.000000
1/20/2011	8:10:48 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:48 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:48 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:48 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:48 PM	Tube furnace set to 0
1/20/2011	8:10:50 PM	H2 valve closed
1/20/2011	8:10:50 PM	BCl3 valve closed
1/20/2011	8:10:50 PM	PH3 valve closed
1/20/2011	8:10:50 PM	SiCl4 pre valve closed
1/20/2011	8:10:50 PM	SiCl4 post valve closed
1/20/2011	8:10:50 PM	Bubbler valve closed
1/20/2011	8:10:50 PM	Helium valve opened
1/20/2011	8:10:50 PM	Main Vac valve opened
1/20/2011	8:10:50 PM	Bypass valve opened
1/20/2011	8:10:50 PM	Helium MFC set to  100.000000
1/20/2011	8:10:50 PM	H2 MFC set to  0.000000
1/20/2011	8:10:50 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:50 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:50 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:50 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:50 PM	Tube furnace set to 0
1/20/2011	8:10:51 PM	Helium valve closed
1/20/2011	8:10:51 PM	H2 valve closed
1/20/2011	8:10:51 PM	BCl3 valve closed
1/20/2011	8:10:51 PM	PH3 valve closed
1/20/2011	8:10:51 PM	SiCl4 pre valve closed
1/20/2011	8:10:51 PM	SiCl4 post valve closed
1/20/2011	8:10:51 PM	Bubbler valve closed
1/20/2011	8:10:51 PM	Main Vac valve opened
1/20/2011	8:10:51 PM	Bypass valve opened
1/20/2011	8:10:51 PM	Helium MFC set to  0.000000
1/20/2011	8:10:51 PM	H2 MFC set to  0.000000
1/20/2011	8:10:51 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:51 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:51 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:51 PM	Tube furnace set to 0
1/20/2011	8:10:51 PM	H2 valve closed
1/20/2011	8:10:51 PM	BCl3 valve closed
1/20/2011	8:10:51 PM	PH3 valve closed
1/20/2011	8:10:51 PM	SiCl4 pre valve closed
1/20/2011	8:10:51 PM	SiCl4 post valve closed
1/20/2011	8:10:51 PM	Bubbler valve closed
1/20/2011	8:10:51 PM	Helium valve opened
1/20/2011	8:10:51 PM	Main Vac valve opened
1/20/2011	8:10:51 PM	Bypass valve opened
1/20/2011	8:10:51 PM	Helium MFC set to  100.000000
1/20/2011	8:10:51 PM	H2 MFC set to  0.000000
1/20/2011	8:10:51 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:51 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:51 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:51 PM	Tube furnace set to 0
1/20/2011	8:10:52 PM	Helium valve closed
1/20/2011	8:10:52 PM	H2 valve closed
1/20/2011	8:10:52 PM	BCl3 valve closed
1/20/2011	8:10:52 PM	PH3 valve closed
1/20/2011	8:10:52 PM	SiCl4 pre valve closed
1/20/2011	8:10:52 PM	SiCl4 post valve closed
1/20/2011	8:10:52 PM	Bubbler valve closed
1/20/2011	8:10:52 PM	Main Vac valve opened
1/20/2011	8:10:52 PM	Bypass valve opened
1/20/2011	8:10:52 PM	Helium MFC set to  0.000000
1/20/2011	8:10:52 PM	H2 MFC set to  0.000000
1/20/2011	8:10:52 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:52 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:52 PM	Tube furnace set to 0
1/20/2011	8:10:52 PM	H2 valve closed
1/20/2011	8:10:52 PM	BCl3 valve closed
1/20/2011	8:10:52 PM	PH3 valve closed
1/20/2011	8:10:52 PM	SiCl4 pre valve closed
1/20/2011	8:10:52 PM	SiCl4 post valve closed
1/20/2011	8:10:52 PM	Bubbler valve closed
1/20/2011	8:10:52 PM	Helium valve opened
1/20/2011	8:10:52 PM	Main Vac valve opened
1/20/2011	8:10:52 PM	Bypass valve opened
1/20/2011	8:10:52 PM	Helium MFC set to  100.000000
1/20/2011	8:10:52 PM	H2 MFC set to  0.000000
1/20/2011	8:10:52 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:52 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:52 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:52 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:52 PM	Tube furnace set to 0
1/20/2011	8:10:53 PM	Helium valve closed
1/20/2011	8:10:53 PM	H2 valve closed
1/20/2011	8:10:53 PM	BCl3 valve closed
1/20/2011	8:10:53 PM	PH3 valve closed
1/20/2011	8:10:53 PM	SiCl4 pre valve closed
1/20/2011	8:10:53 PM	SiCl4 post valve closed
1/20/2011	8:10:53 PM	Bubbler valve closed
1/20/2011	8:10:53 PM	Main Vac valve opened
1/20/2011	8:10:53 PM	Bypass valve opened
1/20/2011	8:10:53 PM	Helium MFC set to  0.000000
1/20/2011	8:10:53 PM	H2 MFC set to  0.000000
1/20/2011	8:10:53 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:53 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:53 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:53 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:53 PM	Tube furnace set to 0
1/20/2011	8:10:55 PM	H2 valve closed
1/20/2011	8:10:55 PM	BCl3 valve closed
1/20/2011	8:10:55 PM	PH3 valve closed
1/20/2011	8:10:55 PM	SiCl4 pre valve closed
1/20/2011	8:10:55 PM	SiCl4 post valve closed
1/20/2011	8:10:55 PM	Bubbler valve closed
1/20/2011	8:10:55 PM	Helium valve opened
1/20/2011	8:10:55 PM	Main Vac valve opened
1/20/2011	8:10:55 PM	Bypass valve opened
1/20/2011	8:10:55 PM	Helium MFC set to  100.000000
1/20/2011	8:10:55 PM	H2 MFC set to  0.000000
1/20/2011	8:10:55 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:55 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:55 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:55 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:55 PM	Tube furnace set to 0
1/20/2011	8:10:56 PM	Helium valve closed
1/20/2011	8:10:56 PM	H2 valve closed
1/20/2011	8:10:56 PM	BCl3 valve closed
1/20/2011	8:10:56 PM	PH3 valve closed
1/20/2011	8:10:56 PM	SiCl4 pre valve closed
1/20/2011	8:10:56 PM	SiCl4 post valve closed
1/20/2011	8:10:56 PM	Bubbler valve closed
1/20/2011	8:10:56 PM	Main Vac valve opened
1/20/2011	8:10:56 PM	Bypass valve opened
1/20/2011	8:10:56 PM	Helium MFC set to  0.000000
1/20/2011	8:10:56 PM	H2 MFC set to  0.000000
1/20/2011	8:10:56 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:56 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:56 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:56 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:56 PM	Tube furnace set to 0
1/20/2011	8:10:57 PM	H2 valve closed
1/20/2011	8:10:57 PM	BCl3 valve closed
1/20/2011	8:10:57 PM	PH3 valve closed
1/20/2011	8:10:57 PM	SiCl4 pre valve closed
1/20/2011	8:10:57 PM	SiCl4 post valve closed
1/20/2011	8:10:57 PM	Bubbler valve closed
1/20/2011	8:10:57 PM	Helium valve opened
1/20/2011	8:10:57 PM	Main Vac valve opened
1/20/2011	8:10:57 PM	Bypass valve opened
1/20/2011	8:10:57 PM	Helium MFC set to  100.000000
1/20/2011	8:10:57 PM	H2 MFC set to  0.000000
1/20/2011	8:10:57 PM	BCl3 MFC set to  0.000000
1/20/2011	8:10:57 PM	PHl3 MFC set to  0.000000
1/20/2011	8:10:57 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:10:57 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:10:57 PM	Tube furnace set to 0
1/20/2011	8:11:41 PM	Helium valve closed
1/20/2011	8:11:41 PM	H2 valve closed
1/20/2011	8:11:41 PM	BCl3 valve closed
1/20/2011	8:11:41 PM	PH3 valve closed
1/20/2011	8:11:41 PM	SiCl4 pre valve closed
1/20/2011	8:11:41 PM	SiCl4 post valve closed
1/20/2011	8:11:41 PM	Bubbler valve closed
1/20/2011	8:11:41 PM	Main Vac valve opened
1/20/2011	8:11:41 PM	Bypass valve opened
1/20/2011	8:11:41 PM	Helium MFC set to  0.000000
1/20/2011	8:11:41 PM	H2 MFC set to  0.000000
1/20/2011	8:11:41 PM	BCl3 MFC set to  0.000000
1/20/2011	8:11:41 PM	PHl3 MFC set to  0.000000
1/20/2011	8:11:41 PM	SiCl4 MFC set to  0.000000
1/20/2011	8:11:41 PM	Bypass solenoid MFC set to  0.000000
1/20/2011	8:11:41 PM	Tube furnace set to 0
1/20/2011	8:11:42 PM	Run finished at 8:11 PM
1/20/2011	8:11:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/20/2011	8:12:05 PM	Bypass valve closed
1/20/2011	8:12:06 PM	Main Vac valve closed
1/20/2011	8:12:14 PM	Bypass valve opened
1/20/2011	8:12:15 PM	Main Vac valve opened
